Acoustic wave device and ladder filter

Patent metadata

Field	Value
Publication number	US-12424997-B2
Application number	US-202318200013-A
Country	US
Kind code	B2
Filing date	May 22, 2023
Priority date	Feb 15, 2021
Publication date	Sep 23, 2025
Grant date	Sep 23, 2025

Abstract

An acoustic wave device includes a piezoelectric layer including lithium tantalate or lithium niobate, a dielectric film on the piezoelectric layer, the dielectric film including a dielectric material having a higher dielectric constant than that of the lithium tantalate or lithium niobate, and an IDT electrode on the dielectric film.

First claim

What is claimed is:

1. An acoustic wave device comprising:
a piezoelectric layer including lithium tantalate or lithium niobate;
a dielectric film located on the piezoelectric layer and including a dielectric material with a higher dielectric constant than that of the lithium tantalate or lithium niobate; and
an IDT electrode on the dielectric film; wherein
when a dielectric constant of a dielectric substance of the dielectric film is defined as ε and a wavelength determined by an electrode finger pitch of the IDT electrode is defined as λ, when a thickness of the dielectric film normalized with λ is defined as t [λ], the piezoelectric layer includes LiTaO 3 , and a cut-angle of the LiTaO 3 is defined as F [deg], Formula (1) is satisfied:
2%≤0.99088187121749+(−0.00101988808513476)×(ε−600.463000404367)+(−22.4050537909368)×( t[λ]− 0.0499332794177113)+(−0.0115965045308728)×( F [deg]−44.9898908208654)+0.0000007919482685655×((ε−600.463000404367)×(ε−600.463000404367)−130192.254292171)+0.0139683156473993×((ε−600.463000404367)×( t[λ]− 0.0499332794177113))+387.718922759073×(( t[λ]− 0.0499332794177113)×( t[λ]− 0.0499332794177113)−0.000824348560899287)+0.0000123217252983298×((ε−600.463000404367)×( F [deg]−44.9898908208654))+0.264999245824291×(( t[λ]− 0.0499332794177113)×( F [deg]−44.9898908208654))+(−0.000219172606976882)×(( F [deg]−44.9898908208654)×( F [deg]−44.9898908208654)−827.102607064512)  Formula(1).

2. The acoustic wave device according to claim 1 , wherein the dielectric film includes one dielectric material selected from a group consisting of TiO 2 , SrTiO 3 , SrBi 2 Ta 2 O 9 , CaTiO 3 , and BaTiO 3 .

3. The acoustic wave device according to claim 1 , wherein, a thickness of the dielectric film is about 0.05λ or less.

4. The acoustic wave device according to claim 1 , further comprising a support substrate, and an intermediate layer interposed between the support substrate and the piezoelectric layer.

5. The acoustic wave device according to claim 4 , wherein the intermediate layer includes a low-acoustic velocity film including a low-acoustic velocity material through which a bulk wave propagates at an acoustic velocity lower than an acoustic velocity at which a bulk wave propagates through the piezoelectric layer.

6. The acoustic wave device according to claim 5 , wherein the intermediate layer further includes a high-acoustic velocity layer including a high-acoustic velocity material through which a bulk wave propagates at an acoustic velocity higher than the acoustic velocity at which the acoustic wave propagates through the piezoelectric layer, and the high-acoustic velocity layer is interposed between the low-acoustic velocity film and the support substrate.

7. The acoustic wave device according to claim 4 , wherein the support substrate includes a high-acoustic velocity material through which a bulk wave propagates at an acoustic velocity higher than an acoustic velocity at which an acoustic wave propagates through the piezoelectric layer.

8. The acoustic wave device according to claim 4 , wherein the intermediate layer is an acoustic reflection film including a low-acoustic impedance layer having a relatively low acoustic impedance and a high-acoustic impedance layer having a relatively high acoustic impedance.

9. The acoustic wave device according to claim 1 , wherein the piezoelectric layer is a piezoelectric substrate including the lithium tantalate or the lithium niobate.

10. The acoustic wave device according to claim 1 , wherein
the dielectric film is a first dielectric film;
the acoustic wave device further comprises a second dielectric film arranged to cover the IDT electrode; and
the second dielectric film includes a dielectric substance having a positive temperature coefficient of frequency.

