Film preparation method, solar cell, photovoltaic device, and photovoltaic system

Patent metadata

Field	Value
Publication number	US-12396288-B2
Application number	US-202318369946-A
Country	US
Kind code	B2
Filing date	Sep 19, 2023
Priority date	Apr 12, 2023
Publication date	Aug 19, 2025
Grant date	Aug 19, 2025

Abstract

The present application provides a film preparation method, a solar cell, a photovoltaic device, and a photovoltaic system. The film preparation method includes forming a first passivation layer on a first surface of a substrate by using a first preparation technique; and forming a second passivation layer on a surface of the first passivation layer away from the substrate by using a second preparation technique, a material of the second passivation layer is the same as that of the first passivation layer; wherein a passivation layer forming speed of the first preparation technique is lower than that of the second preparation technique, and a passivation effect of the first passivation layer is better than that of the second passivation layer.

First claim

What is claimed is:

1. A film preparation method, comprising:
forming a first passivation layer on a first surface of a substrate by using a first preparation technique; and
forming a second passivation layer on a surface of the first passivation layer away from the substrate by using a second preparation technique, a material of the second passivation layer includes aluminum oxide, and a material of the first passivation layer includes aluminum oxide;
wherein forming the first passivation layer on the first surface of the substrate by using the first preparation technique includes:
controlling a substrate to move to sequentially pass through a first jet region, a gas-discharge region, and a third jet region in a reaction chamber, wherein a first precursor is introduced to the first jet region, a second precursor is introduced to the third jet region, the gas-discharge region is configured to discharge gaseous substances in the gas-discharge region from the reaction chamber, and the second precursor is adapted to react with the first precursor to form the first passivation layer; and
repeating the above step until a thickness of the first passivation layer reaches a first thickness;
wherein the first thickness of the first passivation layer is smaller than a second thickness of the second passivation layer, the first thickness of the first passivation layer is 2 nm to 6 nm;
wherein the first preparation technique includes atomic layer deposition, a passivation layer forming speed of the first preparation technique is lower than that of the second preparation technique, and a passivation effect of the first passivation layer is greater than that of the second passivation layer.

2. The film preparation method according to claim 1 , wherein the passivation effect of the first passivation layer being greater than that of the second passivation layer and includes:
a negative charge density in the first passivation layer is greater than that in the second passivation layer.

3. The film preparation method according to claim 1 , wherein in the forming of the first passivation layer on the first surface of the substrate by using the first preparation technique, the first passivation layer is also formed on a peripheral side surface of the substrate, the peripheral side surface is connected to the first surface.

4. The film preparation method according to claim 1 , wherein the second preparation technique includes plasma-enhanced chemical vapor deposition or alternately performed plasma-enhanced chemical vapor deposition and atomic layer deposition.

5. The film preparation method according to claim 1 , wherein the passivation effect of the first passivation layer being greater than that of the second passivation layer and includes:
a hydrogen content in the first passivation layer is less than that in the second passivation layer.

6. A film preparation method, comprising:
forming a first passivation layer on a first surface of a substrate by using a first preparation technique, including:
controlling the substrate to move to sequentially pass through a first jet region, a second jet region, and a third jet region, wherein a first precursor is introduced to the first jet region from a moment that the substrate enters the first jet region, a spacing gas is constantly introduced to the second jet region, and a second precursor is introduced to the third jet region from a moment that the substrate enters the third jet region, the second precursor is adapted to react with the first precursor to form the first passivation layer, the spacing gas is configured to space the first precursor from the second precursor, thereby suppressing a reaction between the first precursor and the second precursor in an area other than on the first surface of the substrate; and
forming a second passivation layer on a surface of the first passivation layer away from the substrate by using a second preparation technique, a material of the second passivation layer including aluminum oxide, and a material of the first passivation layer including aluminum oxide;
wherein a passivation layer forming speed of the first preparation technique is lower than that of the second preparation technique, and a passivation effect of the first passivation layer is greater than that of the second passivation layer.

7. The film preparation method according to claim 6 , wherein a distance between the first jet region and the third jet region is determined according to jet flow rates and/or jet pressures of the first precursor and the second precursor.

8. A film preparation method, comprising:
forming a first passivation layer on a first surface of a substrate by using a first preparation technique; and
forming a second passivation layer on a surface of the first passivation layer away from the substrate by using a second preparation technique, a material of the second passivation layer including aluminum oxide, and a material of the first passivation layer including aluminum oxide;
wherein the first preparation technique includes atomic layer deposition, a passivation layer forming speed of the first preparation technique is lower than that of the second preparation technique, and a hydrogen content in the first passivation layer is less than that in the second passivation layer.

Assignees

• Trina Solar Co Ltd

Inventors

• Liu Chengfa
• Zhang Shuai
• Chen Hong
• Lu Yugang
• Li Wanli
• Zou Yang

Classifications

• H10P14/6336

  in the presence of a plasma [PECVD] · CPC title

• H10P14/6339

  deposition by cyclic CVD, e.g. ALD, ALE or pulsed CVD · CPC title

• H10P14/662

  Laminate layers, e.g. stacks of alternating high-k metal oxides (adhesion layers or buffer layers H10P14/6508, H10P14/6548) · CPC title

• H10P14/69391

  the material containing aluminium, e.g. Al2O3 · CPC title

• H10F77/311 Primary

  for photovoltaic cells · CPC title