Micro-nano channel structure, sensor and manufacturing method thereof, and microfluidic device

Patent metadata

Field	Value
Publication number	US-12371316-B2
Application number	US-202318517694-A
Country	US
Kind code	B2
Filing date	Nov 22, 2023
Priority date	Apr 3, 2019
Publication date	Jul 29, 2025
Grant date	Jul 29, 2025

Abstract

A micro-nano channel structure, a method for manufacturing the micro-nano channel structure, a sensor, a method for manufacturing the sensor, and a microfluidic device are provided. The micro-nano channel structure includes: a base substrate; a base layer, on the base substrate and including a plurality of protrusions; a channel wall layer, on a side of the plurality of the protrusions away from the base substrate, the channel wall layer has a micro-nano channel; a recessed portion is provided between adjacent protrusions of the plurality of the protrusions, an orthographic projection of the micro-nano channel on the base substrate is located within an orthographic projection of the recessed portion on the base substrate. The micro-nano channels have a high resolution or an ultra-high resolution, and have different sizes and shapes.

First claim

What is claimed is:

1. A micro-nano channel structure, comprising:
a base substrate;
a base layer, on the base substrate and comprising a plurality of protrusions; and
a plurality of micro-nano channels,
wherein at least one of the micro-nano channels is at a side of the base layer away from the base substrate;
on a plane roughly perpendicular to a main surface of the base substrate, a maximum distance between the micro-nano channels and the base substrate is greater than a maximum distance between the protrusions and the base substrate;
a recessed portion is provided between adjacent protrusions in the plurality of protrusions, on a plane roughly perpendicular to an extension direction of the recessed portion, a cross-sectional shape of each of the protrusions is semi-circular.

2. The micro-nano channel structure according to claim 1 , wherein the micro-nano channels are located in a channel wall layer, and the channel wall layer is located on a side of the base layer away from the base substrate.

3. The micro-nano channel structure according to claim 2 , wherein orthographic projections of the plurality of protrusions on the base substrate roughly extend along a first direction.

4. The micro-nano channel structure according to claim 3 , wherein an extension direction of orthographic projections of the plurality of micro-nano channels on the base substrate is roughly parallel to an extension direction of orthographic projections of the plurality of protrusions on the base substrate.

5. The micro-nano channel structure according to claim 1 , wherein an extension direction of orthographic projections of the plurality of protrusions on the base substrate is roughly parallel to an extension direction of orthographic projections of a plurality of recessed portions on the base substrate.

6. The micro-nano channel structure according to claim 5 , wherein orthographic projections of the plurality of the micro-nano channels on the base substrate are located within orthographic projections of adjacent protrusions of the plurality of the protrusions.

7. The micro-nano channel structure according to claim 2 , wherein cross-sectional areas of the micro-nano channels in a plane parallel to the main surface of the base substrate first increases and then decreases with a relative distance to the base substrate from near to far.

8. The micro-nano channel structure according to claim 7 , wherein cross-sectional areas of the micro nano channels in the plane parallel to the main surface of the base substrate increases by a greater magnitude than a smaller magnitude as the relative distance to the base substrate increases from near to far.

9. The micro-nano channel structure according to claim 2 , wherein a surface of the channel wall layer close to the base substrate is in direct contact with the base layer.

10. The micro-nano channel structure according to claim 9 , wherein a gap is provided between the surface of the channel wall layer close to the base substrate and at least one of the protrusions.

11. The micro-nano channel structure according to claim 9 , wherein a plurality of valleys roughly extending in a first direction are provided on a surface of the channel wall layer away from the base substrate.

12. The micro-nano channel structure according to claim 5 , wherein a cross-sectional shape of at least one of the micro-nano channels on a plane roughly perpendicular to the extension direction of the micro-nano channels and perpendicular to the main surface of the base substrate is an axisymmetric pattern;
a cross-sectional shape of at least one of the recessed portions on the plane roughly perpendicular to the extension direction of the recessed portions and perpendicular to the main surface of the base substrate is an axisymmetric pattern;
a symmetry axis of at least one micro-nano channels on a plane roughly perpendicular to the extension direction of the micro-nano channels and perpendicular to the main surface of the base substrate is collinear with a symmetry axis of the at least one of the recessed portions on the plane roughly perpendicular to the extension direction of the micro-nano channels and perpendicular to the main surface of the base substrate.

13. The micro-nano channel structure according to claim 11 , wherein a symmetry axis of at least one valleys on the plane roughly perpendicular to the extension direction of the micro-nano channels and perpendicular to the main surface of the base substrate, the symmetry axis of at least one micro-nano channels on the plane roughly perpendicular to the extension direction of the micro-nano channels and perpendicular to the main surface of the base substrate are collinear with the symmetry axis of at least one recessed portions on the plane roughly perpendicular to the extension direction of the micro-nano channels and perpendicular to the main surface of the base substrate.

14. A micro-nano channel structure, comprising:
a base substrate;
a base layer, on the base substrate and comprising a plurality of protrusions; and
a plurality of micro-nano channels, wherein at least one of the micro-nano channels is at a side of the base layer away from the base substrate, wherein
a recessed portion is provided between adjacent protrusions in the plurality of protrusions, on a plane roughly perpendicular to an extension direction of the recessed portion, a cross-sectional shape of each of the protrusions is semi-circular.

15. The micro-nano channel structure according to claim 14 , wherein the micro-nano channels are located in a channel wall layer, and the channel wall layer is located on a side of the base layer away from the base substrate;
orthographic projections of the plurality of micro-nano channels on the base substrate roughly coincides with orthographic projections of recessed portions on the base substrate;
the orthographic projections of the plurality of micro-nano channels on the base substrate overlap or do not overlap with the orthographic projections of the protrusions on the base substrate.

16. The micro-nano channel structure according to claim 15 , wherein the protrusions are smoothly connected to the recessed portions.

17. A micro-nano channel structure, comprising:
a base substrate;
a base layer, on the base substrate and comprising a plurality of protrusions, the plurality of protrusions roughly extend along a first direction; and
a plurality of micro-nano channels, wherein orthographic projections of the plurality of micro-nano channels on a plane perpendicular to a main surface of the base substrate and roughly parallel to the first direction overlap or do not overlap with orthographic projections of corresponding adjacent protrusions on the plane perpendicular to the main surface of the base substrate and roughly parallel to the first direction;
a recessed portion is provided between adjacent protrusions in the plurality of protrusions, on a plane roughly perpendicular to an extension direction of the recessed portion, a cross-sectional shape of each of the protrusions is semi-circular.

18. The micro-nano channel structure according to claim 17 , wherein the micro-nano channels are located in a channel wall layer, and the channel wall layer is located on a side of the base layer away from the base substrate.

19. The micro-nano channel structure according to claim 18 , wherein an orthographic projection of the micro-nano channel on the base substrate roughly coincides with an orthographic projection of a corresponding recessed portion on the base substrate.

Assignees

• Boe Technology Group Co Ltd

Inventors

• Ma Xiaochen
• Yuan Guangcai
• Ning ce
• Gu Xin
• Zhang Xiao
• Li Chao

Classifications

• B81C2201/036

  Hot embossing · CPC title

• B81C2201/0111

  Bulk micromachining · CPC title

• B81C1/00071 Primary

  Channels · CPC title

• B81B2203/0338

  Channels · CPC title

• B81B2201/05

  Microfluidics · CPC title