Ultra-broadband mid-infrared generation in dispersion-engineered thin-film lithium niobate

Patent metadata

Field	Value
Publication number	US-12386237-B2
Application number	US-202318196764-A
Country	US
Kind code	B2
Filing date	May 12, 2023
Priority date	May 13, 2022
Publication date	Aug 12, 2025
Grant date	Aug 12, 2025

Abstract

In some embodiments, a device for generating mid-infrared radiation is provided. The device may include a thin film quadratic nonlinear waveguide formed on a mid-infrared transparent cladding by a thin film material of a predetermined film thickness, the waveguide having a predetermined etch depth and a predetermined top width. At least one of the predetermined film thickness, the predetermined etch depth, and the predetermined top width may be tuned for the device to generate a coherent idler wave as a mid-infrared radiation from a fixed pump wave and a tunable signal wave.

First claim

What is claimed is:

1. A tunable device for generating mid-infrared radiation, the tunable device comprising:
a thin film quadratic nonlinear waveguide formed on a mid-infrared transparent cladding by a thin film material of a predetermined film thickness, the thin film quadratic nonlinear waveguide having a predetermined etch depth and a predetermined top width; and
at least one of the predetermined film thickness, the predetermined etch depth, and the predetermined top width being tuned for:
the tunable device to generate a coherent idler wave as a mid-infrared radiation from a fixed pump wave and a tunable signal wave, and
an optical parametric amplification of either the tunable signal wave or the coherent idler wave, both the tunable signal wave and the coherent idler wave being broadly tunable in presence of the fixed pump wave and for a poling period and a temperature.

2. The tunable device of claim 1 , wherein the thin film material comprises lithium niobate.

3. The tunable device of claim 1 , wherein at least one of the predetermined film thickness, the predetermined etch depth, and the predetermined top width are tuned for generating a broadband difference frequency for the coherent idler wave from the fixed pump wave and the tunable signal wave.

4. The tunable device of claim 1 , wherein the mid-infrared transparent cladding comprises a sapphire.

5. The tunable device of claim 1 , wherein the mid-infrared transparent cladding comprises a multilayer cladding.

6. The tunable device of claim 1 , wherein the tunable device generates the coherent idler wave with phase matching peaks configured to be tuned with temperature.

7. A method of generating mid-infrared radiation, the method comprising:
pumping a fixed wave and a tunable signal wave to a thin film quadratic nonlinear waveguide formed on a mid-infrared transparent cladding by a thin film material of a predetermined film thickness, the thin film quadratic nonlinear waveguide having a predetermined etch depth and a predetermined top width;
generating, by the thin film quadratic nonlinear waveguide based on tuning of at least one of the predetermined film thickness, the predetermined etch depth, and the predetermined top width, a coherent idler wave as a mid-infrared radiation from the fixed wave and the tunable signal wave; and
performing, by the thin film quadratic nonlinear waveguide based on the tuning of at least one of the predetermined film thickness, the predetermined etch depth, and the predetermined top width, an optical parametric amplification of either the tunable signal wave or the coherent idler wave, both the tunable signal wave and the coherent idler wave being broadly tunable in presence of the fixed pump wave and for a poling period and a temperature.

8. The method of claim 7 , wherein the thin film material comprises lithium niobate.

9. The method of claim 7 , wherein at least one of the predetermined film thickness, the predetermined etch depth, and the predetermined top width are tuned for generating a broadband difference frequency for the coherent idler wave from the fixed pump wave and the tunable signal wave.

10. The method of claim 7 , wherein the mid-infrared transparent cladding comprises a sapphire.

11. The method of claim 7 , wherein the mid-infrared transparent cladding comprises a multilayer cladding.

12. The method of claim 7 , wherein generating the coherent idler wave comprises:
generating, by the thin film quadratic nonlinear waveguide, the coherent idler wave with phase matching peaks that can be tuned with temperature.

13. A method of manufacturing a device for generating mid-infrared radiation, the method comprising:
forming a thin film quadratic nonlinear waveguide on a mid-infrared transparent cladding by a thin film material, the thin film quadratic nonlinear waveguide having an etch depth and a top width;
tuning at least one of a film thickness of the thin film material, the etch depth, and the top width for the device to generate a coherent idler wave as a mid-infrared radiation from a fixed pump wave and a tunable signal wave; and
tuning at least one of the film thickness, the etch depth, and the top width such that an optical parametric amplification of either the tunable signal wave or the coherent idler wave, both the tunable signal wave and the coherent idler wave being broadly tunable in presence of the fixed pump wave and for a poling period and a temperature.

14. The method of claim 13 , wherein the thin film material comprises lithium niobate.

15. The method of claim 13 , further comprising:
tuning at least one of the film thickness, the etch depth, and the top width such that the device generates a broadband difference frequency for the coherent idler wave from the fixed pump wave and the tunable signal wave.

16. The method of claim 13 , further comprising:
using sapphire or multilayer cladding as the mid-infrared transparent cladding.

17. The method of claim 13 , wherein the etch depth is greater than approximately 600 nm.

Assignees

• Ntt Research Inc
• Univ Leland Stanford Junior

Inventors

• Mishra Jatadhari
• Jankowski Marc
• Hwang Alexander Y
• Stokowski Hubert S
• Mckenna Timothy P
• Safavi-Naeini Amir H
• Fejer Martin M

Classifications

• G02F1/3546

  Active phase matching, e.g. by electro- or thermo-optic tuning · CPC title

• G02F2202/20

  LiNbO3, LiTaO3 · CPC title

• G02F1/3548

  Quasi phase matching [QPM], e.g. using a periodic domain inverted structure · CPC title

• G02F2202/07

  poled · CPC title

• G02F1/392 Primary

  Parametric amplification · CPC title