Protective film agent and processing method of workpiece

US12368049B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-12368049-B2
Application numberUS-202217929786-A
CountryUS
Kind codeB2
Filing dateSep 6, 2022
Priority dateSep 13, 2021
Publication dateJul 22, 2025
Grant dateJul 22, 2025

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

    Technology tags used to group this patent with similar filings.

  7. Citations and related patents

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Abstract

Official abstract text for this publication.

There is provided a protective film agent with which a workpiece is coated when the workpiece is processed. The protective film agent includes a water-soluble resin, a light absorbing agent having a flavone structure, a flavonol structure, or an isoflavone structure, and a solvent that dissolves the resin and the light absorbing agent.

First claim

Opening claim text (preview).

What is claimed is: 1. A protective film agent with which a workpiece is coated when the workpiece is processed, the protective film agent comprising: a water-soluble resin; a light absorbing agent; and a solvent that dissolves the resin and the light absorbing agent, and wherein the light absorbing agent contains a transglycosylated compound, and the solvent contains water, and further wherein the transglycosylated compound is transglycosylated rutin. 2. The protective film agent according to claim 1 , wherein the resin is polyvinyl alcohol, polyvinylpyrrolidone, hydroxypropyl cellulose, or polyoxazoline. 3. The protective film agent according to claim 1 , wherein the protective film agent contains such an amount of the light absorbing agent that absorbance at a wavelength of 355 nm becomes equal to or higher than 5.0 in terms of a state in which the protective film agent is diluted 200-fold with water and when measurement is executed with a thickness of 1 cm. 4. The protective film agent according to claim 1 , wherein the weight-average molecular weight of the water-soluble resin is equal to or lower than 250000. 5. A protective film agent with which a workpiece is coated when the workpiece is processed, the protective film agent comprising: a water-soluble resin; a light absorbing agent; and a solvent that dissolves the resin and the light absorbing agent, and wherein the light absorbing agent contains a transglycosylated compound, and the solvent contains water, and further wherein the transglycosylated compound is transglycosylated rutin or transglycosylated hesperidin. 6. The protective film agent according to claim 5 , wherein the resin is polyvinyl alcohol, polyvinylpyrrolidone, hydroxypropyl cellulose, or polyoxazoline. 7. The protective film agent according to claim 5 , wherein the protective film agent contains such an amount of the light absorbing agent that absorbance at a wavelength of 355 nm becomes equal to or higher than 5.0 in terms of a state in which the protective film agent is diluted 200-fold with water and when measurement is executed with a thickness of 1 cm. 8. The protective film agent according to claim 5 , wherein the weight-average molecular weight of the water-soluble resin is equal to or lower than 250000.

Assignees

Inventors

Classifications

  • of Group IV materials · CPC title

  • using masks for insulating materials · CPC title

  • Manufacture or treatment · CPC title

  • H10P50/692Primary

    characterised by their composition, e.g. multilayer masks or materials · CPC title

  • Cutting or separating of wafers, substrates or parts of devices · CPC title

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Frequently asked questions

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What does patent US12368049B2 cover?
There is provided a protective film agent with which a workpiece is coated when the workpiece is processed. The protective film agent includes a water-soluble resin, a light absorbing agent having a flavone structure, a flavonol structure, or an isoflavone structure, and a solvent that dissolves the resin and the light absorbing agent.
Who is the assignee on this patent?
Disco Corp
What technology area does this patent fall under?
Primary CPC classification H10P50/692. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Jul 22 2025 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).