Coating composition and planarization of high refractive index overcoat on gratings

Patent metadata

Field	Value
Publication number	US-12392940-B2
Application number	US-202117327060-A
Country	US
Kind code	B2
Filing date	May 21, 2021
Priority date	May 21, 2021
Publication date	Aug 19, 2025
Grant date	Aug 19, 2025

Abstract

An optical device includes an overcoat layer on a surface-relief grating. The overcoat layer is formed by a process including: depositing a layer of a first resin material that is curable by heat or electromagnetic radiation on a surface-relief grating that includes a plurality of grating ridges and a plurality of grating grooves to at least partially fill the plurality of grating grooves, curing the layer of the first resin material, depositing a layer of a second resin material that is curable by heat or electromagnetic radiation and has a higher flowability than the first resin material on the layer of the first resin material, annealing the layer of the second resin material to allow the second resin material to flow and form a planar top surface, and curing the layer of the second resin material.

First claim

What is claimed is:

1. An optical device comprising:
a surface-relief grating formed on or in waveguide, the surface-relief grating including a plurality of ridges and a plurality of grooves; and
an overcoat layer filling the plurality of grooves and on top of the surface-relief grating, the overcoat layer comprising:
a first overcoat material layer including a first resin material characterized by a first refractive index equal to or greater than 1.8; and
a second overcoat material layer on the first overcoat material layer and including a second resin material,
wherein a thickness of the overcoat layer on top of and in contact with the plurality of ridges of the surface relief grating is equal to or less than 67.45 nm.

2. The optical device of claim 1 , wherein the thickness of the overcoat layer on top of the plurality of ridges is equal to or less than 50 nm.

3. The optical device of claim 1 , wherein:
the second resin material includes an acrylate resin or an epoxy resin; and
a second refractive index of the second resin material is greater than 1.5.

4. The optical device of claim 1 , wherein the first resin material includes:
a resin comprising acrylate or epoxy and characterized by a third refractive index greater than 1.6; and
nanoparticles crosslinked with or dispersed in the resin, the nanoparticles including titanium oxide, zirconium oxide, hafnium oxide, tungsten oxide, zinc tellurium, gallium phosphide, a derivative thereof, or a combination thereof.

5. The optical device of claim 4 , wherein the nanoparticles are characterized by:
a linear dimension greater than 10 nm; and
a fourth refractive index greater than the third refractive index of the resin.

6. The optical device of claim 1 , wherein a depth of the plurality of grooves is greater than 200 nm.

7. The optical device of claim 1 , wherein the plurality of grooves is characterized by a non-uniform depth, a non-uniform pitch, a non-uniform width, a non-uniform slant angle, or a combination thereof.

8. The optical device of claim 1 , wherein a surface peak-to-valley height of a top surface of the second overcoat material layer is equal to or less than 5 nm.

Assignees

• Meta Platforms Tech Llc

Inventors

• Zhang Keren
• Vora Ankit

Classifications

• G02B2207/101

  Nanooptics · CPC title

• G02B27/4205

  having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant · CPC title

• B05D7/546

  each layer being cured, at least partially, separately · CPC title

• G02B1/04

  made of organic materials, e.g. plastics (G02B1/08 takes precedence) · CPC title

• G02B5/1871

  Transmissive phase gratings · CPC title