Polishing apparatus and polishing method

Patent metadata

Field	Value
Publication number	US-12377515-B2
Application number	US-202117558051-A
Country	US
Kind code	B2
Filing date	Dec 21, 2021
Priority date	Dec 25, 2020
Publication date	Aug 5, 2025
Grant date	Aug 5, 2025

Abstract

A polishing apparatus for performing polishing between a polishing pad and a semiconductor wafer disposed to face the polishing pad includes a polishing table for holding the polishing pad, a top ring for holding the semiconductor wafer, a swing arm for holding the top ring, and a swing shaft motor for causing the swing arm to swing. The polishing apparatus further includes an arm torque detection section that detects an arm torque imparted to the swing arm when the swing arm is swinging in a predetermined angle range, and an endpoint detection section that detects a polishing endpoint indicating the end of polishing on the basis of the arm torque detected by the arm torque detection section.

First claim

What is claimed is:

1. A polishing apparatus for performing polishing between a polishing pad and a polishing target disposed to face the polishing pad, comprising:
a polishing table for holding the polishing pad;
a top ring for holding the polishing target;
a swing arm for holding the top ring;
an arm drive motor for causing the swing arm to swing through an arm angle range;
an arm torque detection circuitry configured to directly or indirectly detect arm torque imparted to the swing arm while the swing arm is swinging through a predetermined angle range, wherein the predetermined angle range is smaller than the arm angle range; and
an endpoint detection circuitry configured to detect a polishing endpoint indicating an end of the polishing on a basis of the arm torque detected by the arm torque detection circuitry,
wherein the arm torque detection circuitry is further configured to detect the arm torque at a plurality of angles, and
the endpoint detection circuitry is further configured at least to:
divide the arm torque detected at the plurality of angles only within the predetermined angle range for at least one cycle of swinging into an arm torque for each angle, wherein the at least one cycle of swinging comprises at least swinging from a predetermined angular position and back to the predetermined angular position;
interpolate the arm torque between temporally adjacent arm torques among the divided arm torque for each angle of the plurality of angles only within the predetermined angle range;
average the interpolated arm torque;
detect the polishing endpoint indicating the end of polishing on a basis of the average of the interpolated arm torques; and
end polishing when the polishing end point is detected.

2. The polishing apparatus according to claim 1 , wherein
the arm torque detection circuitry is configured to detect the arm torque in the predetermined angle range while the swing arm is swinging in a predetermined direction.

3. The polishing apparatus according to claim 2 , wherein the plurality of angles comprises at least three angles for the predetermined direction of the at least one cycle of swinging.

4. The polishing apparatus according to claim 1 , wherein
the arm torque detection circuitry is configured to detect the arm torque in the predetermined angle range while the swing arm is swinging in both directions.

5. The polishing apparatus according to claim 1 , wherein
the arm torque detection circuitry is configured to detect the arm torque imparted to the swing arm at a connection portion between the arm drive motor and the swing arm.

6. The polishing apparatus according to claim 1 , wherein
the arm drive motor is a rotation motor that causes the swing arm to rotate, and
the arm torque detection circuitry is configured to detect the arm torque imparted to the swing arm from a current value of the rotation motor.

7. The polishing apparatus according to claim 6 , wherein
the endpoint detection circuitry is configured to detect the polishing endpoint indicating the end of polishing on a basis of a derivative value of the current value of the rotation motor.

8. The polishing apparatus according to claim 1 , wherein
the polishing apparatus includes a pad dresser that performs dressing of the polishing pad, and the pad dresser is configured to perform the dressing while the swing arm is swinging.

9. The polishing apparatus according to claim 1 , wherein
the endpoint detection circuitry is configured to calculate a swing angle of the swing arm, and calculate the arm torque corresponding to the swing angle.

10. The polishing apparatus according to claim 1 , wherein the predetermined angle range is a range between two different angles within the arm angle range.

11. A polishing method for performing polishing between a polishing pad and a polishing target disposed to face the polishing pad, comprising:
holding the polishing pad on a polishing table;
causing a swing arm to hold a top ring that holds the polishing target;
causing an arm drive motor to cause the swing arm to swing;
detecting, directly or indirectly, an arm torque imparted to the swing arm while the swing arm is swinging continuously in a predetermined angle range, wherein the predetermined angle range is smaller than an arm angle range of the swing arm;
detecting a polishing endpoint indicating an end of the polishing on a basis of the detected arm torque,
on detecting the arm torque, detecting the arm torques at a plurality of angles, and
on detecting the polishing endpoint, dividing the arm torque detected at the plurality of angles only within the predetermined angle range for at least one cycle of swinging into an arm torque for each angle, interpolating the arm torque between temporally adjacent arm torques among the divided arm torque for each angle of the plurality of angles only within the predetermined angle range, averaging the interpolated arm torques, detecting the polishing endpoint indicating the end of polishing on a basis of the average of the interpolated arm torques, and ending polishing when the polishing end point is detected, wherein the at least one cycle of swinging comprises at least swinging from a predetermined angular position and back to the predetermined angular position.

12. The polishing method according to claim 11 , wherein the predetermined angle range is a range between two different angles within the arm angle range.

13. The polishing method according to claim 11 , wherein the plurality of angles comprises at least three angles for a predetermined direction of the at least one cycle of swinging.

Assignees

• Ebara Corp

Inventors

• Suzuki Yuta
• Takahashi Taro

Classifications

• B24B37/042

  operating processes therefor · CPC title

• B24B53/017

  Devices or means for dressing, cleaning or otherwise conditioning lapping tools · CPC title

• B24B47/12

  by mechanical gearing or electric power (B24B47/16 takes precedence) · CPC title

• B24B37/32

  Retaining rings · CPC title

• B24B37/105

  the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement · CPC title