Negative tone photosensitive composition for euv light, pattern forming method, and method for manufacturing electronic device
US-2021011380-A1 · Jan 14, 2021 · US
US12398301B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12398301-B2 |
| Application number | US-202218706151-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 18, 2022 |
| Priority date | Dec 6, 2021 |
| Publication date | Aug 26, 2025 |
| Grant date | Aug 26, 2025 |
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An adhesive composition is described comprising at least one cyclic imide monomer comprising an unsaturated carbonyl. The adhesive composition is a polymerizable composition or a polymerized composition. The polymerizable adhesive composition may comprise at least one monomer, oligomer, polymer, or a combination thereof comprising ethylenically unsaturated groups and/or an epoxy resin. The cyclic imide monomer may comprise an imide group with an α, β-unsaturated carbonyl in a heterocyclic ring wherein the ring comprises at least 6 covalently bonded atoms. Also described are methods of forming an adhesive coated substrate and articles.
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What is claimed is: 1. A composition comprising an adhesive composition and a cyclic imide monomer having the structure: wherein L is a covalent bond or an organic linking group; Y is alkyl, aryl, hydroxyl, carboxylic acid, or an ethylenically unsaturated polymerizable group; and R 1 and R 2 are substituents; and an epoxy resin. 2. The composition of claim 1 wherein R 1 and R 2 are substituents such that the cyclic imide monomer ring-opens during polymerization thereby forming radicals including C1 to C4 alkyl groups. 3. The composition of claim 1 wherein L is (hetero) alkylene or (hetero) arylene. 4. The composition of claim 1 wherein Y is a carboxylic acidic group or a (meth)acrylate group. 5. The composition of claim 1 wherein L comprises at least one hydroxyl group. 6. A composition comprising an adhesive composition and a cyclic imide monomer having the structure: wherein R is an organic linking group; and R 1 and R 2 are independently substituents; and an epoxy resin. 7. The composition of claim 6 wherein R 1 and R 2 are substituents such that the cyclic imide monomer ring-opens during polymerization thereby forming radicals including C1 to C4 alkyl groups. 8. The composition of claim 6 wherein R is (hetero) alkylene or (hetero) arylene, optionally comprising at least one pendant ethylenically unsaturated polymerizable group. 9. The composition of claim 1 wherein the adhesive composition comprises less than 10, 9, 8, 7, 6, 5, 4, 3, 2, or 1 wt. % of the cyclic imide monomer. 10. The composition of claim 1 wherein the cyclic imide monomer comprises a (meth)acryl group. 11. The composition of claim 1 wherein the adhesive composition is a polymerizable composition or a polymerized composition. 12. The composition of claim 11 wherein the polymerizable composition comprises at least one monomer, oligomer, polymer, or a combination thereof comprising ethylenically unsaturated groups. 13. An adhesive coated article comprising a first substrate and the polymerized composition of claim 1 and a second substrate such the polymerized composition bonds the first substrate to the second substrate. 14. A composition comprising: polymerized units having the structure: wherein L is a covalent bond or a linking group; Y is alkyl, aryl, hydroxyl, carboxylic acid, or an ethylenically unsaturated group; R 1 and R 2 are independently substituents; and P and P′ are independently polymerized units of an ethylenically unsaturated polymerizable monomer, oligomer, polymer, or combination thereof; and an epoxy resin; wherein the composition is an adhesive composition. 15. The composition of claim 6 wherein the adhesive composition comprises less than 10, 9, 8, 7, 6, 5, 4, 3, 2, or 1 wt. % of the cyclic imide monomer. 16. The composition of claim 6 wherein the cyclic imide monomer comprises a (meth)acryl group. 17. The composition of claim 6 wherein the adhesive composition is a polymerizable composition or a polymerized composition. 18. The composition of claim 17 wherein the polymerizable composition comprises at least one monomer, oligomer, polymer, or a combination thereof comprising ethylenically unsaturated groups. 19. An adhesive coated article comprising a first substrate and the polymerized composition of claim 6 and a second substrate such the polymerized composition bonds the first substrate to the second substrate. 20. An adhesive coated article comprising a first substrate and the polymerized composition of claim 14 and a second substrate such the polymerized composition bonds the first substrate to the second substrate.
Epoxidised polymerised polyenes · CPC title
{Organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond} in combination with a macromolecular compound other than an unsaturated polymer of groups C09J159/00 - C09J187/00 · CPC title
Homopolymers or copolymers of methyl methacrylate · CPC title
Adhesives based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond {; adhesives, based on monomers of macromolecular compounds of groups C09J183/00 - C09J183/16} · CPC title
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