Substrate processing apparatus, reactor mover for moving a reactor of the apparatus and method of maintaining the reactor of the apparatus

Patent metadata

Field	Value
Publication number	US-12412759-B2
Application number	US-202117336494-A
Country	US
Kind code	B2
Filing date	Jun 2, 2021
Priority date	Jun 5, 2020
Publication date	Sep 9, 2025
Grant date	Sep 9, 2025

Abstract

The disclosure relates to a substrate processing apparatus for processing a plurality of substrates. The apparatus comprising a reactor mounted in the apparatus and configured for processing substrates and a reactor mover for moving the reactor for maintenance. The reactor mover is constructed and arranged with a lift to move the reactor to a lower height to allow for access to the reactor by a maintenance worker.

First claim

The invention claimed is:

1. A substrate processing apparatus for processing a plurality of substrates, comprising:
a frame;
a reactor mounted to the frame of the apparatus and configured for processing substrates; and,
a reactor mover for moving the reactor for maintenance, the reactor mover comprising a first end, a first hinge, and a swing mechanism, wherein the swing mechanism comprises a swinging arm, a suspension frame constructed and arranged to at least partially embrace the reactor more than 180 degrees around the reactor, and a lift,
wherein the first end is configured to mount to the frame of the apparatus,
wherein the swing mechanism connects to the first end at the first hinge,
wherein the lift is disposed on the swinging arm, and
wherein the lift is constructed and arranged to move the reactor to allow for access to the reactor by a maintenance worker, and wherein the lift is constructed and arranged to move the suspension frame relative to the swinging arm.

2. The substrate processing apparatus according to claim 1 , wherein the reactor mover is constructed and arranged to move the reactor horizontally to a maintenance area.

3. The substrate processing apparatus according to claim 2 , wherein a displacer is constructed and arranged to move the reactor to the maintenance area outside a housing of the apparatus.

4. The substrate processing apparatus according to claim 3 , wherein the apparatus is configured with the reactor mover to:
lift the reactor up within the housing of the apparatus with the lift;
move the reactor to the maintenance area outside the housing of the apparatus with the displacer; and,
lower the reactor in the maintenance area outside the housing with the lift.

5. The substrate processing apparatus according to claim 2 , wherein the first hinge is constructed and arranged to swing the reactor around a first substantially vertical axis.

6. The substrate processing apparatus according to claim 5 , wherein the swing mechanism further comprises a second hinge constructed and arranged to swing the reactor around a second substantially vertical axis.

7. The substrate processing apparatus according to claim 6 , wherein the swing mechanism further comprises a third hinge constructed and arranged to swing the reactor around a third substantially vertical axis.

8. The substrate processing apparatus according to claim 6 , wherein the swinging arm is connected to the first hinge and the second hinge at opposite ends.

9. The substrate processing apparatus according to claim 1 , wherein the lift is constructed and arranged to move the entirety of the suspension frame from a first vertical height to a second vertical height.

10. The substrate processing apparatus according to claim 1 , wherein the swing mechanism is constructed and arranged to swing around the first hinge.

11. The substrate processing apparatus according to claim 10 , wherein the suspension frame comprises a C-shape.

12. The substrate processing apparatus according to claim 1 , wherein the lift is provided with a linear guide mechanism comprising a linear guide, a carriage, a motor or a crank handle to support and move the reactor over the linear guide.

13. The substrate processing apparatus according to claim 12 , wherein the linear guide is disposed along a second substantially vertical axis, wherein the first hinge is constructed and arranged to swing the swing mechanism around a first substantially vertical axis, and wherein the second substantially vertical axis is different than the first substantially vertical axis.

14. The substrate processing apparatus according to claim 12 , wherein the linear guide mechanism forms part of the lift to move the reactor in a substantial vertical direction over the substantially vertical linear guide.

15. The substrate processing apparatus according to claim 1 , wherein the reactor is mounted in the apparatus on a flange and the apparatus is constructed and arranged to clamp the flange to the reactor and the reactor mover is constructed and arranged to move the reactor together with the flange for maintenance.

16. The substrate processing apparatus according to claim 1 , wherein the apparatus is provided with a first and second reactor and the reactor mover is constructed and arranged to move the reactor to a maintenance area provided in between the first and second reactor.

17. The substrate processing apparatus according to claim 1 , wherein the swinging arm comprises a first swinging arm end and a second swinging arm end opposite the first swinging arm end, wherein the first hinge is connected to the first swinging arm end, and wherein the lift is constructed and arranged to move the suspension frame in a direction perpendicular to a direction between the first swinging arm end and the second swinging arm end.

18. The substrate processing apparatus according to claim 1 , wherein the reactor mover comprises a suspension frame connected to a plurality of elongated suspensions, wherein the plurality of elongated suspensions are configured to suspend the reactor from the suspension frame with the plurality of elongated suspensions.

19. The substrate processing apparatus according to claim 18 , wherein at least one of the plurality of elongated suspensions is aligned with a vertical direction.

20. A reactor mover for moving a reactor of a substrate processing apparatus for maintenance, wherein the reactor mover comprises a first end configured to mount to a frame of the substrate processing apparatus, a first hinge, and a swing mechanism comprising a swinging arm, a suspension frame, and a lift constructed and arranged to:
move the reactor to a maintenance area outside the apparatus with a displacer; and,
lower the reactor in the maintenance area outside the housing with the lift,
wherein the first hinge connects the first end to the swing mechanism, wherein the swing mechanism is constructed and arranged to swing the swinging arm around the first hinge,
wherein the lift is disposed on the swinging arm between the first hinge and the suspension frame, wherein the lift is constructed and arranged to move the suspension frame relative to the swinging arm, and
wherein the suspension frame is configured and arranged to at least partially embrace the reactor more than 180 degrees around the reactor.

21. A method of maintaining a reactor of a substrate processing apparatus, the substrate processing apparatus comprising a frame on which the reactor is mounted, by:
connecting a first end of a reactor mover to the frame of the substrate processing apparatus;
connecting the reactor to a second end of the reactor mover, wherein the second end is on an opposite end of an arm of the reactor mover, and wherein the reactor is embraced more than 180 degrees around by the reactor mover;
moving the reactor to a maintenance area outside the apparatus by swinging the reactor mover around a first hinge;
lowering the reactor relative to the arm in the maintenance area outside a housing with a lift, wherein the lift is disposed on the arm between the first hinge and the second end; and,
providing maintenance on the reactor.

Assignees

• Asm Ip Holding Bv

Inventors

• Ronner Gijsbert Hendrik
• De Ridder Christianus G M
• Oosterlaken Theodorus G M
• Boonstra Klaas P
• De Jonge Jeroen
• Jdira Lucian
• Ganani Chaggai Shmuel

Classifications

• H10P72/0462 Primary

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3312

  Vertical transfer of a batch of workpieces · CPC title

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/0612

  Production flow monitoring, e.g. for increasing throughput · CPC title