Processing apparatus, and manufacturing method of movable body

Patent metadata

Field	Value
Publication number	US-12383981-B2
Application number	US-201716756507-A
Country	US
Kind code	B2
Filing date	Oct 25, 2017
Priority date	Oct 25, 2017
Publication date	Aug 12, 2025
Grant date	Aug 12, 2025

Abstract

A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; a first position change apparatus that changes a position of at least one of the object and an irradiation area that is formed on the surface of the object by the light irradiation apparatus; and a control apparatus that controls the first position change apparatus to form a structure for reducing a frictional resistance of the surface of the object to a fluid by irradiating the surface of the object with the processing light while changing the position of at least one of the irradiation area and the object to change a thickness of a part of the object.

First claim

The invention claimed is:

1. A processing apparatus comprising:
a light irradiation optical system that includes at least one of a lens and a mirror and that irradiates a surface of an object with a processing light;
a position change apparatus that comprises at least one of a driving system and a Galvano mirror and that changes a position of at least one of the object and an irradiation area that is formed on the surface of the object by the light irradiation optical system; and
a controller that is configured to control the position change apparatus to form a structure for reducing a frictional resistance of the surface of the object to a fluid by irradiating the surface of the object with the processing light while changing the position of at least one of the irradiation area and the object to change a thickness of a part of the object,
wherein the controller is configured to control the processing apparatus to form a series of grooves by:
(i) forming a first groove by removing a first part of the object by setting a size of the irradiation area formed on the surface of the object by the light irradiation optical system to a first size and
(ii) forming a second groove, which is connected to the first groove, by removing a second part of the object, whose size is different from a size of the first part, by changing, when irradiating the surface of the object with the processing light, the size of the irradiation area formed on the surface of the object to a second size that is different from the first size based on a positional relationship between the irradiation area and the object.

2. The processing apparatus according to claim 1 , wherein
the position change apparatus changes a position of the light irradiation optical system concerned with the surface of the object.

3. The processing apparatus according to claim 1 , wherein
the light irradiation optical system contacts the object during an irradiation of the processing light.

4. The processing apparatus according to claim 1 , wherein
the light irradiation optical system does not contact the object.

5. The processing apparatus according to claim 1 , further comprising a measurement apparatus that includes a light emitter and a detector and that measures a relative positional relationship between the object and the light irradiation optical system,
the controller being configured to control a position at which the object is irradiated with the processing light from the light irradiation optical system by using a measured result of the measurement apparatus.

6. The processing apparatus according to claim 1 , wherein
the position change apparatus changes a position of at least one of the object and the irradiation area that is formed on the surface of the object by the light irradiation optical system so that the irradiation area moves on the surface of the object along a moving direction.

7. The processing apparatus according to claim 1 , wherein
a concave or convex structural object is formed on the surface of the object, and
the controller is configured to control the light irradiation optical system to change an irradiation state of the processing light when the irradiation area overlaps with the structural object.

8. The processing apparatus according to claim 1 , wherein
a concave or convex structural object is formed on the surface of the object,
the controller is configured to control the position change apparatus so that the irradiation area does not overlap with the structural object.

9. The processing apparatus according to claim 8 , wherein
the object includes at least a part of an airframe of an airplane, and
the structural object includes an operational structural object formed at a surface of the airframe for a flight of the airplane.

10. The processing apparatus according to claim 9 , wherein
the operational structural object includes at least one of a first structural object relating to an antenna, a second structural object relating to a sensor and a third structural object relating to an inflow and an outflow of a fluid.

11. The processing apparatus according to claim 1 , wherein
the controller is configured to control a moving speed of the irradiation area, which is formed on the surface of the object by the light irradiation optical system, relative to the object.

12. The processing apparatus according to claim 1 , wherein
the controller is configured to control the position change apparatus to change a relative positional relationship between the object and the irradiation area that is formed on the surface of the object by the light irradiation optical system based on a vibration state of at least one of the object and the processing apparatus.

13. The processing apparatus according to claim 1 , wherein
the position change apparatus moves the irradiation area that is formed on the surface of the object by the light irradiation optical system in a range along a moving direction on the surface of the object, a width of the range being a first width, and
a second width of the light irradiation optical system along the moving direction is narrower than the first width.

14. The processing apparatus according to claim 1 , wherein
the position change apparatus includes the Galvano mirror, which is configured to deflect the processing light.

15. The processing apparatus according to claim 14 , wherein
the Galvano mirror includes a scanning mirror that is configured to swing or rotate.

16. The processing apparatus according to claim 1 , wherein
the position change apparatus changes a relative positional relationship between the light irradiation optical system and the object.

17. The processing apparatus according to claim 16 , wherein
the position change apparatus moves the light irradiation optical system relative to the object.

18. The processing apparatus according to claim 17 , wherein
the position change apparatus moves the light irradiation optical system in order to move the light irradiation optical system relative to the object.

19. The processing apparatus according to claim 18 , wherein
the position change apparatus moves the object in order to move the light irradiation optical system relative to the object.

20. The processing apparatus according to claim 1 , wherein
the light irradiation optical system is provided to be movable in a direction along the surface of the object.

21. The processing apparatus according to claim 1 , wherein
the controller controls the processing apparatus to change the size of the irradiation area from the first size to the second size by controlling the light irradiation optical system to change a light concentration position of the processing light.

22. A processing method comprising:
irradiating a surface of an object with a processing light;
moving, relative to the object, an irradiation area of the processing light with which the surface of the object is irradiated; and
forming a structure for reducing a frictional resistance of the surface of the object to a fluid by moving the irradiation area to change a thickness of a part of the object,
wherein the forming includes forming a series of grooves by:
forming a first groove by removing a first part of the object by setting a size of the irradiation area formed on the surface of the object to a first size; and
forming a second groove, which is connected to the first groove, by removing a second part of the object, whose size is different from a size of

Assignees

• Nikon Corp

Inventors

• Shiraishi Masayuki
• Egami Shigeki
• Kawabe Yoshio
• Tatsuzaki Yosuke
• Shibazaki Yuichi

Classifications

• B64C21/10

  using other surface properties, e.g. roughness · CPC title

• B64C1/061

  Frames · CPC title

• B23K26/0869

  Devices involving movement of the laser head in at least one axial direction · CPC title

• B23K26/083

  Devices involving movement of the workpiece in at least one axial direction · CPC title

• B23K26/08

  Devices involving relative movement between laser beam and workpiece · CPC title