Vacuum-environment robot with integrated payload gripper

Patent metadata

Field	Value
Publication number	US-12441006-B2
Application number	US-202217678180-A
Country	US
Kind code	B2
Filing date	Feb 23, 2022
Priority date	Feb 24, 2021
Publication date	Oct 14, 2025
Grant date	Oct 14, 2025

Abstract

An apparatus includes a drive; a movable arm connected to the drive and having a first link rotatable about the drive at a first rotary joint, a first actuator configured to cause a rotation of the first link about the first rotary joint, at least one second link connected to the first link at a second rotary joint, at least one second actuator configured to cause a rotation of the second link about the second rotary joint, and at least one gripper on the second link, the gripper being configured to carry a payload. The gripper includes a dielectric substrate, at least one electrode disposed on the dielectric substrate, the electrode being configured to produce an attractive force on a surface of the electrode to attract the payload, and a main electronic module configured to apply a voltage to the electrode from a source of current.

First claim

What is claimed is:

1. An apparatus, comprising:
a drive;
a movable arm connected to the drive, the movable arm comprising,
a first link rotatable about the drive at a first rotary joint,
a first actuator configured to cause a rotation of the first link about the first rotary joint,
at least one second link connected to the first link at a second rotary joint,
at least one second actuator configured to cause a rotation of the at least one second link about the second rotary joint, and
at least one gripper on the at least one second link, the at least one gripper being configured to carry a payload, the at least one gripper comprising,
a dielectric substrate,
at least one electrode disposed on the dielectric substrate, the at least one electrode being configured to cause a charge migration from the at least one electrode to the dielectric substrate to produce an attractive force on a surface of the dielectric substrate to attract the payload,
a main electronic module configured to apply a voltage to the at least one electrode from a source of current and to produce a control signal; and
an auxiliary electronic module for receiving the control signal from the main electronic module, the auxiliary electronic module being configured to at least control the voltage to the at least one electrode to control the attractive force on the surface of the dielectric substrate and to further at least detect the payload, assess a quality of the at least one gripper on the payload, and communicate a status of the payload to the main electronic module.

2. The apparatus of claim 1 , wherein the source of current comprises an alternating current.

3. The apparatus of claim 1 , further comprising an electrical coupling between the source of current and the at least one electrode.

4. The apparatus of claim 3 , wherein the electrical coupling comprises a pair of inductively coupled coils.

5. The apparatus of claim 3 , wherein the electrical coupling comprises a capacitor having an outer cylindrical electrode annularly arranged and rotatable relative to an inner cylindrical electrode, the outer cylindrical electrode and the inner cylindrical electrode being separated by a gap.

6. The apparatus of claim 3 , wherein the electrical coupling comprises a capacitor having a first disk and a second disk arranged in an axial configuration, the first disk and the second disk being separated by a gap.

7. The apparatus of claim 3 , wherein the electrical coupling steps up a voltage across the at least one electrode.

8. The apparatus of claim 3 , wherein the source of current is a direct current, and wherein the electrical coupling comprises a slip-ring arrangement.

9. The apparatus of claim 8 , wherein the direct current is connected to ground.

10. The apparatus of claim 1 , wherein the main electronic module comprises circuitry configured to produce the control signal to the at least one electrode or to receive a status signal communicating the status of the payload from the at least one electrode.

11. The apparatus of claim 10 , wherein the circuitry comprises a rectifier to convert an alternating current to a direct current.

12. The apparatus of claim 1 , wherein the at least one electrode is embedded into a material of the dielectric substrate.

13. The apparatus of claim 1 , wherein the at least one gripper operates on an electrostatic discharge principle.

14. A method, comprising:
providing a drive;
providing a movable arm connected to the drive, the movable arm comprising,
a first link rotatable about the drive at a first rotary joint,
a first actuator configured to cause a rotation of the first link about the first rotary joint,
at least one second link connected to the first link at a second rotary joint,
at least one second actuator configured to cause a rotation of the at least one second link about the second rotary joint, and
at least one gripper on the at least one second link, the at least one gripper comprising,
a dielectric substrate, and
at least one electrode disposed on the dielectric substrate;

applying a voltage to the at least one electrode with a main electronic module, from a source of current, to cause a charge migration from the at least one electrode to the dielectric substrate to produce an attractive force on the surface of the dielectric substrate to cause an attractive force between the dielectric substrate and a payload adjacent to the dielectric substrate and to be carried by the at least one gripper and to produce a control signal; and
controlling the voltage to the at least one electrode using an auxiliary electronic module to control the attractive force between the dielectric substrate and the payload; and
controlling the produced control signal from the main electronic module to detect the payload, assess a quality of the at least one gripper on the payload, and communicate a status of the payload to the main electronic module.

15. The method of claim 14 , wherein the source of current comprises an alternating current.

16. The method of claim 15 , further comprising rectifying the alternating current to a direct current.

17. The method of claim 14 , further comprising providing an electrical coupling between the source of current and the at least one electrode.

18. The method of claim 17 , comprising inductively coupling the source of current and the at least one electrode using the electrical coupling.

19. The method of claim 18 , further comprising stepping up a voltage across the at least one electrode using the electrical coupling.

20. The method of claim 17 , comprising capacitively coupling the source of current and the at least one electrode using the electrical coupling.

21. The method of claim 14 , wherein applying the current to the at least one electrode comprises applying a direct current.

22. The method of claim 14 , wherein the at least one gripper operates by electrostatic discharge to cause and release the attractive force between the at least one electrode and the payload.

23. An apparatus, comprising:
at least one processor; and
at least one non-transitory memory including computer program code, the at least one memory and the computer program code configured to, with the at least one processor, cause the apparatus at least to perform:
applying a voltage to at least one electrode with a first electronic module, from a source of current, to produce an attractive force on a surface of the electrode to cause a charge migration from the electrode to a low resistivity dielectric material of at least one gripper to cause an attraction between the low resistivity dielectric material and a surface of a payload adjacent to the low resistivity dielectric material, wherein the payload is configured to be carried by the at least one gripper, and to produce a control signal; and
controlling the voltage to the at least one electrode using a second electronic module to control the attractive force on the surface of the electrode; and
controlling the produced control signal from the first electronic module to detect the payload, assess a quality of the at least one gripper on the payload, and communicate a status of the payload to the first electronic module.

24. The apparatus of claim 23 , wherein the source of current comprises an alternating current.

25. The apparatus of claim 24 , wherein the apparatus is further caused to perform rectifying the alternating current to a

Assignees

• Persimmon Tech Corporation

Inventors

• Hosek Martin
• Sah Sripati
• Shukla Himanshu

Classifications

• H10P72/3402

  Mechanical parts of transfer devices · CPC title

• B25J19/0041

  having rotary connection means · CPC title

• B25J9/1612

  characterised by the hand, wrist, grip control · CPC title

• B25J11/0095

  Manipulators transporting wafers · CPC title

• B25J19/0045

  Contactless power transmission, e.g. by magnetic induction · CPC title