Optical comb measuring apparatus

Patent metadata

Field	Value
Publication number	US-12455235-B2
Application number	US-202318387966-A
Country	US
Kind code	B2
Filing date	Nov 8, 2023
Priority date	Feb 1, 2023
Publication date	Oct 28, 2025
Grant date	Oct 28, 2025

Abstract

An optical comb measuring apparatus that measures an irradiation target having multiple types of measuring targets, includes: an interference signal acquiring section; and a frequency spectrum measuring section. The interference signal acquiring section acquires an interference signal between a post-irradiation signal comb obtained by irradiating the irradiation target with a pre-irradiation signal comb and a local comb set to be different from a repetition frequency of the pre-irradiation signal comb by a predetermined differential frequency. The frequency spectrum measuring section measures a frequency spectrum of a result of acquisition by the interference signal acquiring section. Either one or both of the post-irradiation signal comb and the local comb provided to the interference signal acquiring section have only components within a plurality of required bands including all of predetermined frequencies. Frequency bands of the interference signal corresponding to the plurality of respective required bands have no areas overlapping each other.

First claim

What is claimed is:

1 . An optical comb measuring apparatus that measures an irradiation target having multiple types of measuring targets, comprising:
an interference signal acquiring section arranged to acquire an interference signal between a post-irradiation signal comb obtained by irradiating the irradiation target with a pre-irradiation signal comb and a local comb set to be different from a repetition frequency of the pre-irradiation signal comb by a predetermined differential frequency; and a frequency spectrum measuring section arranged to measure a frequency spectrum of a result of acquisition by the interference signal acquiring section, wherein the pre-irradiation signal comb, the post-irradiation signal comb, and the local comb are optical combs, a power of light with which the irradiation target is irradiated varies at predetermined frequencies corresponding to the respective measuring targets, a plurality of measurable bands, each of which is a frequency range of the post-irradiation signal comb in which a single frequency of the post-irradiation signal comb corresponds to a frequency of the interference signal, each include one or more of the predetermined frequencies, either one or both of the post-irradiation signal comb and the local comb provided to the interference signal acquiring section have only components within a plurality of required bands including all of the predetermined frequencies, and frequency bands of the interference signal corresponding to the plurality of respective required bands have no areas overlapping each other.

2 . The optical comb measuring apparatus according to claim 1 , further comprising
a multiple-band passage section arranged to receive either one or both of the pre-irradiation signal comb and the local comb and cause components of the plurality of required bands to pass therethrough.

3 . The optical comb measuring apparatus according to claim 1 , further comprising
a multiple-band passage section arranged to receive either one or both of the post-irradiation signal comb and the local comb and cause components of the plurality of required bands to pass therethrough.

4 . The optical comb measuring apparatus according to claim 1 , wherein
either one or both of the pre-irradiation signal comb and the local comb have only components within a plurality of required bands including all of the predetermined frequencies.

5 . The optical comb measuring apparatus according to claim 1 , wherein
each one of the measurable bands includes each one of the predetermined frequencies.

6 . The optical comb measuring apparatus according to claim 1 , wherein
any one or more of the measurable bands include a plurality of the predetermined frequencies.

7 . The optical comb measuring apparatus according to claim 1 , wherein
the irradiation target is gas.

8 . The optical comb measuring apparatus according to claim 7 , wherein
the irradiation target is housed in a gas cell.

9 . The optical comb measuring apparatus according to claim 7 , wherein
the apparatus is arranged to measure a concentration of each measuring target.

10 . The optical comb measuring apparatus according to claim 1 , wherein
the irradiation target is liquid or solid.

11 . The optical comb measuring apparatus according to claim 10 , wherein
the apparatus is arranged to measure a presence of each measuring target.

12 . The optical comb measuring apparatus according to claim 1 , wherein
the post-irradiation signal comb and the local comb are provided via a polarization maintaining fiber to the interference signal acquiring section.

13 . The optical comb measuring apparatus according to claim 1 , wherein
the interference signal acquiring section is an optical coupler.

14 . The optical comb measuring apparatus according to claim 1 , wherein
the interference signal acquiring section is a power beam splitter.

Assignees

• Advantest Corp

Inventors

• Sakurai Takao

Classifications

• G01B9/02012

  using temporal intensity variation · CPC title

• G01B9/02008

  by using a frequency comb · CPC title

• G01B9/02007

  Two or more frequencies or sources used for interferometric measurement (using only beat G01B9/02003) · CPC title

• G01N33/0027 Primary

  concerning the detector · CPC title

• G01J3/45

  Interferometric spectrometry · CPC title