Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US12378345B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12378345-B2 |
| Application number | US-202117926131-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 13, 2021 |
| Priority date | May 28, 2020 |
| Publication date | Aug 5, 2025 |
| Grant date | Aug 5, 2025 |
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Provided is a resin material showing a high thermal conductivity and having high heat resistance while having a low dielectric constant and a low dielectric loss tangent. The material is a polyfunctional vinyl resin, which is represented by the following general formula (1): where R 1 s each independently represent a hydrocarbon group having 1 to 8 carbon atoms, R 2 s each independently represent a hydrogen atom or a dicyclopentenyl group, and at least one thereof represents a dicyclopentenyl group, Xs each independently represent a hydrogen atom or a vinyl group-containing aromatic group represented by the formula (1 a ), and at least one thereof represents a vinyl group-containing aromatic group, “n” represents a number of repetitions, and the average thereof is a number of from 1 to 5, and Ar represents an aromatic ring.
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The invention claimed is: 1. A polyfunctional vinyl resin, which is represented by the following general formula (1): where R 1 s each independently represent a hydrocarbon group having 1 to 8 carbon atoms, R 2 s each independently represent a hydrogen atom or a dicyclopentenyl group, and at least one thereof represents a dicyclopentenyl group, Xs each independently represent a hydrogen atom or a vinyl group-containing aromatic group represented by formula (1a), and at least one thereof represents a vinyl group-containing aromatic group, and Ar represents an aromatic ring, and “n” represents a number of repetitions, and an average thereof is a number of from 1 to 5. 2. The polyfunctional vinyl resin according to claim 1 , wherein Ar in the formula (1a) represents an aromatic ring selected from the group consisting of: a benzene ring; a naphthalene ring; and a biphenyl ring, and the aromatic ring Ar is unsubstituted, or has one or more substituents. 3. A method of producing the polyfunctional vinyl resin of claim 1 , comprising: causing dicyclopentadiene to react at a ratio of from 0.28-fold mol to 2-fold mol with 1 mol of a 2,6-disubstituted phenol represented by the following general formula (2) to provide a polyhydric hydroxy resin represented by the following general formula (3); and then causing the resultant polyhydric hydroxy resin and an aromatic vinylating agent represented by the following general formula (4) to react with each other: where R 1 , R 2 , “n”, and X are each identical in meaning to the definition in the general formula (1), and R 3 represents a halogen. 4. A polyfunctional vinyl resin composition, comprising, as essential components: the polyfunctional vinyl resin of claim 1 ; and a radical polymerization initiator. 5. A cured article, which is obtained by curing the polyfunctional vinyl resin of claim 1 . 6. A prepreg, comprising: the polyfunctional vinyl resin composition of claim 4 or a semi-cured article thereof; and a fibrous base material. 7. A resin sheet, comprising: a resin layer containing the polyfunctional vinyl resin composition of claim 4 or a semi-cured article thereof; and a supporting film. 8. A laminated plate, which is molded by laminating the prepreg of claim 6 . 9. A cured article, which is obtained by curing the polyfunctional vinyl resin composition of claim 4 . 10. A laminated plate, which is molded by laminating the resin sheet of claim 7 . 11. A laminated plate, which is molded by laminating a prepreg and a resin sheet, wherein the prepreg comprises: the poly functional vinyl resin composition of claim 4 or a semi-cured article thereof; and a fibrous base material, wherein the resin sheet comprises: a resin layer containing the polyfunctional vinyl resin composition of claim 4 or a semi-cured article thereof; and a supporting film.
grafted on to macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds · CPC title
Impregnating materials with prepolymers which can be polymerised in situ, e.g. manufacture of prepregs · CPC title
Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes · CPC title
Conductive · CPC title
Di-electric · CPC title
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