Methods, systems, and apparatus for inkjet printing self-assembled monoloayer (SAM) structures on substrates

Patent metadata

Field	Value
Publication number	US-12384185-B2
Application number	US-202318142305-A
Country	US
Kind code	B2
Filing date	May 2, 2023
Priority date	May 6, 2022
Publication date	Aug 12, 2025
Grant date	Aug 12, 2025

Abstract

Embodiments of the present disclosure relate to methods, systems, and apparatus for inkjet printing self-assembled monolayer (SAM) structures on substrates. In one embodiment, which can be combined with other embodiments, one or more SAM layers are printed on a substrate surface of a substrate in a localized manner such that a portion of the substrate surface is left exposed to a processing region of the inkjet chamber. The printing includes spraying one or more subsections of the substrate surface with an ink, the ink having a SAM composition. The SAM composition includes an active component, and a hydrophobic tail.

First claim

What is claimed is:

1. A method of forming a self-assembled monolayer (SAM) structure, the method comprising:
positioning a substrate in an inkjet chamber;
printing one or more SAM layers on a substrate surface of the substrate in a localized manner such that a portion of the substrate surface is left exposed to a processing region of the inkjet chamber, the printing comprising:
spraying one or more subsections of the substrate surface with an ink, the ink comprising a SAM composition, and the SAM composition comprising:
an active component, and
a hydrophobic tail;

allowing the one or more SAM layers to react with the substrate surface; and
removing upper sections of the one or more SAM layers after the allowing of the one or more SAM layers to react with the substrate surface.

2. The method of claim 1 , wherein the one or more SAM layers include a plurality of SAM layers printed in a spatial manner such that a first SAM layer is spaced from a second SAM layer.

3. The method of claim 1 , further comprising forming one or more layers over the portion of the substrate surface.

4. The method of claim 1 , further comprising activating the substrate surface prior to the printing of the one or more SAM layers, and the activating comprises exposing the substrate surface to one or more of an oxygen plasma, UV light, or ozone.

5. The method of claim 1 , further comprising removing one or more portions of the one or more SAM layers after the allowing of the one or more SAM layers to react with the substrate surface.

6. The method of claim 1 , wherein the substrate surface comprises silanol, and the SAM composition reacts with the silanol to form siloxane.

7. The method of claim 1 , wherein the SAM composition further comprises one or more of a polymer or an oligomer.

8. The method of claim 7 , wherein the polymer includes one or more of a copolymer, perfluoropolyether (PFPE), polyethylene glycol (PEG), polydimethylsiloxane (PDMS), polypropylene glycol (PPG), polyacrylate, one or more polymethacrylates, polystyrene, or one or more derivatives thereof.

9. The method of claim 7 , wherein the one or more SAM layers are allowed to react with the substrate surface at a reaction temperature, and the polymer has a glass transition temperature (Tg) that is less than the reaction temperature.

10. The method of claim 7 , further comprising curing the one or more SAM layers to cure the polymer prior to the allowing of the one or more SAM layers to react with the substrate surface, the curing including one or more of ultraviolet (UV) curing or thermal curing.

11. The method of claim 7 , wherein the SAM composition further comprises one or more of a solvent or an additive, wherein:
the solvent includes one or more of an organic alkane, an alkene, alcohol, an ester, an ether, a carbonate, or a fluorinated solvent; or
the additive includes one or more of: one or more amphiphilic materials, one or more copolymers, or one or more charged molecules.

12. The method of claim 1 , wherein each of the upper sections includes a polymer matrix, and the removing of the upper sections comprises stripping the upper sections using a solvent that is organic or water.

13. The method of claim 1 , wherein the active component includes one or more of silane, thiol, amine, acid, or alcohol.

14. The method of claim 13 , wherein the hydrophobic tail includes one or more C1-C20 Alkanes having a back bond that is linear or branched, and the one or more C1-C20 Alkanes are perfluorinated, partially fluorinated, or non-fluorinated.

15. The method of claim 14 , wherein the hydrophobic tail includes one or more of an ether, an ester, an amide, a ketone, a vinyl, an alkynyl, a carbonate, or a urethane.

16. The method of claim 13 , wherein the hydrophobic tail includes one or more of a copolymer, polyethylene glycol (PEG), polydimethylsiloxane (PDMS), polypropylene glycol (PPG), polyacrylate, one or more polymethacrylates, polystyrene, or one or more derivatives thereof.

17. A system for processing substrates, comprising:
an inkjet chamber configured to conduct a printing operation;
a stage positioned in the inkjet chamber;
an inkjet printer head positioned in the inkjet chamber;
an activation chamber configured to conduct an activation operation;
a curing chamber configured to conduct a curing operation; and
a controller communicatively coupled to the stage, the inkjet printer head, the activation chamber, and the curing chamber, the controller comprising instructions that, when executed, cause a plurality of operations to be conducted, the plurality of operations comprising:
the operations of the method of claim 1 .

18. The system of claim 17 , further comprising:
a reaction chamber configured to allow the reaction to occur at a reaction temperature; and
a film formation chamber configured to conduct a film formation operation.

19. A non-transitory computer readable medium comprising instructions that, when executed, cause a plurality of operations to be conducted, the plurality of operations comprising:
activating a substrate surface of a substrate;
printing one or more SAM layers on the substrate surface of the substrate in a localized manner such that a portion of the substrate surface is left exposed, the printing comprising:
spraying one or more subsections of the substrate surface with an ink, the ink comprising a SAM composition, and the SAM composition comprising:
an active component, and
a hydrophobic tail;

curing the one or more SAM layers;
allowing the one or more SAM layers to react with the substrate surface; and
removing upper sections of the one or more SAM layers after the allowing of the one or more SAM layers to react with the substrate surface.

20. A method of forming a self-assembled monolayer (SAM) structure, the method comprising:
positioning a substrate in an inkjet chamber;
printing one or more SAM layers on a substrate surface of the substrate in a localized manner such that a portion of the substrate surface is left exposed to a processing region of the inkjet chamber, the printing comprising:
spraying one or more subsections of the substrate surface with an ink, the ink comprising a SAM composition, and the SAM composition comprising:
an active component,
a hydrophobic tail, and
a polymer; and

allowing the one or more SAM layers to react with the substrate surface, the one or more SAM layers allowed to react with the substrate surface at a reaction temperature, and the polymer has a glass transition temperature (Tg) that is less than the reaction temperature.

21. The method of claim 20 , wherein the SAM composition further comprises an oligomer.

Assignees

• Applied Materials Inc

Inventors

• Luo Yingdong
• Hourani Rami
• Deng Xiaopei
• Luo Kang
• Chen Erica
• Godet Ludovic

Classifications

• B41J11/00

  Devices or arrangements  {of selective printing mechanisms, e.g. ink-jet printers or thermal printers,} for supporting or handling copy material in sheet or web form (script supports connected to the typewriter or printer B41J29/15) · CPC title

• B41J2/01

  Ink jet · CPC title

• B41M5/0047 Primary

  by ink-jet printing · CPC title