Ultrathin film shadow mask for lithography and lithography method using the same

Patent metadata

Field	Value
Publication number	US-12411410-B2
Application number	US-202318544920-A
Country	US
Kind code	B2
Filing date	Dec 19, 2023
Priority date	Aug 4, 2023
Publication date	Sep 9, 2025
Grant date	Sep 9, 2025

Abstract

Provided are a new ultrathin film silicon shadow mask which is flexible, is reusable, and can be precisely aligned and manipulated through transfer printing, and a lithography method using the same. A thin thickness of a silicon shadow mask may intrinsically form a pattern having an enhanced resolution in a plane and a non-planar surface. Further, the silicon shadow mask may be formed on a substrate by metal deposition in addition to etching in a multi-layer configuration by a transfer printing technology based alignment method. Through such a method, a material in which patterning is impossible may be patterned through photolithography.

First claim

What is claimed is:

1. A lithography method using an ultrathin film shadow mask, comprising:
picking up a flexible ultrathin film shadow mask with a stamp;
aligning the ultrathin film shadow mask on a substrate;
seating the ultrathin film shadow mask on the substrate;
separating the stamp from the ultrathin film shadow mask;
performing an ion injection, deposition, spin coating, or etching process on the substrate;
attaching the ultrathin film shadow mask with the stamp; and
removing the ultrathin film shadow mask from the substrate.

2. The lithography method using an ultrathin film shadow mask of claim 1 , wherein a thickness of the ultrathin film shadow mask is several μm to dozens of μm, and
when the substrate is bent, the ultrathin film shadow mask is seated in a state of being bent along the substrate.

3. The lithography method using an ultrathin film shadow mask of claim 2 , wherein the ultrathin film shadow mask is made of a silicon.

4. The lithography method using an ultrathin film shadow mask of claim 3 , wherein in the seating, the ultrathin film shadow mask is fixed to the substrate as a freestanding type.

5. The lithography method using an ultrathin film shadow mask of claim 4 , wherein the picking up is configured to pick up the ultrathin film shadow mask by attaching the top of the ultrathin film shadow mask with the stamp.

6. The lithography method using an ultrathin film shadow mask of claim 4 , wherein multi-layer patterns are enabled to be formed in the substrate by performing,
after the removing of the ultrathin film shadow mask from the substrate,
picking up a second ultrathin film shadow mask having a different pattern from the ultrathin film shadow mask with the stamp,
aligning the second ultrathin film shadow mask on the substrate,
seating the second ultrathin film shadow mask on the substrate,
separating the stamp from the second ultrathin film shadow mask,
performing an ion injection, deposition, spin coating, or etching process on the substrate,
attaching the second ultrathin film shadow mask with the stamp, and
removing the second ultrathin film shadow mask from the substrate.

7. The lithography method using an ultrathin film shadow mask of claim 1 , further comprising:
cleaning the ultrathin film shadow mask removed from the substrate by soaking the ultrathin film shadow mask in an etching solution.

Assignees

• Postech Res & Business Dev Found

Inventors

• Kim Seok
• Lee Sangyeop

Classifications

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• G03F7/0035

  Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface · CPC title

• B41N1/248

  Mechanical details, e.g. fixation holes, reinforcement or guiding means; Perforation lines; Ink holding means; Visually or otherwise detectable marking means; Stencil units · CPC title

• B41C1/14

  for stencil-printing or silk-screen printing · CPC title

• B41N1/12

  non-metallic other than stone {, e.g. printing plates or foils comprising inorganic materials in an organic matrix (B41N1/003, B41N1/006 take precedence)} · CPC title