Method and apparatus for detecting facet region, wafer producing method, and laser processing apparatus
US-2020150038-A1 · May 14, 2020 · US
US12440944B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12440944-B2 |
| Application number | US-202218053530-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 8, 2022 |
| Priority date | Nov 25, 2021 |
| Publication date | Oct 14, 2025 |
| Grant date | Oct 14, 2025 |
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A grinding apparatus has a grinding wheel fastened to a mount disk connected a spindle by a plurality of bolts. The mount disk has at least three threaded holes and a plurality of protrusions protruding from a mount surface thereof. Each of the bolts includes an externally threaded shank, a neck coupled to the externally threaded shank, and an engaging flange coupled to the neck and extending radially outwardly. The grinding wheel includes an annular open hole defined in a mating surface of an annular base for mating with the mount surface, an annular slot that is wider than the annular open hole and is fluidly connected to the annular open hole, at least three insertion holes in the annular open hole for allowing the engaging flange to be inserted into the annular slot, and a plurality of protrusion insertion holes for receiving the engaging flanges of the bolts.
Opening claim text (preview).
What is claimed is: 1. A grinding apparatus for grinding a workpiece, comprising: a chuck table for holding the workpiece thereon; a spindle rotatable about a central axis thereof; a mount disk connected to a distal end of the spindle and having a mount surface; and a grinding wheel having an annular base having a mating surface for mating with the mount surface of the mount disk and a plurality of grindstones fixed in an annular array to the annular base, the grinding wheel being fastened to the mount disk by a plurality of bolts, wherein the mount disk has at least three internally threaded holes defined through the mount disk at equal spaced intervals circumferentially on the mount disk and extending through the mount disk between upper and lower surfaces of the mount disk, and a plurality of protrusions protruding from the mount surface, each bolt of the plurality of bolts includes an externally threaded shank, a neck coupled to a distal end of the respective externally threaded shank, and an engaging flange coupled to a distal end of the respective neck and extending radially outwardly from the respective neck, the grinding wheel includes an annular open hole defined in the mating surface, an annular slot defined in the annular base that is wider than the annular open hole and vertically fluidly connected to the annular open hole, at least three insertion holes defined in the annular open hole for allowing a respective engaging flange of each of the plurality of bolts to be inserted through a respective insertion hole of the at least three insertion holes into the annular slot, and a plurality of protrusion insertion holes defined in the annular open hole for receiving the plurality of protrusions therein, respectively, and, for mounting the grinding wheel on the mount disk, each of the externally threaded shanks of the plurality of bolts are configured to be threaded into a respective internally threaded hole of the internally threaded holes in the mount disk, with the respective engaging flanges projecting from the mount surface, and after the respective engaging flanges are inserted from the respective insertion holes into the annular slot, the mount disk and the grinding wheel are configured to be rotated relatively to each other, and when the protrusion insertion holes and the protrusions are positionally aligned with each other, respectively, the bolts are configured to be respectively rotated to insert the protrusions into the protrusion insertion holes, respectively, to fasten the mount disk and the grinding wheel to each other with the plurality of bolts. 2. The grinding apparatus according to claim 1 , wherein the insertion holes double as the protrusion insertion holes. 3. The grinding apparatus according to claim 1 , wherein the protrusions, the engaging flanges, the insertion holes, and the protrusion insertion holes are cylindrical in shape.
Bushings; Mountings · CPC title
for grinding thin, brittle parts, e.g. semiconductors, wafers (grinding edges of thin, brittle parts B24B9/065) · CPC title
Means for securing grinding wheels on rotary arbors (suppression of vibrations in systems F16F15/00; testing static or dynamic balancing of machines G01M1/00) · CPC title
Grinding blocks; their mountings or supports · CPC title
Table-like supports for panels, sheets or the like · CPC title
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