Particulate matter filtration apparatus and method thereof

Patent metadata

Field	Value
Publication number	US-12370487-B2
Application number	US-202217587205-A
Country	US
Kind code	B2
Filing date	Jan 28, 2022
Priority date	Jul 30, 2021
Publication date	Jul 29, 2025
Grant date	Jul 29, 2025

Abstract

A system includes a semiconductor apparatus configured to process a workpiece, a mist generator configured to generate a mist and a particle separator configured to receive an exhaust gas generated by the semiconductor apparatus. The particle separator includes a first fan, wherein the first fan includes a plurality of blades. Each of the plurality of blades includes holes allowing the exhaust gas and the mist to pass through.

First claim

What is claimed is:

1. A system, comprising:
a semiconductor apparatus adapted to process a workpiece; and
a particle separator adapted to receive an exhaust gas generated by the semiconductor apparatus, the particle separator comprising:
a mist generator adapted to generate a mist;
a first fan comprising a plurality of blades, wherein each of the plurality of blades includes holes allowing the exhaust gas and the mist to pass through; and
an inner mesh member defining a central chamber of the particle separator, wherein the plurality of blades are coupled to the inner mesh member and adapted to rotate about the central chamber.

2. The system of claim 1 , wherein the particle separator further comprises a second fan adapted to generate an airflow to draw the exhaust gas and the mist out of the particle separator.

3. The system of claim 2 , wherein the second fan is arranged downstream of the first fan.

4. The system of claim 1 , wherein the inner mesh member comprises holes, and the mist is adapted to flow into spaces between the plurality of blades through the holes of the inner mesh member.

5. The system of claim 4 , wherein the mist generator extends into the central chamber.

6. The system of claim 4 , wherein the particle separator further comprises an upper cover and a lower cover on two sides of the particle separator, wherein the lower cover defines an opening that permits the exhaust gas to flow into the particle separator.

7. The system of claim 1 , wherein the particle separator further comprises an outer mesh member at a periphery of the particle separator and laterally surrounding the plurality of blades.

8. The system of claim 7 , wherein the outer mesh member comprises holes, wherein the exhaust gas is adapted to flow out of the particle separator through the holes of the outer mesh member.

9. The system of claim 1 , wherein the particle separator further comprises a pipe adapted to drain a liquid condensed from the mist in the first fan.

10. The system of claim 1 , further comprising a processor adapted to determine at least one of a rotation speed of the first fan and a flow rate of the mist generator according to at least one of an operation type performed by the semiconductor apparatus, a material list of the operation type, an operation recipe of the operation type, a particle mass concentration of the exhaust gas and weather forecast data.

11. The system of claim 1 , wherein the holes have a size between about 0.5 mm and about 3 mm.

12. The system of claim 1 , wherein the mist has a droplet size in a range between about 20 μm and about 100 μm.

13. A system, comprising:
a semiconductor apparatus adapted to generate an exhaust gas during an operation; and
a particle separator comprising:
a first fan adapted to filter particles in the exhaust gas, the first fan comprising a plurality of blades, each of the plurality of blades including holes;
a mist dispenser extending in the first fan and adapted to dispense a mist into the first fan; and
an inner mesh member defining a central chamber of the particle separator, wherein the plurality of blades are coupled to the inner mesh member and adapted to rotate about the central chamber.

14. The system of claim 13 , further comprising an upper cover and a lower cover on two sides of the particle separator, wherein each of the plurality of blades comprises a plurality of scramblers arranged in parallel and extending from the upper cover to the lower cover.

15. The system of claim 14 , wherein each of the scramblers are arranged in a curved line from a top-view perspective.

16. The system of claim 13 , further comprising a second fan adapted to generate an airflow to draw the exhaust gas out of the particle separator.

17. The system of claim 13 , wherein the holes of one of the plurality of blades are arranged in a staggered manner.

18. A system, comprising:
a semiconductor apparatus adapted to generate an exhaust gas during an operation; and
a particle separator comprising:
a first fan adapted to filter particles in the exhaust gas and comprising a plurality of blades, each of the plurality of blades including holes;
a mist dispenser adapted to dispense a mist into the first fan; and
an inner mesh member defining a central chamber of the particle separator, wherein the plurality of blades are coupled to the inner mesh member and adapted to rotate about the central chamber.

19. The system of claim 18 , further comprising an exhaust duct adapted to deliver the exhaust gas from the first fan to an external environment.

20. The system of claim 18 , further comprising a chamber channel arranged over the first fan and adapted to allow the exhaust gas from the first fan to flow through, the chamber channel overlapping an axis of the first fan from a top-view perspective.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Tsao Chih-Ming
• Huang Kuo-Cheng

Classifications

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• B01D47/05

  by condensation of the separating agent · CPC title

• B01D45/14

  generated by rotating vanes, discs, drums or brushes · CPC title

• B01D50/40

  Combinations of devices covered by groups B01D45/00 and B01D47/00 · CPC title