Porous glass base material manufacturing apparatus, method for manufacturing porous glass base material, and method for manufacturing glass base material for optical fiber

Patent metadata

Field	Value
Publication number	US-12371364-B2
Application number	US-202117921751-A
Country	US
Kind code	B2
Filing date	Apr 7, 2021
Priority date	May 1, 2020
Publication date	Jul 29, 2025
Grant date	Jul 29, 2025

Abstract

The porous glass base material manufacturing apparatus releases gas of organic siloxane raw materials into the flame of a group of burners that moves relative to a starting base material along the longitudinal direction of the starting base material rotating around a rotation axis along the longitudinal direction to form soot of porous glass particles on the surface of the starting base material. The porous glass base material manufacturing apparatus is equipped with a vaporizer that vaporizes liquid raw materials containing organic siloxane in a liquid state supplied from a raw material tank to make a raw material mixed gas mixed with raw material gas and carrier gas and a raw material gas pipe that supplies the raw material mixed gas to the burner. The raw material gas pipe is insulated and kept warm by double insulation.

First claim

The invention claimed is:

1. A porous glass base material manufacturing apparatus that releases gas of organic siloxane raw materials into the flame of a group of burners that moves relative to a starting base material along the longitudinal direction of the starting base material rotating around a rotation axis along the longitudinal direction to form soot of porous glass particles on the surface of the starting base material, comprising:
a vaporizer that vaporizes liquid raw materials containing organic siloxane in a liquid state supplied from a raw material tank to make a raw material mixed gas mixed with raw material gas and carrier gas; and
a raw material gas pipe that supplies the raw material mixed gas to a burner of the group of burners,
wherein the raw material gas pipe is insulated and kept warm by double insulation, which is a combination of an inner layer heat-insulation material provided on the outside of the raw material gas pipe and an outer layer heat-insulation material provided on the outside of the inner layer heat-insulation material,
wherein an insulation material with a heat resistance temperature of 160° C. or higher and a thermal conductivity greater than that of the outer insulating material is used for the inner layer heat-insulation material, and
an insulation material with thermal conductivity of 0.05 W/m/K or less (at 20° C.) and a heat resistance temperature lower than that of the inner insulating material is used for the outer layer heat-insulation material.

2. The porous glass base material manufacturing apparatus according to claim 1 , wherein the organic siloxane is octamethylcyclotetrasiloxane (OMCTS).

3. The porous glass base material manufacturing apparatus according to claim 1 , further comprising a heater that heats the raw material gas pipe to a temperature of 140-220° C., wherein the raw material gas pipe is heated and kept at a temperature of 140-220° C.

4. The porous glass base material manufacturing apparatus according to claim 1 , further comprises a liquid mass flow controller that controls the flow rate of the organic siloxane raw material in a liquid state supplied from the raw material tank to the vaporizer,
wherein the vaporizer mixes the organic siloxane raw material with the carrier gas and vaporizes the liquid raw material to make the raw material mixed gas in which the raw material gas and the carrier gas are mixed.

5. The porous glass base material manufacturing apparatus according to claim 1 , further comprises:
a liquid mass flow meter that measures the flow rate of organic siloxane raw material in the liquid state supplied from the raw material tank; and
a liquid gas mixer that has a control valve that controls the flow rate of liquid raw material based on feedback from the liquid mass flow meter and mixes liquid raw material and carrier gas,
wherein the vaporizer vaporizes the liquid raw material mixed with the carrier gas by the liquid gas mixer to make the raw material mixed gas in which the raw material gas and the carrier gas are mixed.

Assignees

• Shinetsu Chemical Co

Inventors

• Noda Naoto

Classifications

• C03B19/106

  by chemical vapour deposition; by liquid phase reaction · CPC title

• C03C13/048

  Silica-free oxide glass compositions · CPC title

• C03B2207/87

  Controlling the temperature · CPC title

• C03B2207/85

  with vapour generated from liquid glass precursors, e.g. directly by heating the liquid · CPC title

• C03B2207/81

  Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters · CPC title