Automated showerhead tilt adjustment

Patent metadata

Field	Value
Publication number	US-12410519-B2
Application number	US-202118012224-A
Country	US
Kind code	B2
Filing date	Jun 10, 2021
Priority date	Jun 23, 2020
Publication date	Sep 9, 2025
Grant date	Sep 9, 2025

Abstract

In some examples, an automated tilting system is provided for adjusting an orientation of a component in a substrate processing chamber. The automated tilting system comprises at least one tilt adjustment motor arranged to cooperate with the component and be connected to a portion of the component by a coupling. The coupling is configured such that automated rotational motion by the at least one tilt adjustment motor imparts corresponding axial movement, relative to the at least one tilt adjustment motor or a datum structure, to the connected portion of the component to adjust the orientation of the component in the processing chamber.

First claim

What is claimed is:

1. An automated tilting system for adjusting an orientation of a component in a substrate processing chamber, the automated tilting system comprising:
at least one tilt adjustment motor arranged to cooperate with the component;
the at least one tilt adjustment motor connected directly or indirectly to a connected portion of the component by a coupling, the coupling configured such that automated rotational motion by the at least one tilt adjustment motor imparts corresponding axial movement, relative to the at least one tilt adjustment motor or a datum structure, to the connected portion of the component thereby to adjust the orientation of the component in the processing chamber, wherein the coupling comprises:
a plunge interface that allows axial movement of a driven member relative to a drive member while transmitting rotational motion between the drive member and the driven member,
wherein the driven member is configured to move axially independent of the at least one tilt adjustment motor to decouple axial loads from the at least one tilt adjustment motor, and wherein the component is a showerhead component or a cooling plate component.

2. The automated tilting system of claim 1 , wherein the coupling includes an axial plunge coupler-screw interface.

3. The automated tilting system of claim 2 wherein the axial plunge coupler-screw interface decouples axial load from an associated tilt adjustment motor.

4. The automated tilting system of claim 2 , wherein the axial plunge coupler-screw interface includes a ball-end screw received in a spherical cup.

5. The automated tilting system of claim 1 , further comprising a bellows interposed between the component and the processing chamber.

6. The automated tilting system of claim 5 , wherein the bellows at least partially provides a vacuum seal between the component and the processing chamber.

7. The automated tilting system of claim 1 , further comprising one or more load compensators.

8. The automated tilting system of claim 1 , wherein the component includes a friction stir welded component.

Assignees

• Lam Res Corp

Inventors

• Tehrani Sam Jafarian
• Cmelak Bryan Anthony
• Hiester Jacob Lee
• Luo Bin
• Wiltse John

Classifications

• C23C16/52

  Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} · CPC title

• C23C16/45565 Primary

  Shower nozzles · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• C23C16/463

  Cooling of the substrate · CPC title

• C23C16/45542

  Plasma being used non-continuously during the ALD reactions · CPC title