Optical system, in particular for microlithography, and method for operating an optical system

Patent metadata

Field	Value
Publication number	US-12416865-B2
Application number	US-202318186396-A
Country	US
Kind code	B2
Filing date	Mar 20, 2023
Priority date	Mar 30, 2022
Publication date	Sep 16, 2025
Grant date	Sep 16, 2025

Abstract

An optical system, in particular for microlithography, comprises a laser light source for generating a multiplicity of light pulses, and a control unit configured to control the laser light source in such a way that, for a light pulse sequence generated by the laser light source, the time period between respectively successive light pulses varies across the light pulse sequence. A method comprises operating the optical system.

First claim

What is claimed is:

1. An optical system, comprising:
a laser light source configured to generate a multiplicity of light pulses;
a first measuring unit configured to measure a variable that is characteristic of a speckle contrast of the light generated by the laser light source;
a second measuring unit configured to measure a variable that is characteristic of a bandwidth of the light generated by the laser light source; and
a control unit configured to control the laser light source so that, for a light pulse sequence generated by the laser light source, a time period between respectively successive light pulses varies across the light pulse sequence depending on output signals of the first measuring unit and the second measuring unit.

2. The optical system of claim 1 , further comprising an actuator, wherein the laser light source comprises an optical component, and the control unit is configured to manipulate a position of the actuator to manipulate a position of the optical component.

3. The optical system of claim 1 , further comprising an optical pulse stretcher comprising a plurality of mirrors.

4. The optical system of claim 3 , wherein at least one the mirrors is an optical component of the laser light source.

5. The optical system of claim 4 , further comprising an actuator, wherein the control unit is configured to manipulate a position of the actuator to manipulate a position of the optical component.

6. The optical system of claim 1 , wherein the laser light source comprises a laser medium, and the control unit is configured to variably adjust a temporal delay of a trigger signal generated to trigger an energy feed into the laser medium.

7. The optical system of claim 1 , wherein the control unit comprises a random number generator configured to randomly vary the time period between each two successive light pulses.

8. The optical system of claim 1 , wherein the control unit is configured to continuously change the time period between each two successive light pulses.

9. The optical system of claim 8 , wherein the time period is continuously changed between a predefined upper value and a predefined lower value.

10. The optical system of claim 1 , wherein the laser light source is configured to generate the light pulses with a repetition rate of at least 7 kHz.

11. The optical system of claim 1 , wherein the optical system is configured to operate at an operating wavelength of less than 250 nm.

12. An apparatus, comprising:
an optical system according to claim 1 ;
an illumination device; and
a projection lens,
wherein the apparatus is a microlithographic projection exposure apparatus.

13. The optical system of claim 1 , wherein the first measuring unit is configured to measure the speckle contrast of the light generated by the laser light source.

14. A method of operating an optical system comprising a laser light source configured to generate a multiplicity of light pulses and a controller configured so that, for a light pulse sequence generated by the laser light source, a time period between respectively successive light pulses varies across the light pulse sequence, the method comprising:
varying the time period based on: measurement of a variable that is characteristic of a speckle contrast of the light generated by the laser light source; and a measurement of a respective bandwidth for at least one light pulse generated by the laser light source.

15. The method of claim 14 , wherein the variation is adjusted to reduce an average bandwidth of the light pulses generated by the laser light source.

16. The method of claim 14 , wherein the variation is adjusted to reduce an average bandwidth difference between successive light pulses.

17. The method of claim 14 , further comprising manipulating the position of an optical component of the laser light source to at least partly effect the variation.

18. The method of claim 14 , further comprising adjusting a temporal delay of a trigger signal generated for triggering an energy feed into a laser medium of the laser light source to at least partly effect the variation.

19. The method of claim 14 , comprising varying the time period based on a measurement of the speckle contrast of the light generated by the laser light source.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Wolke Conrad
• Moser Barbara

Classifications

• G03F7/70041

  by pulsed sources, e.g. multiplexing, pulse duration, interval control or intensity control · CPC title

• G03F7/70025

  by lasers · CPC title

• G02B26/06

  for controlling the phase of light (G02B26/08 takes precedence {, measuring optical phase difference G01J9/00}) · CPC title

• H01S3/225

  comprising an excimer or exciplex · CPC title

• H01S3/0057

  Temporal shaping, e.g. pulse compression, frequency chirping (soliton generation and propagation G02F1/3513, H01S3/063 and H01S3/108) · CPC title