Multi-turn drive assembly and systems and methods of use thereof

Patent metadata

Field	Value
Publication number	US-12370672-B2
Application number	US-202318386927-A
Country	US
Kind code	B2
Filing date	Nov 3, 2023
Priority date	Mar 3, 2020
Publication date	Jul 29, 2025
Grant date	Jul 29, 2025

Abstract

Disclosed herein are multi-turn drive assemblies, systems and methods of use thereof. The multi-turn drive assemblies enable a robot link member to have a maximum rotation of at least 360 degrees about an axis. The multi-turn drive assemblies can be incorporated into a robot arm for enabling 360 degrees rotation of one or more link members about an axis. The robot arm may be located in a transfer chamber of an electronic device processing system. Also disclosed are methods of controlling the multi-turn drive assemblies and related robots.

First claim

We claim:

1. A robot, comprising:
an arm rotatable about a shoulder axis;
a forearm rotatable relative to the arm about a forearm axis at a position offset from the shoulder axis, wherein the forearm has a forearm joint rotation of at least 360 degrees about the forearm axis; and
a forearm drive assembly for rotating the forearm about the forearm axis, the forearm drive assembly comprising:
a forearm driving member comprising a first plurality of machined sections around the center point and circumference of the forearm driving member, each of the first plurality of machined sections having a different radius;
a forearm driven member attached to the forearm, the forearm driven member comprising a second plurality of machined sections around the center point circumference of the forearm driven member, each of the second plurality of machined sections having a different radius;
a forearm transmission assembly comprising:
a first band comprising a tensile strength of about 200 KSI to about 300 KSI, wherein a first end of the first band is affixed to the forearm driving member and a second end of the first band is affixed to the forearm driven member, and wherein the first band wraps at least two times around the forearm driving member when the forearm is in a first forearm position;
a second band comprising a tensile strength of about 200 KSI to about 300 KSI, wherein a first end of the second band is affixed to the forearm driving member and a second end of the second band is affixed to the forearm driven member, wherein the second band wraps at least two times around the forearm driven member when the forearm is in the first position,
wherein the first band is wrapped around the forearm driving member in a first direction and the second band is wrapped around the forearm driving member in an opposite second direction; and
at least one tensioner attached to the first band or the second band to control tension of the first band or the second band.

2. The robot of claim 1 , wherein the at least one tensioner comprises a first tensioner attached to the first band and a second tensioner attached to the second band.

3. The robot of claim 1 , wherein the at least one tensioner comprises a pin, a screw, or a nail.

4. The robot of claim 1 , wherein the at least one tensioner comprises a first tensioner attached to a first end of the first band and a second tensioner attached to a second end of the first band to increase or decrease tension in the first band.

5. The robot of claim 4 , wherein the first and second tensioners operate together at about 125 Hz to about 145 Hz to maintain a predetermined tension of the first band about 450 N to about 650 N, wherein the first band has a thickness of about 10 mils.

6. The robot of claim 1 , wherein the at least one tensioner comprises a third tensioner attached to a first end of the second band and a fourth tensioner attached to a second end of the first band to increase or decrease tension in the second band.

7. The robot of claim 6 , wherein the third and fourth tensioners operate together at about 125 Hz to about 145 Hz to maintain a predetermined tension of the second band at about 450 N to about 650 N, wherein the second band has a thickness of about 10 mils.

8. The robot of claim 1 , wherein the forearm driving member and the forearm driven member have a non-linear transmission ratio.

9. The robot of claim 1 , further comprising a wrist member rotatable relative to the forearm about a wrist axis at a position offset from the shoulder axis, wherein the wrist member further comprises at least one end effector attached to the wrist member.

10. A robot, comprising:
an arm rotatable about a shoulder axis;
a forearm rotatable relative to the arm about a forearm axis at a position offset from the shoulder axis;
a first wrist member rotatable relative to the forearm about a wrist axis at a position offset from the shoulder axis, wherein the first wrist member has a wrist joint rotation of at least 360° about the wrist axis; and
a first wrist drive assembly for rotating the first wrist member about the wrist axis, the first wrist drive assembly comprising:
a first wrist driving member comprising a first plurality of machined sections around the center point and circumference of the first wrist driving member, each of the first plurality of machined sections having a different radius;
a first wrist driven member attached to the forearm, the first wrist driven member comprising a second plurality of machined sections around the center point and circumference of the first wrist driven member, each of the second plurality of machined sections having a different radius, wherein the first wrist driven member is attached to the first wrist driving member by a torsion spring; and
a first wrist transmission assembly, comprising:
a first band comprising a tensile strength of about 200 KSI to about 300 KSI, wherein a first end of the first band is affixed to the first wrist driving member and a second end of the first band is affixed to the first wrist driven member, and wherein the first band wraps at least two times around the first wrist driving member when the first wrist member is in a first wrist position;
a second band comprising a tensile strength of about 200 KSI to about 300 KSI, wherein a first end of the second band is affixed to the first wrist driving member and a second end of the second band is affixed to the first wrist driven member, wherein the second band wraps at least two times around the first wrist driven member when the first wrist member is in the first position,
wherein the first band is wrapped around the first wrist driving member in a first direction and the second band is wrapped around the first wrist driving member in an opposite second direction; and
at least one tensioner attached to the first band or the second band of the first wrist transmission assembly.

11. The robot of claim 10 , wherein the robot further comprises:
a second wrist member rotatable relative to the forearm about the wrist axis, wherein the second wrist member has a wrist joint rotation of at least 360 degrees about the wrist axis; and
a second wrist drive assembly for rotating the second wrist member about the wrist axis, the second wrist drive assembly comprising:
a second wrist driving member comprising a first plurality of machined sections around the center point and circumference of the second wrist driving member, each of the first plurality of machined sections having a different radius;
a second wrist driven member attached to the forearm, the second wrist driven member comprising a second plurality of machined sections around the center point and circumference of the second wrist driven member, each of the second plurality of machined sections having a different radius; and
a second wrist transmission assembly, comprising:
a first band comprising a tensile strength of about 200 KSI to about 300 KSI, wherein a first end of the first band is affixed to the second wrist driving member and a second end of the first band is affixed to the second wrist driven member, and wherein the first band wraps at least two times around the second wrist driving member when the second wrist member is in a first wrist position; and
a second band comprising a tensile strength of about 200 KSI to about 300 KSI, wherein a first end of the second band is affixed to the second wrist driving member and a second end of the second band is affixed to the second wrist driven member, wherein the second band wraps at least two times around the second wrist driven member when the second wrist member is in the first position,
wherein the first band is wrapped around the

Assignees

• Applied Materials Inc

Inventors

• Hudgens Jeff
• Cox Damon K
• Thanu Rajkumar

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3302 Primary

  Mechanical parts of transfer devices · CPC title

• H10P72/3311

  Horizontal transfer of a batch of workpieces · CPC title

• F16H35/02

  for conveying rotary motion with cyclically varying velocity ratio · CPC title

• F16H2035/003

  Gearings comprising pulleys or toothed members of non-circular shape, e.g. elliptical gears · CPC title