11. The acoustic wave device according to claim 10 , wherein the second dielectric film includes silicon oxide.

12. A ladder filter comprising:
a serial arm resonator; and
a parallel arm resonator; wherein
at least one of the serial arm resonator and the parallel arm resonator is defined by an acoustic wave device including:
a piezoelectric layer including lithium tantalate or lithium niobate;
a dielectric film located on the piezoelectric layer and including a dielectric material with a higher dielectric constant than that of the lithium tantalate or lithium niobate; and
an IDT electrode on the dielectric film; and

the dielectric film included in the serial arm resonator has a larger thickness than that of the dielectric film included in the parallel arm resonator.

13. The ladder filter according to claim 12 , wherein the at least one of the serial arm resonator and the parallel arm resonator includes both of the serial arm resonator and the parallel arm resonator.

14. The ladder filter according to claim 12 , wherein the dielectric film includes one dielectric material selected from a group consisting of TiO 2 , SrTiO 3 , SrBi 2 Ta 2 O 9 , CaTiO 3 , and BaTiO 3 .

15. The ladder filter according to claim 12 , wherein, when a wavelength determined by an electrode finger pitch of the IDT electrode is defined as λ, a thickness of the dielectric film is about 0.05λ or less.

16. An acoustic wave device comprising:
a piezoelectric layer including lithium tantalate or lithium niobate;
a dielectric film located on the piezoelectric layer and including a dielectric material with a higher dielectric constant than that of the lithium tantalate or lithium niobate; and
an IDT electrode on the dielectric film; wherein
when a dielectric constant of a dielectric substance constituting the dielectric film is defined as ε and a wavelength determined by an electrode finger pitch of the IDT electrode is defined as λ, when a thickness of the dielectric film normalized with λ is defined as t [λ], a Young's modulus of the dielectric film is defined as Y [GPa], a density of the dielectric film is defined as d [kg/m 3 ], the piezoelectric layer includes LiTaO 3 , and a cut-angle of the LiTaO 3 is defined as F [deg], Formula (4) is satisfied:
2%≤3.55997014174841+(−0.00487639130068411)×(ε−214.938048528653)+(−96.1860635815859)×( t[λ]− 0.0150029039752191)+(−0.000905681048192359)×( Y [GPa]−175.058079504388)+0.00824228277987659×( d [kg/m 3 ])−4.99793495095509)+(−0.0145933761699339×( F [deg]−29.9948373773877)+0.0000050964535495431×((ε−214.938048528653)×(ε−214.938048528653)−10712.2961103896)+(−0.107863323498494)×((ε−214.938048528653)×( t[λ]− 0.0150029039752191))+2239.21557361176×(( t[λ]− 0.0150029039752191)×( t[λ]− 0.0150029039752191)−0.0000416357362752375)+0.0000013354691325545×((ε−214.938048528653)×( Y [GPa]−175.058079504388))+(−0.0304100554188182)×(( t[λ]− 0.0150029039752191)×( Y [GPa]−175.058079504388))+(−0.0000010413074656026)×(( Y [GPa]−175.058079504388)×( Y [GPa]−175.058079504388)−7293.81438619308)+(−0.0000132983072396513)×((ε−214.938048528653)×( d [kg/m 3 ]−4.99793495095509))+0.0863723207629641×(( t[λ]− 0.0150029039752191)×( d [kg/m 3 ])−4.99793495095509))+0.0000167841751038366×(( Y [GPa]−175.058079504388)×( d [kg/m 3 ]−4.99793495095509))+(−0.000414005073987127)×(( d [kg/m 3 ]−4.99793495095509)×( d [kg/m 3 ]−4.99793495095509)−4.99999573557258)+0.0000174917316317782×((ε−214.938048528653)×( F [deg]−29.9948373773877))+0.36085793354616×(( t[λ]− 0.0150029039752191)×( F [deg]−29.9948373773877))+0.0000242921538496177×(( Y [GPa]−175.058079504388)×( F [deg]−29.9948373773877))+(−0.00064755173208376)×(( d [kg/m 3 ]−4.99793495095509)×( F [deg]−29.9948373773877))+(−0.00127840848717812)×(( F [deg]−29.9948373773877)×( F [deg]−29.9948373773877)−66.6494312719515)  Formula(4).

17. The acous

Assignees

• Murata Manufacturing Co

Inventors

• Daimon Katsuya

Classifications

• H03H9/605

  consisting of a ladder configuration · CPC title

• H03H9/582

  implemented with thin-film techniques · CPC title

• H03H9/171

  implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type · CPC title

• H03H9/02157

  Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness · CPC title

• H03H9/6483

  Ladder SAW filters · CPC title