Acceleration sensor and method of making the same

Patent metadata

Field	Value
Publication number	US-12366587-B2
Application number	US-202318205558-A
Country	US
Kind code	B2
Filing date	Jun 4, 2023
Priority date	Jan 5, 2023
Publication date	Jul 22, 2025
Grant date	Jul 22, 2025

Abstract

An acceleration sensor includes an upper base plate; a lower base plate; and a gallium-based liquid metal encapsulated in graphene. The lower base plate includes a first surface including at least one diamond channel, and the upper base plate includes a second surface including a metal electrode corresponding to the at least one diamond channel in position; the liquid metal is disposed in a center of the at least one diamond channel; the first surface is bonded to the second surface through an adhesive; the liquid metal is movable in the at least one diamond channel and is in electrical contact with the metal electrode of the upper base plate during movement.

First claim

What is claimed is:

1. An acceleration sensor, comprising:
an upper base plate;
a lower base plate; and
a gallium-based liquid metal encapsulated in graphene;

wherein:
the lower base plate comprises a first surface comprising at least one diamond channel, and the upper base plate comprises a second surface comprising a metal electrode corresponding to the at least one diamond channel in position;
the liquid metal is disposed in a center of the at least one diamond channel; the first surface is bonded to the second surface through an adhesive;
the liquid metal is movable in the at least one diamond channel and is in electrical contact with the metal electrode of the upper base plate during movement.

2. The acceleration sensor of claim 1 , wherein the lower base plate comprises two diamond channels arranged in a cross pattern, and the upper base plate comprises four metal electrodes distributed along a cross line of the cross pattern.

3. The acceleration sensor of claim 1 , wherein the lower base plate is an acrylic plate, the upper base plate is borosilicate glass, and the metal electrode is a symmetrical zigzag nickel chromium conductive layer.

4. The acceleration sensor of claim 2 , wherein the lower base plate is an acrylic plate, the upper base plate is borosilicate glass, and the metal electrode is a symmetrical zigzag nickel chromium conductive layer.

5. A method for manufacturing the acceleration sensor of claim 1 , the method comprising:
1) preparing the upper base plate and the lower upper base plate;
2) forming diamond channels on the lower base plate through deep reactive ion etching, modifying a surface of the diamond channels using a sandblasting system to form a serrated micro convex structure on side walls of the diamond channels; depositing a chromium layer as an adhesive layer on a glass base plate using an electron beam evaporator, depositing a nickel layer on the chromium layer; with a photoresist as an etching mask, etching the nickel layer and the chromium layer using a wet etchant to obtain a nickel chromium alloy electrode;
3) placing the liquid metal 5 encapsulated in graphene in the center of the diamond channels, and bonding the upper base plate and the lower base plate using a curable adhesive, to produce the acceleration sensor; and
4) testing the acceleration sensor, and calibrating an acceleration value of the acceleration sensor.

6. The method of claim 5 , wherein 4) is performed as follows:
4.1) measuring an initial resistance of each metal electrode of the acceleration sensor using a DC resistance meter; placing the acceleration sensor in a fixed position of a centrifugal testing device;
4.2) controlling a rotational speed of a rotating plate of the centrifugal testing device, applying an acceleration from 0 to 2 g to the acceleration sensor, and synchronously recording resistance changes of the four metal electrodes, and monitoring a movement position of the liquid metal encapsulated in graphene in the diamond channel under a high-speed camera;
4.3) performing centrifugal experiments in two directions in sequence, applying different accelerations, and recording the resistance changes of the corresponding electrodes; and
4.4) based on collected experimental data, establishing a relationship between acceleration and the resistance changes of the metal electrodes, and calibrating a magnitude of acceleration using the resistance changes of the metal electrodes.

Assignees

• Univ Chongqing

Inventors

• Zhou Xiaoping
• Chen Ping
• Zhao Zhi
• Chen Junwei
• Yang Zheyu

Classifications

• B81B3/0021

  Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00) · CPC title

• G01P15/12 Primary

  by alteration of electrical resistance {(G01P15/0897, G01P15/105 take precedence)} · CPC title

• B81B2201/0235

  Accelerometers · CPC title

• G01P15/006 Primary

  by making use of fluid seismic masses · CPC title