Method for producing layers with improved uniformity in coating systems with horizontally rotating substrate guiding

Patent metadata

Field	Value
Publication number	US-12428720-B2
Application number	US-201917267106-A
Country	US
Kind code	B2
Filing date	Aug 9, 2019
Priority date	Aug 10, 2018
Publication date	Sep 30, 2025
Grant date	Sep 30, 2025

Abstract

The invention relates to a method for producing layers with very good uniformity in coating systems with horizontally rotating substrate guiding. Alternatively, certain layer thickness gradients can be set. The particle loading is also significantly reduced. The service life is much higher compared to other methods. Parasitic coatings are reduced. The coating rate is also increased.

First claim

The invention claimed is:

1. A method of depositing uniform layers on a rotationally moved substrate by magnetron sputtering, in which
a) at least one substrate is arranged on a turntable in a vacuum chamber to enable a coating on a rotational movement of the substrate; and
b) at least one layer is deposited on the at least one substrate by utilizing at least one coating source comprising a linearly extended dual magnetron source, with the layers of source material of the magnetron electrodes being formed by sputter gas,
wherein the magnetron electrodes have a substantially asymmetrically poled magnet configuration; and wherein one of the magnetron electrodes has a polarity N-S-N and the other magnetron electrode has a polarity S-N-S;
wherein the at least one coating source has an inhomogeneous plasma density that effects an inhomogeneous removal rate of the source material, and the at least one coating source has a generator with a settable pulse shape and pulse frequency in a frequency range of 20-60 kHz to control thickness of the layer, and wherein the settable pulse shape comprises sinusoidal pulses; and
wherein the deposition of layers is not mediated by one or more correction masks to assist in the production of uniform distribution of the deposited layers.

2. The method according to claim 1 , wherein the magnetron electrodes have an inhomogeneous magnetic field.

3. The method according to claim 1 , wherein the inhomogeneous removal rate increases from the turntable center to the turntable margin.

4. The method according to claim 1 , which includes pretreating the surface of the substrate with a plasma source or modifying the structure and/or the stoichiometry of the layer via plasma effect.

5. The method according to claim 1 , which utilizes a noble gas as the sputtering gas.

6. The method according to claim 5 , wherein the sputtering gas is argon.

7. The method according to claim 5 , which utilizes at least one reactive gas in addition to the sputtering gas.

8. The method according to claim 7 , wherein the at least one reactive gas is selected from the group consisting of oxygen, nitrogen, hydrogen, carbon dioxide, forming gas, hydrogen fluoride, acetylene, tetrafluoromethane, and octafluorocyclobutane.

9. The method according to claim 1 , wherein the thickness of the layer on the substrate is monitored by at least one of the measures a) to f) for a process control:
a) time control;
b) optical transmission monitoring;
c) optical reflection monitoring;
d) optical absorption monitoring;
e) monowavelength ellipsometry or spectral ellipsometry; and/or
f) crystal quartz measurement.

10. The method according to claim 1 , which utilizes a device for depositing uniform layers on rotationally moved substrates by magnetron sputtering comprising
a) a vacuum chamber;
b) at least one inlet for a sputtering gas;
c) a turntable with at least one substrate holder; and
d) at least one coating source consisting of a linearly extended dual magnetron source and the dual magnetron source consists of two linear magnetron electrodes, with the coating source having an inhomogeneous plasma density that enables an inhomogeneous removal rate.

Assignees

• Fraunhofer Ges Forschung

Inventors

• Vergöhl Michael
• Pflug Andreas
• Bruns Stefan
• Zickenrott Tobias

Classifications

• C23C14/547

  using optical methods · CPC title

• C23C14/505

  for rotation of the substrates · CPC title

• C23C14/3485

  using pulsed power to the target · CPC title

• C23C14/044 Primary

  using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient · CPC title

• H01J37/32935

  Monitoring and controlling tubes by information coming from the object and/or discharge · CPC title