Manifold assembly for trap filter systems

Patent metadata

Field	Value
Publication number	US-12420225-B2
Application number	US-202117557049-A
Country	US
Kind code	B2
Filing date	Dec 21, 2021
Priority date	Dec 21, 2021
Publication date	Sep 23, 2025
Grant date	Sep 23, 2025

Abstract

The present disclosure is directed to a manifold assembly for a trap filter system having an inlet for receiving a flow of gas effluents containing contaminants generated by a semiconductor processing tool, a housing for a plurality of filters, wherein the plurality of trap filters connected to the inlet and are interchangeable while the semiconductor processing tool remains in operation, and a bypass mechanism configured to selectively direct or shut off the flow of gas effluent to one or more of the plurality of trap filters, wherein each of the plurality of filter is removable and replaceable when the filter is unable to effectuate the removal of contaminants.

First claim

What is claimed is:

1. A manifold assembly comprising:
an inlet for receiving a flow of gas effluent containing contaminants generated by a semiconductor processing tool;
a housing for a plurality of trap filters, wherein the plurality of trap filters are connected to the inlet and are interchangeable while the semiconductor processing tool remains in operation; and
a bypass mechanism configured to selectively direct or shut off the flow of gas effluent containing contaminants generated by the semiconductor processing tool to one or more of the plurality of trap filters, wherein each of the plurality of trap filters is removable and replaceable;
wherein the bypass mechanism further comprises a front-end bypass mechanism and a back-end bypass mechanism;
wherein each of the plurality of trap filters comprises a fore line shutoff valve, configured to receive the flow of gas effluent containing contaminants generated by the semiconductor processing tool, and a back-end shutoff valve, configured to output a flow of filtered gas effluent;
wherein the front-end bypass mechanism is located between the inlet of the manifold assembly and the fore line shutoff valve of each of the plurality of trap filters;
wherein the front-end bypass mechanism is configured to selectively shut off or divert the flow of gas effluent containing contaminants from the inlet of the manifold assembly to one or more of the plurality of trap filters; and
wherein the back-end bypass mechanism is located downstream of the back-end shutoff valve of each of the plurality of trap filters and is configured to selectively shut off or divert the flow of filtered gas effluent to the back-end shutoff valve of one or more of the plurality of trap filters.

2. The manifold assembly of claim 1 , wherein the housing further comprises a rotating structure for aligning the plurality of trap filters with the inlet to receive gas effluents from the semiconductor processing tool.

3. The manifold assembly of claim 2 , further comprising positioning the manifold assembly on an exhaust line for the semiconductor processing tool upstream from a pump or abatement system.

4. The manifold assembly of claim 1 , further comprising the plurality of trap filters being connected in parallel to receive the flow of gas effluent.

5. The manifold assembly of claim 1 , wherein the plurality of trap filters further comprises at least two filtering materials for removing particulate and/or chemical contaminants.

6. The manifold assembly of claim 5 , wherein one of the two filtering materials comprise a support material and a metal oxide adsorbent.

7. A method comprising:
configuring a manifold assembly for a trap filter system to remove contaminants from gas effluent provided from an exhaust line of a semiconductor processing tool, the manifold assembly comprising:
a plurality of trap filters connected to an inlet for receiving a flow of gas effluent containing contaminants generated by a semiconductor processing tool, wherein the plurality of trap filters are interchangeable while the semiconductor processing tool remains in operation;
a housing for the plurality of trap filters; and
a bypass mechanism configured to selectively direct or shut off the flow of gas effluent containing contaminants generated by the semiconductor processing tool to one or more of the plurality of trap filters; and
activating the bypass mechanism to shut off the flow of gas effluent containing contaminants generated by the semiconductor processing tool to one or more of the plurality of trap filters and direct the flow of gas effluent containing contaminants generated by the semiconductor processing tool to another of the plurality of trap filters;
wherein the bypass mechanism further comprises a front-end bypass mechanism and a back-end bypass mechanism;
wherein each of the plurality of trap filters comprises a fore line shutoff valve, configured to receive the flow of gas effluent containing contaminants generated by the semiconductor processing tool, and a back-end shutoff valve, configured to output a flow of filtered gas effluent;
wherein the front-end bypass mechanism is located between the inlet of the manifold assembly and the fore line shutoff valve of each of the plurality of trap filters;
wherein the front-end bypass mechanism is configured to selectively shut off or divert the flow of gas effluent containing contaminants from the inlet of the manifold assembly to one or more of the plurality of trap filters; and
wherein the back-end bypass mechanism is located downstream of the back-end shutoff valve of each of the plurality of trap filters and is configured to selectively shut off or divert the flow of filtered gas effluent to the back-end shutoff valve of one or more of the plurality of trap filters.

8. The method of claim 7 , further comprising monitoring the flow of gas through the plurality of trap filters, wherein the monitoring determines when the plurality of trap filters need to be replaced.

9. The method of claim 7 , further comprising removing and replacing the one or more of the plurality of trap filters.

10. The method of claim 7 , further comprising removing particles, unreacted gases, reactive species, and corrosive gases from the gas effluents.

11. The method of claim 7 , further comprising positioning the plurality of trap filters on the exhaust line for the semiconductor processing tool upstream from a pump or abatement system.

12. The method of claim 7 , further comprising refurbishing or regenerating one or more of the plurality of trap filters for reuse.

13. A semiconductor processing system comprising:
a semiconductor processing tool, wherein the semiconductor processing tool generates exhaust gases with contaminants;
a manifold assembly for a trap filter system comprising:
an inlet for receiving a flow of exhaust gas effluent with contaminants generated by the semiconductor processing tool;
a plurality of filters, the plurality of filters having filtering materials to remove contaminants from the exhaust gases generated by the semiconductor processing tool, wherein the exhaust gases flow into at least one of the plurality of filters;
wherein the plurality of filters are interchangeable while the semiconductor processing tool remains in operation; and
a bypass mechanism configured to selectively direct or shut off the flow of exhaust gas effluent to one or more of the plurality of filters as the semiconductor processing tool remains in operation, wherein the bypass mechanism is activated to replace one or more of the plurality of filters;
wherein the bypass mechanism further comprises a front-end bypass mechanism and a back-end bypass mechanism;
wherein each of the plurality of filters comprises a fore line shutoff valve, configured to receive the flow of exhaust gas effluent with contaminants generated by the semiconductor processing tool, and a back-end shutoff valve, configured to output a flow of filtered exhaust gas effluent;
wherein the front-end bypass mechanism is located between the inlet of the manifold assembly and the fore line shutoff valve of each of the plurality of filters;
wherein the front-end bypass mechanism is configured to selectively shut off or divert the flow of exhaust gas effluent with contaminants from the inlet of the manifold assembly to one or more of the plurality of filters; and
wherein the back-end bypass mechanism is located downstream of the back-end shutoff valve of each of the plurality of filters and is configured to selectively shut off or divert the flow of filtered exhaust gas effluent to the back-end shutoff valve of one or more of the plurality of f

Assignees

• Intel Corp

Inventors

• Iyer Subramani

Classifications

• H10P72/04

  Apparatus for manufacture or treatment · CPC title

• B01D46/0086

  Filter condition indicators · CPC title

• C23C16/4412

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title

• B01D2258/0216

  from CVD treatment or semi-conductor manufacturing · CPC title

• B01D46/0039

  with flow guiding by feed or discharge devices · CPC title