Polishing head and polishing apparatus

Patent metadata

Field	Value
Publication number	US-12377516-B2
Application number	US-202117796844-A
Country	US
Kind code	B2
Filing date	Jan 7, 2021
Priority date	Feb 5, 2020
Publication date	Aug 5, 2025
Grant date	Aug 5, 2025

Abstract

The disclosed subject matter relates to a polishing head for pressing a polishing tool against a substrate, such as a wafer. Further, the disclosed subject matter relates to a polishing apparatus for polishing a substrate with such a polishing head. A polishing head includes an annular elastic member configured to press a polishing tool against the substrate, and a pressing-tool body having a pressing surface configured to press the polishing tool against the substrate via the elastic member, wherein the pressing surface has a first fitting groove in which a first portion of the elastic member fits, the first portion ( 41 ) protrudes from the pressing surface, the elastic member is put on the pressing-tool body ( 43 ) with the elastic member elastically deformed, and the polishing head is configured to press the polishing tool against the substrate by the first portion.

First claim

The invention claimed is:

1. A polishing head for polishing a substrate, comprising:
an annular elastic member configured to press a polishing tool against the substrate; and
a pressing-tool body having a pressing surface configured to press the polishing tool against the substrate via the elastic member,
wherein a first portion of the elastic member is inset into the a first fitting groove of the pressing surface, the first portion being in tight contact with the first fitting groove and being out of contact with a region of the pressing surface other than the first fitting groove,
the first portion protrudes from the pressing surface,
the elastic member is put on the pressing-tool body with the elastic member elastically deformed, and
the polishing head the first portion in the first fitting groove is configured to press the polishing tool against the substrate by the first portion.

2. The polishing head according to claim 1 , wherein the elastic member is detachably put on the pressing-tool body.

3. The polishing head according to claim 1 , wherein the elastic member has a circular cross section.

4. The polishing head according to claim 3 , wherein the first fitting groove has a semi-circular cross section in tight contact with the circular cross section of the first portion.

5. The polishing head according to claim 1 , wherein the elastic member is covered with a coating layer containing a fluororesin.

6. The polishing head according to claim 1 , wherein the pressing-tool body further has a tapered surface extending obliquely from the pressing surface.

7. The polishing head according to claim 1 , wherein a side surface of the pressing-tool body has a second fitting groove in which a second portion of the elastic member fits, the side surface being separated from the pressing surface, and the second fitting groove extending in a longitudinal direction of the polishing tool.

8. The polishing head according to claim 1 wherein the pressing-tool body has a protrusion on a side surface of the pressing-tool body, the side surface being separated from the pressing surface, and
the protrusion supports the elastic member.

9. The polishing head according to claim 1 , wherein
the first fitting groove comprises a plurality of first fitting grooves located away from each other, and
the first portion comprises a plurality of first portions fitting in the plurality of first fitting grooves, respectively.

10. The polishing head according to claim 1 , wherein the first fitting groove has an arc shape having the same curvature as a curvature of the substrate.

11. A polishing apparatus comprising:
a substrate holder configured to hold a substrate; and
the polishing head, according to claim 1 , configured to press a polishing tool against the substrate to polish the substrate.

12. The polishing head according to claim 1 , wherein the first portion has a convex cross section, and the first fitting groove has a concave cross section that conforms with the convex cross section of the first portion and is in tight contact with the convex cross section of the first portion.

13. The polishing head according to claim 1 , wherein a longitudinal direction of the first portion is parallel with the first fitting groove.

14. The polishing head according to claim 1 , wherein the first portion and the first fitting groove extend obliquely across the pressing surface.

Assignees

• Ebara Corp

Inventors

• Kashiwagi Makoto

Classifications

• B24B41/047

  Grinding heads for working on plane surfaces · CPC title

• B24B21/08 Primary

  Pressure shoes; {Pressure members, e.g.} backing belts · CPC title

• B24B41/04

  Headstocks; Working-spindles; Features relating thereto · CPC title

• B24B9/065

  of thin, brittle parts, e.g. semiconductors, wafers · CPC title

• B24B47/14

  by liquid or gas pressure (B24B47/16 takes precedence) · CPC title