Method and system for switching a dispensed fluid in a nanofabrication dispensing system

Patent metadata

Field	Value
Publication number	US-12409466-B2
Application number	US-202218064798-A
Country	US
Kind code	B2
Filing date	Dec 12, 2022
Priority date	Dec 12, 2022
Publication date	Sep 9, 2025
Grant date	Sep 9, 2025

Abstract

A method of switching a first fluid supplied to a dispenser with a second fluid. The method includes stopping the first fluid from flowing into a common portion of a flow system, causing a flush fluid to flow through the common portion, stopping the flush fluid from flowing into the common portion, removing the flush fluid from the common portion, causing the second fluid to flow through the common portion, and continuously circulating the first fluid to and from a reservoir without the first liquid entering the common portion of the flow system. The continuously circulating of the first fluid begins a) after stopping the fluid liquid from flowing into the common portion of the flow system and b) prior to or during the second fluid flowing through the common portion of the flow system.

First claim

What is claimed is:

1. A method of switching a first fluid supplied to a dispenser with a second fluid, the method comprising:
stopping the first fluid from flowing into a common portion of a flow system, the common portion including:
a supply manifold;
the dispenser;
a return manifold;
a supply path providing fluid communication between the supply manifold and the dispenser; and
a return path providing fluid communication between the dispenser and the return manifold,

causing a flush fluid to flow through the common portion of the flow system;
stopping the flush fluid from flowing into the common portion of the flow system;
removing the flush fluid from the common portion of the flow system;
causing the second fluid to flow through the common portion of the flow system; and
continuously circulating the first fluid to and from a reservoir without the first fluid entering the common portion of the flow system,
wherein the continuously circulating of the first fluid begins a) after stopping the first fluid from flowing into the common portion of the flow system and b) prior to or during the second fluid flowing through the common portion of the flow system.

2. The method of claim 1 , further comprising maintaining the continuously circulating of the first fluid as long as the second fluid flows through the common portion of the flow system.

3. The method of claim 1 , wherein the continuously circulating of the first fluid begins simultaneously with causing the flush fluid to flow through the common portion of the flow system.

4. The method of claim 1 , wherein the continuously circulating of the first fluid begins simultaneously with causing the second fluid to flow through the common portion of the flow system.

5. The method of claim 1 , wherein both the first fluid and second fluid include a polymerizable material.

6. The method of claim 1 , wherein the first fluid is different from the second fluid.

7. The method of claim 1 , further comprising continuously circulating a third fluid to and from a reservoir without the third fluid entering the common portion of the flow system.

8. The method of claim 1 , wherein the removing of the flush fluid further comprises causing a drying gas to flow into the common portion of the flow system.

9. The method of claim 1 , wherein the common portion of the flow system further comprises a pressure manifold.

10. The method of claim 1 , further comprising, after removing the flush fluid from the common portion of the flow system, continuously circulating the flush fluid to and from a flush reservoir without the flush fluid entering the common portion of the flow system.

11. The method of claim 1 , further comprising dispensing the first fluid from the dispenser prior to stopping the first fluid from flowing into the common portion of the flow system.

12. The method of claim 7 ,
wherein the first fluid is different from the second and third fluid; and
wherein the second fluid is different from the third fluid.

13. The method of claim 7 , wherein the continuously circulating of the third fluid begins prior to the stopping of the first fluid and is maintained through the causing of the second fluid to flow through the common portion of the flow system.

14. The method of claim 8 , wherein the drying gas is nitrogen and/or clean dry air.

15. The method of claim 9 , wherein the supply path includes supply conduits connecting the supply manifold to the pressure manifold and connecting the pressure manifold to the dispenser.

16. The method of claim 11 , further comprising dispensing the second fluid from the dispenser after causing the second fluid to flow through the common portion of the flow system.

17. The method of claim 15 , wherein the return path includes return conduits connecting the dispenser to the pressure manifold and connecting the pressure manifold to the return manifold.

18. A method of making an article comprising:
stopping a first fluid from flowing into a common portion of a flow system, the common portion including:
a supply manifold;
a dispenser;
a return manifold;
a supply path providing fluid communication between the supply manifold and the dispenser; and
a return path providing fluid communication between the dispenser and the return manifold,

causing a flush fluid to flow through the common portion of the flow system;
stopping the flush fluid from flowing into the common portion of the flow system;
removing the flush fluid from the common portion of the flow system;
causing a second fluid to flow through the common portion of the flow system;
continuously circulating the first fluid to and from a reservoir without the first fluid entering the common portion of the flow system,
wherein the continuously circulating of the first fluid begins a) after stopping the first fluid from flowing into the common portion of the flow system and b) prior to or during the second fluid flowing through the common portion of the flow system;
dispensing the second fluid onto a substrate using the dispenser;
forming a pattern or a layer of the second fluid dispensed on the substrate; and
processing the formed pattern or layer to make the article.

Assignees

• Canon Kk

Inventors

• Mann Tyler Pearce
• Shackleton Steven C

Classifications

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• B08B9/0321 Primary

  using pressurised, pulsating or purging fluid (E04F17/126 takes precedence) · CPC title

• B41M5/0047

  by ink-jet printing · CPC title

• B41J2/045

  by pressure, e.g. electromechanical transducers · CPC title

• B05B12/14 Primary

  for supplying a selected one of a plurality of liquids or other fluent materials {or several in selected proportions} to a {spray apparatus, e.g. to a} single spray outlet · CPC title