Sensor and sensor device
US-2021396659-A1 · Dec 23, 2021 · US
US12455269B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12455269-B2 |
| Application number | US-202318107763-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 9, 2023 |
| Priority date | Jul 21, 2022 |
| Publication date | Oct 28, 2025 |
| Grant date | Oct 28, 2025 |
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The disclosure relates to a hydrogen sensing device capable of visually detecting the presence of hydrogen through a color change according to a water-forming reaction by inducing the water-forming reaction between hydrogen and oxygen at the interface between a lower metal layer and a dielectric layer under a structure in which a lower metal layer, a dielectric layer, and an upper metal layer are sequentially stacked, and visually sensing the color change caused by the generated water.
Opening claim text (preview).
What is claimed is: 1. A hydrogen sensing device which visually identifies presence of hydrogen through a color change according to a water-forming reaction, the hydrogen sensing device comprising: a structure in which a lower metal layer, a dielectric layer, and an upper metal layer are sequentially stacked on a substrate, wherein the structure has a structural color, in an environment where hydrogen and oxygen exist, water is formed by a reaction of the hydrogen and the oxygen at an interface between the dielectric layer and the lower metal layer, and the structural color is changed when the water is formed, wherein in the environment where the hydrogen and the oxygen exist, the water is formed by the reaction of the hydrogen and the oxygen at the interface between the dielectric layer and the lower metal layer, wherein the water is formed to a uniform thickness at the interface between the dielectric layer and the lower metal layer, wherein the water is formed in a case that the hydrogen sensing device is exposed to the hydrogen in advance and the oxygen is supplied in a state in which the lower metal layer is hydrogenated. 2. The hydrogen sensing device of claim 1 , wherein each of the upper metal layer and the dielectric layer includes a material structure through which the hydrogen and the oxygen pass. 3. The hydrogen sensing device of claim 1 , wherein the lower metal layer includes a material that activates a catalytic reaction of the hydrogen and the oxygen. 4. The hydrogen sensing device of claim 1 , wherein the upper metal layer includes a nano-metal thin film layer in a form of a network through which the hydrogen and the oxygen pass. 5. The hydrogen sensing device of claim 1 , wherein the lower metal layer includes at least one of Pd, Pt, Ir, and Ru. 6. The hydrogen sensing device of claim 1 , wherein the dielectric layer includes a porous polymer film through which the hydrogen and the oxygen pass. 7. The hydrogen sensing device of claim 1 , wherein the upper metal layer includes a material that activates a catalytic reaction of the hydrogen and the oxygen. 8. The hydrogen sensing device of claim 1 , wherein the upper metal layer includes at least one of Al, Cu, Ni, Ag and Au. 9. The hydrogen sensing device of claim 1 , wherein the water is formed in a uniform thickness at the interface between the dielectric layer and the lower metal layer, and the structural color is changed to another structural color by a Fabry-Perot resonance effect. 10. A hydrogen sensing device which visually identifies presence of hydrogen through a color change according to a water-forming reaction, the hydrogen sensing device comprising: a structure in which a lower metal layer, a dielectric layer, and an upper metal layer are sequentially stacked on a substrate, wherein the structure has a structural color, in an environment where hydrogen and oxygen exist, water is formed by a reaction of the hydrogen and the oxygen at an interface between the dielectric layer and the lower metal layer, and the structural color is changed when the water is formed, wherein the dielectric layer includes at least one of poly{perfluoro(butenyl vinyl ether)} (PBVE), and perfluoro(2,2-dimethyl-1,3-dioxole) (PDD). 11. A hydrogen sensing device which visually identifies presence of hydrogen through a color change according to a water-forming reaction, the hydrogen sensing device comprising: a structure in which a lower metal layer, a dielectric layer, and an upper metal layer are sequentially stacked on a substrate, wherein the structure has a structural color, in an environment where hydrogen and oxygen exist, water is formed by a reaction of the hydrogen and the oxygen at an interface between the dielectric layer and the lower metal layer, and the structural color is changed when the water is formed, wherein in the environment where the hydrogen and the oxygen exist, the water is formed by the reaction of the hydrogen and the oxygen at the interface between the dielectric layer and the lower metal layer, the water is formed to a non-uniform thickness at the interface between the dielectric layer and the lower metal layer. 12. The hydrogen sensing device of claim 11 , wherein diffuse reflection of light is caused by the water formed to the non-uniform thickness, and the structural color is lost due to the diffuse reflection of the light. 13. The hydrogen sensing device of claim 11 , wherein the water is formed in a case in which the hydrogen is supplied in a state in which the hydrogen sensing device is previously exposed to the oxygen.
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