Linewidth measurement method and apparatus, computing and processing device, computer program and computer readable medium

Patent metadata

Field	Value
Publication number	US-12430786-B2
Application number	US-202117921535-A
Country	US
Kind code	B2
Filing date	Oct 29, 2021
Priority date	Oct 29, 2021
Publication date	Sep 30, 2025
Grant date	Sep 30, 2025

Abstract

A linewidth measurement method includes: obtaining a target image of the line, the line including a first line segment; performing region connecting on an edge image or binary image of the target image to obtain a region connected image, the region connected image including a target connected region corresponding to a pattern of the line, and a pixel value of each pixel in the target connected region being different from that of each pixel outside the target connected region; determining a first edge point and a second edge point of the first line segment based on the region connected image; and determining a width of the first line segment according to the first edge point and the second edge point, and determining the width of the line according to the width of the first line segment.

First claim

The invention claimed is:

1. A linewidth measurement method, for measuring a width of a line, comprising:
obtaining a target image of the line, wherein the line comprises a first line segment;
performing region connecting on an edge image or binary image of the target image to obtain a region connected image, wherein the edge image is an image obtained by edge detection of the target image, the binary image is an image obtained by image binarization of the target image, and the region connected image comprises a target connected region corresponding to a pattern of the line, and a pixel value of each pixel in the target connected region is different from that of each pixel outside the target connected region;
determining a first edge point and a second edge point of the first line segment based on the region connected image, wherein the first edge point is located on a first edge line of the first line segment, the second edge point is located on a second edge line of the second line segment, and the first edge line and the second edge line are oppositely arranged in a first direction; and
determining a width of the first line segment according to the first edge point and the second edge point, and determining the width of the line according to the width of the first line segment,
wherein the target connected region comprises a first connected region corresponding to the first line segment, and determining the first edge point and the second edge point of the first line segment based on the region connected image comprises:
extracting pixels on two opposite sides of the first connected region in the first direction to obtain the first edge point and the second edge point; and
wherein the line further comprises a second line segment which intersects with the first line segment, and the first line segment comprises a first branch line located at one side of an intersection of the first line segment and the second line segment, and the second line segment comprises a second branch line located at one side of the intersection, and a plurality of pixels of the region connected image are arrayed in array in a row direction and in a column direction, extracting pixels on two opposite sides of the first connected region in the first direction to obtain the first edge point and the second edge point comprises:
determining a sampling region in the region connected image, wherein the sampling region comprises a first sampling region, the first sampling region comprises a first boundary and a second boundary which are oppositely arranged in the column direction, and a third boundary and a fourth boundary which connect the first boundary with the second boundary, a target connected region in the first sampling region comprises a first sub-connected region corresponding to the first branch line and a second sub-connected region corresponding to the second branch line, two oppositely arranged sides of the first sub-connected region in the first direction and two oppositely arranged sides of the second sub-connected region in the second direction are connected with both the first boundary and the second boundary, and the first sub-connected region is located at a side of the second sub-connected region close to the third boundary; and
performing a first scanning treatment on pixels in the first sampling region, wherein the first scanning treatment comprises: scanning from the third boundary to the fourth boundary in a same row of pixels, and determining a first pixel whose pixel value is the first pixel value as the first edge point; scanning from the fourth boundary to the third boundary, and determining a first pixel whose pixel value is the first pixel value as a fourth edge point of the second line segment; determining a first center point of the first edge point and the fourth edge point in the same row of pixels; scanning from the first center point to the third boundary, and determining a first pixel whose pixel value is the first pixel value as the second edge point; scanning from the first center point to the fourth boundary, and determining a first pixel whose pixel value is the first pixel value as the third edge point of the second line segment;
wherein the third edge point is located on a third edge line of the second line segment, the fourth edge point is located on a fourth edge line of the second line segment, and the third edge line and the fourth edge line are oppositely arranged in the second direction.

2. The linewidth measurement method according to claim 1 , wherein performing region connecting on an edge image or binary image of the target image to obtain a region connected image comprises:
performing expansion treatment and flood filling treatment sequentially on the edge image or the binary image to obtain an expanded image;
performing corrosion treatment on the expanded image to obtain a corroded image, wherein the corroded image comprises a plurality of connected regions, a pixel value of each pixel in the plurality of connected regions is a first pixel value, and a pixel value of each pixel outside the plurality of connected regions is a second pixel value, the plurality of connected regions comprises isolated connected regions and the target connected region, the isolated connected regions are connected regions with an area less than a preset threshold, and the target connected regions are connected regions with an area greater than or equal to the preset threshold; and
setting a pixel value of each pixel in the isolated connected regions in the corroded image to be the second pixel value so as to obtain the region connected image.

3. The linewidth measurement method according to claim 2 , wherein a convolution kernel used in the expansion treatment is with a same size as a convolution kernel used in the corrosion treatment.

4. The linewidth measurement method according to claim 1 , wherein the first line segment further comprises a third branch line located at the other side of the intersection, and the second line segment further comprises a fourth branch located at the other side of the intersection; the sampling region further comprises a second sampling region, the second sampling region comprises a fifth boundary and a sixth boundary which are oppositely arranged in the column direction, and a seventh boundary and an eighth boundary which connect the fifth boundary with the sixth boundary; a target connected region in the second sampling region comprises a third sub-connected region corresponding to the third branch line and a fourth sub-connected region corresponding to the fourth branch line, two oppositely arranged sides of the third sub-connected region in the first direction and two oppositely arranged sides of the fourth sub-connected region in the second direction are connected with both the fifth boundary and the sixth boundary, and the third sub-connected region is located at a side of the fourth sub-connected region close to the eighth boundary;
extracting pixels on two opposite sides of the first connected region in the first direction to obtain the first edge point and the second edge point further comprises:
performing a second scanning treatment on pixels in the second sampling region, wherein the second scanning treatment comprises: scanning from the seventh boundary to the eighth boundary in a same row of pixels, and determining a first pixel whose pixel value is the first pixel value as the third edge point; scanning from the eighth boundary to the seventh boundary, and determining a first pixel whose pixel value is the first pixel value as the second edge point; determining a second center point of the third edge point and the second edge point in the same row of pixels; scanning from the second center point to the seventh boundary, and determining a first pixel whose pixel value is the first pixel value a

Assignees

• Boe Technology Group Co Ltd

Inventors

• Wang Sifan
• Hu Yulan
• Li Yanzhao
• Zhou Chao
• Sun tuo
• Li Longfei
• Zhang Shuo
• Zhang Zhenzhong
• Zhang Cuifang

Classifications

• G06T2207/20036

  Morphological image processing · CPC title

• G06T5/30

  Erosion or dilatation, e.g. thinning · CPC title

• G06T7/13

  Edge detection · CPC title

• G06T7/187

  involving region growing; involving region merging; involving connected component labelling · CPC title

• G06T7/62 Primary

  of area, perimeter, diameter or volume · CPC title