Tape affixing apparatus

Patent metadata

Field	Value
Publication number	US-12371297-B2
Application number	US-202318325320-A
Country	US
Kind code	B2
Filing date	May 30, 2023
Priority date	Jun 6, 2022
Publication date	Jul 29, 2025
Grant date	Jul 29, 2025

Abstract

A tape affixing apparatus includes a holding unit that holds a wafer and a ring frame, a peeling plate that peels off a dicing tape from a sheet by bending a tape set at an acute angle, an affixing roller configured to affix the dicing tape to the wafer and the ring frame by pressing the dicing tape peeled off from the sheet by the peeling plate against the wafer and the ring frame, an air nozzle that makes a distal end of the dicing tape peeled off from the sheet conform to an outside surface of the affixing roller, and an end detecting unit that detects the distal end of the dicing tape made to conform to the outside surface of the affixing roller.

First claim

What is claimed is:

1. A tape affixing apparatus for using a tape set including a tape, the tape having an adhesive layer on one surface of the tape and being cut in a shape corresponding to an affixation target object, and a band-shaped sheet affixed to the adhesive layer, and affixing the tape to the affixation target object while peeling off the tape from the sheet, the tape affixing apparatus comprising:
a holding unit configured to hold the affixation target object;
an affixing unit configured to affix the tape peeled off from the sheet to the affixation target object held by the holding unit; and
a horizontal moving mechanism configured to move the holding unit and the affixing unit relative to each other in a horizontal direction,
the affixing unit including:
a first roller set configured to sandwich the tape set by at least two rollers,
a second roller set configured to sandwich the sheet by at least two rollers,
a peeling plate configured to peel off the tape from the sheet by bending the tape set at an acute angle at a position between the first roller set and the second roller set,
an affixing roller configured to affix the tape to the affixation target object by pressing the tape peeled off from the sheet by the peeling plate against the affixation target object,
an air nozzle configured to make a distal end of the tape peeled off from the sheet conform to an outside surface of the affixing roller, and
an end detecting unit configured to detect the distal end of the tape made to conform to the outside surface of the affixing roller, wherein the end detecting unit faces the affixing roller to thereby detect whether the distal end of the tape conforms with the outside surface of the fixing roller.

2. The tape affixing apparatus according to claim 1 , wherein:
the end detecting unit includes a light emitting unit disposed in the holding unit and configured to emit measurement light toward the affixing roller, a light receiving unit configured to receive reflected light of the measurement light, and a detecting unit configured to detect the distal end of the tape on a basis of light reception of the reflected light by the light receiving unit.

3. The tape affixing apparatus according to claim 1 , wherein:
the end detecting unit includes a tactile sensor disposed in the holding unit and configured to extend such that a distal end of the tactile sensor is in contact with the outside surface of the affixing roller and a detecting unit configured to detect the distal end of the tape by the tactile sensor.

4. The tape affixing apparatus according to claim 1 , wherein:
the end detecting unit includes an ultrasonic vibration generating unit disposed in the holding unit and configured to generate an ultrasonic vibration toward the affixing roller, a vibration receiving unit configured to receive a reflected vibration resulting from reflection of the ultrasonic vibration by the affixing roller or the tape, and a detecting unit configured to detect the distal end of the tape on a basis of a value of the vibration receiving unit.

5. The tape affixing apparatus according to claim 1 , wherein the end detecting unit is disposed below the affixing roller.

6. The tape affixing apparatus according to claim 1 , wherein the end detecting unit is disposed on a support base that is configured and arranged to move with the holding unit.

7. A tape affixing apparatus for using a tape set including a tape, the tape having an adhesive layer on one surface of the tape and being cut in a shape corresponding to an affixation target object, and a band-shaped sheet affixed to the adhesive layer, and affixing the tape to the affixation target object while peeling off the tape from the sheet, the tape affixing apparatus comprising:
a holding unit configured to hold the affixation target object;
an affixing unit configured to affix the tape peeled off from the sheet to the affixation target object held by the holding unit; and
a horizontal moving mechanism configured to move the holding unit and the affixing unit relative to each other in a horizontal direction,
the affixing unit including
a first roller set configured to sandwich the tape set by at least two rollers,
a second roller set configured to sandwich the sheet by at least two rollers,
a peeling plate configured to peel off the tape from the sheet by bending the tape set at an acute angle at a position between the first roller set and the second roller set,
an affixing roller configured to affix the tape to the affixation target object by pressing the tape peeled off from the sheet by the peeling plate against the affixation target object,
an air nozzle configured to make a distal end of the tape peeled off from the sheet conform to an outside surface of the affixing roller, and
an end detecting unit including a vibration generating unit disposed in the holding unit, the vibration generating unit configured to generate an ultrasonic vibration directed toward the affixing roller, the end detecting unit configured to detect the distal end of the tape made to conform to the outside surface of the affixing roller by analyzing the ultrasonic vibration generated by the vibration generating unit.

8. The tape affixing apparatus according to claim 7 , wherein the end detecting unit further includes a vibration receiving unit configured to receive a reflected vibration resulting from reflection of the ultrasonic vibration by the affixing roller or the tape, and a detecting unit configured to detect the distal end of the tape on a basis of a value of the vibration receiving unit, corresponding to the analysis of the ultrasonic vibration generated by the vibration unit.

Assignees

• Disco Corp

Inventors

• Suzuki Kunishige

Classifications

• B65H37/04

  for securing together articles or webs, e.g. by adhesive, stitching or stapling (adhering replacement to expiring web during change of web roll B65H19/18) · CPC title

• B65H2553/40

  using optical, e.g. photographic, elements · CPC title

• B65H2553/30

  using acoustic or ultrasonic elements · CPC title

• B65H2301/41524

  Detecting trailing edge · CPC title

• B65H2701/192

  Labels · CPC title