Recording element substrate and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-12427769-B2
Application number	US-202218067990-A
Country	US
Kind code	B2
Filing date	Dec 19, 2022
Priority date	Jan 26, 2022
Publication date	Sep 30, 2025
Grant date	Sep 30, 2025

Abstract

A recording element substrate includes an ejection port forming member in which an ejection port configured to eject liquid is formed, and a substrate. The substrate includes a liquid supply port that supplies the liquid to the ejection port, a first surface on which the ejection port forming member is placed, and a second surface that is a rear surface of the first surface. The liquid supply port includes a first portion perpendicularly connected to the first surface, and a second portion connected to the first portion. An inner wall of the second portion includes an inclined surface that is inclined toward an inner wall of the first portion such that a width of the second portion is gradually increased toward the second surface. A hydrophilic film is formed at least on the inner wall of the first portion.

First claim

What is claimed is:

1. A recording element substrate comprising:
an ejection port forming member in which an ejection port configured to eject liquid is formed; and
a substrate including a liquid supply port configured to supply the liquid to the ejection port, a first surface on which the ejection port forming member is placed, and a second surface that is a rear surface of the first surface,
wherein the liquid supply port includes a first portion perpendicularly connected to the first surface, a second portion connected to the first portion, and a third portion perpendicularly connected to the second portion,
wherein an inner wall of the second portion includes an inclined surface that is inclined toward an inner wall of the first portion such that a width of the second portion is gradually increased toward the second surface, and
wherein a hydrophilic film is formed at least on the inner wall of the first portion.

2. The recording element substrate according to claim 1 , wherein a hydrophilic film is formed on the inclined surface of the inner wall of the second portion.

3. The recording element substrate according to claim 1 , wherein a water-repellent film is formed on the inclined surface of the inner wall of the second portion.

4. The recording element substrate according to claim 1 , wherein a contact angle of the hydrophilic film formed on the inner wall of the first portion is 40 degrees or less.

5. The recording element substrate according to claim 1 , wherein an angle formed by the inner wall of the first portion and the inclined surface of the inner wall of the second portion is 110 degrees to 160 degrees.

6. The recording element substrate according to claim 1 , wherein a center axis of the first portion and a center axis of the second portion are shifted from each other.

7. The recording element substrate according to claim 1 , further comprising a liquid collection port configured to collect the liquid from the ejection port,
wherein the liquid collection port includes a fourth portion perpendicularly connected to the first surface, a fifth portion connected to the fourth portion, and a sixth portion connected to the fifth portion,
wherein an inner wall of the fifth portion includes an inclined surface that is inclined toward an inner wall of the fourth portion such that a width of the fifth portion is gradually increased toward the second surface,
wherein one end of the sixth portion is connected to the inclined surface of the inner wall of the fifth portion, and the other end of the sixth portion is perpendicularly connected to the second surface, and
wherein a hydrophilic film is formed at least on the inner wall of the fourth portion.

8. The recording element substrate according to claim 7 , wherein a hydrophilic film is further formed on the inclined surface of the inner wall of the fifth portion.

9. The recording element substrate according to claim 7 , wherein a water-repellent film is further formed on the inclined surface of the inner wall of the fifth portion.

10. The recording element substrate according to claim 7 , wherein a center axis of the fourth portion and a center axis of the fifth portion are shifted from each other.

11. A recording element substrate, comprising:
an ejection port forming member in which an ejection port configured to eject liquid is formed; and
a substrate including a liquid supply port configured to supply the liquid to the ejection port, a first surface on which the ejection port forming member is placed, and a second surface that is a rear surface of the first surface,
wherein the liquid supply port includes a first portion perpendicularly connected to the first surface, a second portion connected to the first portion, and a third portion perpendicularly connected to the second portion,
wherein an inner wall of the second portion includes an inclined surface that is inclined toward an inner wall of the first portion such that a width of the second portion is gradually increased toward the second surface, and
wherein a water-repellent film is formed at least on the inner wall of the first portion.

12. The recording element substrate according to claim 11 , wherein a water-repellent film is formed on the inclined surface of the inner wall of the second portion.

13. The recording element substrate according to claim 11 , wherein a hydrophilic film is formed on the inclined surface of the inner wall of the second portion.

14. The recording element substrate according to claim 11 , wherein a contact angle of the water-repellent film formed on the inner wall of the first portion is 150 degrees or more.

15. The recording element substrate according to claim 11 , further comprising a liquid collection port configured to collect the liquid from the ejection port,
wherein the liquid collection port includes a fourth portion perpendicularly connected to the first surface, a fifth portion connected to the fourth portion, and a sixth portion connected to the fifth portion,
wherein an inner wall of the fifth portion includes an inclined surface that is inclined toward an inner wall of the fourth portion such that a width of the fifth portion is gradually increased toward the second surface,
wherein one end of the sixth portion is connected to the inclined surface of the inner wall of the fifth portion, and the other end of the sixth portion is perpendicularly connected to the second surface, and
wherein a water-repellent film is formed at least on the inner wall of the fourth portion.

16. The recording element substrate according to claim 15 , wherein a water-repellent film is further formed on the inclined surface of the inner wall of the fifth portion.

17. A method of manufacturing a recording element substrate, wherein the recording element substrate includes an ejection port forming member in which an ejection port configured to eject liquid is formed, and a substrate including a liquid supply port configured to supply the liquid to the ejection port, a first surface on which the ejection port forming member is placed, and a second surface that is a rear surface of the first surface, the method comprising:
preparing the substrate such that the liquid supply port includes a first portion perpendicularly connected to the first surface, a second portion connected to the first portion, a third portion perpendicularly connected to the second portion, and an inner wall of the second portion includes an inclined surface that is inclined toward an inner wall of the first portion such that a width of the second portion is gradually increased toward the second surface;
forming a hydrophilic film at least on the inner wall of the first portion;
attaching a tape on the first surface of the substrate including the liquid supply port;
filling the first portion with an aqueous filler by dropping the aqueous filler on the inclined surface of the inner wall of the second portion;
removing the tape;
forming the ejection port forming member on the first surface; and
removing the aqueous filler.

18. The method of manufacturing the recording element substrate according to claim 17 , wherein, in forming the hydrophilic film, a hydrophilic film is further formed on the inclined surface of the inner wall of the second portion.

19. The method of manufacturing the recording element substrate according to claim 17 , further comprising forming a water-repellent film on the inclined surface of the inner wall of the second portion.

20. The recording element substrate accordin

Assignees

• Canon Kk

Inventors

• MANABE Takanobu
• Iri Junichiro
• Murayama Hiroyuki
• Fujii Kenji
• Ibe Satoshi
• Shinohara Narumi

Classifications

• B41J2/06

  by electric or magnetic field · CPC title

• B41J2002/14362

  Assembling elements of heads · CPC title

• B41J2202/22

  Manufacturing print heads · CPC title

• B41J2/1631

  photolithography · CPC title

• B41J2/1643

  thin film formation by plating · CPC title