Position measuring device and substrate processing apparatus including the same

Patent metadata

Field	Value
Publication number	US-12416482-B2
Application number	US-202117544961-A
Country	US
Kind code	B2
Filing date	Dec 8, 2021
Priority date	Dec 21, 2020
Publication date	Sep 16, 2025
Grant date	Sep 16, 2025

Abstract

A position measuring device and a position measuring method for accurately measuring a position of a movable member using a plurality of linear scales are provided. The position measuring device comprises a first linear scale elongated in a first direction, a second linear scale elongated in the first direction and separated from the first linear scale, and a head structure including a first scale head and a second scale head that are spaced apart from each other, wherein the head structure reads the first linear scale or the second linear scale while moving in the first direction, wherein the first scale head and the second scale head are activated or deactivated opposite to each other.

First claim

What is claimed is:

1. An apparatus for measuring a position comprising:
a first linear scale elongated in a first direction;
a second linear scale elongated in the first direction and separated from the first linear scale; and
a head structure including a first scale head and a second scale head that are spaced apart from each other,
wherein the head structure reads the first linear scale or the second linear scale while moving in the first direction,
wherein the first scale head and the second scale head are activated or deactivated opposite to each other at all times when the first scale head or the second scale head are operating.

2. The apparatus of claim 1 , wherein the second scale head follows the first scale head in response to the head structure moving in the first direction.

3. The apparatus of claim 2 , wherein, in a state, in which the first scale head is activated and the second scale head is deactivated, in response to the first scale head passing a first preset position, the first scale head is deactivated and the second scale head is activated.

4. The apparatus of claim 3 , wherein, in a state, in which the first scale head is deactivated and the second scale head is activated, in response to the first scale head passing a second preset position different from the first preset position, the first scale head is activated again and the second scale head is deactivated again.

5. The apparatus of claim 1 , wherein the first linear scale and the second linear scale are sequentially arranged in a line, and a first boundary portion is located between the first linear scale and the second linear scale,
wherein, in a state, in which the first scale head is activated and the second scale head is deactivated, the first scale head and the second scale head move along the first linear scale, and the second scale head follows the first scale head.

6. The apparatus of claim 5 , wherein, in response to the first scale head passing the first boundary portion, the first scale head is deactivated and the second scale head is activated, and then in response to the second scale head passing the first boundary portion, the first scale the head is activated again and the second scale head is deactivated again.

7. The apparatus of claim 5 , wherein, while the first scale head passes the first boundary portion, the first scale head is deactivated and the second scale head is activated,
wherein after the first scale head passes the first boundary portion, the first scale head is activated again and the second scale head is deactivated again.

8. The apparatus of claim 1 further comprises,
a third linear scale sequentially arranged in a line with the first linear scale, wherein a third boundary portion is located between the first linear scale and a fourth linear scale,
wherein the second linear scale is spaced apart from the first linear scale and the fourth linear scale in a second direction, and overlaps the third boundary portion in the second direction,
wherein the first scale head is capable of reading the first and fourth linear scales in an activated state,
wherein the second scale head is capable of reading the second linear scale in an activated state.

9. The apparatus of claim 8 , wherein, while the first scale head passes the third boundary portion, the first scale head is deactivated and the second scale head is activated,
wherein, after the first scale head passes the third boundary portion, the first scale head is activated again and the second scale head is deactivated again.

10. The apparatus of claim 1 , wherein a movement path of an inkjet head unit is installed on one side of a gantry,
wherein the first linear scale and the second linear scale are installed on one surface of the gantry.

11. An apparatus for processing a substrate comprising:
a base;
a substrate support unit installed on an upper surface of the base and for supporting a substrate;
a gantry installed to be spaced apart from an upper surface of the base;
a movement path elongated in a first direction on one surface of the gantry;
an inkjet head unit for discharging a droplet of chemical liquid to the substrate while moving along the movement path; and
a first position measuring device for identifying a position of the inkjet head unit, wherein the first position measuring device comprises a first linear scale installed on one surface of the gantry and elongated in a first direction, a second linear scale elongated in the first direction and separated from the first linear scale, and a head structure including a first scale head and a second scale head that are spaced apart from each other,
wherein, in response to the inkjet head unit moving in a first direction along the movement path, the head structure reads the first linear scale or the second linear scale while moving together with the inkjet head unit,
wherein the first scale head and the second scale head are activated or deactivated opposite to each other at all times when the first scale head or the second scale head are operating.

12. The apparatus of claim 11 , wherein the first linear scale and the second linear scale are sequentially arranged in a line, and a first boundary portion is located between the first linear scale and the second linear scale,
wherein, in a state, in which the first scale head is activated and the second scale head is deactivated, the first scale head and the second scale head move along the first linear scale, and the second scale head follows the first scale head.

13. The apparatus of claim 12 , wherein, in response to the first scale head passing the first boundary portion, the first scale head is deactivated and the second scale head is activated, and then in response to the second scale head passing the first boundary portion, the first scale the head is activated again and the second scale head is deactivated again.

14. The apparatus of claim 12 , wherein, while the first scale head passes the first boundary portion, the first scale head is deactivated and the second scale head is activated,
wherein, after the first scale head passes the first boundary portion, the first scale head is activated again and the second scale head is deactivated again.

15. The apparatus of claim 11 further comprises,
a nozzle inspection unit installed on the base, wherein the nozzle inspection unit is movable in a second direction; and
a second position measuring device including a plurality of linear scales and a plurality of scale heads, and for identifying a position of the nozzle inspection unit,
wherein the plurality of linear scales are arranged in a line,
wherein, while the plurality of scale heads move along the plurality of linear scales, at a preset first position, some scale heads are deactivated and some other scale heads are activated, and at a preset second position, the some scale heads are activated again and the some other scale heads are deactivated again.

16. The apparatus of claim 11 further comprises
a head cleaning unit installed on the base, wherein the head cleaning unit is movable in a second direction; and
a second position measuring device including a plurality of linear scales and a plurality of scale heads, and for identifying a position of the head cleaning unit,
wherein the plurality of linear scales are arranged in a line,
wherein, while the plurality of scale heads move along the plurality of linear scales, at a preset first position, some scale heads are deactivated and some other scale heads are activated, and at a preset second position, the some scale heads are activated aga

Assignees

• Semes Co Ltd

Inventors

• Sung Bo Ram Chan
• Lee Dong Yun
• Lee Eon Seok

Classifications

• B41J25/001

  Mechanisms for bodily moving print heads or carriages parallel to the paper surface · CPC title

• G01B11/14

  for measuring distance or clearance between spaced objects or spaced apertures (G01B11/26 takes precedence; rangefinders G01C3/00) · CPC title

• G01B3/205

  provided with a counter for digital indication of the measured dimension · CPC title

• G01B3/004

  Scales; Graduations · CPC title

• B41J2/165

  Prevention {or detection} of nozzle clogging, e.g. cleaning, capping or moistening for nozzles · CPC title