Self-aligned mask for humidity barrier patterning

Patent metadata

Field	Value
Publication number	US-12422669-B2
Application number	US-202218054886-A
Country	US
Kind code	B2
Filing date	Nov 11, 2022
Priority date	Nov 11, 2022
Publication date	Sep 23, 2025
Grant date	Sep 23, 2025

Abstract

A method includes forming a mirror assembly for a scanning device that includes a mirror rotationally supported by flexible beams, the mirror assembly also including a piezoelectric material. The mirror is encased with a cover having a top scanning opening aligned with the mirror to form a scanning assembly. An interior of the scanning assembly is coated with a protective film. Etching is performed through the top scanning opening to remove the protective film from a top of the mirror.

First claim

The invention claimed is:

1. A method comprising:
forming a mirror assembly for a scanning device that includes a mirror rotationally supported by flexible beams, the mirror assembly also including a piezoelectric material;
encasing the mirror assembly with a cover having a top scanning opening aligned with the mirror to form a scanning assembly;
coating an interior of the scanning assembly with a protective film; and
etching the mirror through the top scanning opening to remove the protective film from a top of the mirror.

2. The method of claim 1 wherein the scanning assembly has a bottom opening aligned with a bottom of the mirror, the method further comprising etching the mirror through the bottom opening to remove the protective film from the bottom of the mirror.

3. The method of claim 2 wherein coating is performed through at least one of the top scanning opening and the bottom opening via a chemical vapor deposition process to form a surface conforming protective coating.

4. The method of claim 1 wherein the piezoelectric material remains coated by the protective film.

5. The method of claim 1 wherein the protective film comprises parylene.

6. The method of claim 1 wherein etching the mirror comprises reactive ion etching the mirror assembly using the cover as a self-aligned mask.

7. The method of claim 6 wherein reactive ion etching is performed using oxygen ions.

8. The method of claim 6 wherein the cover is formed such that the cover is not significantly etched during etching of the mirror.

9. The method of claim 1 and further comprising applying a protective tape to connectors prior to etching.

10. A method comprising:
forming a mirror assembly for a scanning device that includes a mirror rotationally supported by flexible beams, the mirror assembly including a piezoelectric material;
supporting the mirror assembly on a substrate having a substrate opening to allow rotation of the mirror;
encasing the mirror assembly and substrate with a cover having a top scanning opening aligned with the mirror to form a scanning assembly;
coating the scanning assembly with a protective film via chemical vapor deposition; and
etching the mirror through the top scanning opening to remove the protective film from a top of the mirror.

11. The method of claim 10 wherein the cover has a bottom opening aligned with a bottom of the mirror, the method further comprising etching the mirror through the bottom opening to remove the protective film from the bottom of the mirror.

12. The method of claim 11 wherein coating is performed through at least one of the top scanning opening and the bottom opening via a chemical vapor deposition process to form a surface conforming protective coating.

13. The method of claim 10 wherein the piezoelectric material remains coated by the protective film.

14. The method of claim 10 wherein the protective film comprises parylene.

15. The method of claim 10 wherein etching the mirror comprises reactive ion etching the scanning assembly using the cover as a self-aligned mask.

16. A scanning device comprising:
a mirror assembly that includes a mirror rotationally supported by flexible beams, the mirror assembly including a piezoelectric material;
a substrate supporting the mirror assembly;
a case disposed around the mirror assembly and substrate, the case including a top scanning opening aligned with the mirror to form a scanning assembly; and
a protective coating conformally deposited on the mirror assembly, substrate, and case, except for an area of the mirror aligned with the top scanning opening.

17. The device of claim 16 wherein the substrate includes a substrate opening to allow rotation of the mirror and wherein the substrate includes a bottom opening aligned with a bottom of the mirror and wherein the bottom of the mirror lacks the protective coating.

18. The device of claim 16 wherein the protective coating comprises parylene that has been deposited by chemical vapor deposition.

19. The device of claim 16 wherein the protective coating has been removed from the mirror via reactive ion etching using the case with the top scanning opening as a self-aligned mask.

20. The device of claim 16 wherein the protective coating has been removed from an area about the mirror aligned with the top scanning opening and aligned with a bottom opening below the mirror.

Assignees

• Microsoft Technology Licensing Llc

Inventors

• Sun Di
• Ong Xiao Chuan
• Lee Seungwoo
• Davis Wyatt Owen

Classifications

• G02B26/0858 Primary

  the reflecting means being moved or deformed by piezoelectric means · CPC title

• G02B26/105 Primary

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title