Mask adhesive and pellicle comprising same

Patent metadata

Field	Value
Publication number	US-12344773-B2
Application number	US-201916982624-A
Country	US
Kind code	B2
Filing date	Mar 27, 2019
Priority date	Mar 30, 2018
Publication date	Jul 1, 2025
Grant date	Jul 1, 2025

Abstract

The present invention provides a mask adhesive that plastically deforms easily, no adhesive residue remains after peeling from the mask, ease of handling is excellent, and haze on a pellicle film is unlikely to be increased. A mask adhesive resolving this problem contains a thermoplastic elastomer (A) for which the temperature at which the loss tangent measured at a frequency of 1 Hz is at a maximum value is −20 to 30° C., a tackifier resin (B), and a process oil (C). The total of the proportion (% CP) of paraffin carbon and the proportion (% CN) of naphthene carbon in the process oil (C) is 50% or more. The temperature of the mask adhesive at which the loss tangent measured at a frequency of 1 Hz is at a maximum value is −10 to 30° C., and the sulfur content of the mask adhesive is 300 μg/g or less.

First claim

The invention claimed is:

1. A mask adhesive comprising:
100 parts by mass of a thermoplastic elastomer (A) in which a loss tangent measured from −80° C. to 200° C. at a frequency of 1 Hz has a maximum value at a temperature of −20° C. to 30° C.;
20 to 150 parts by mass of a tackifier resin (B); and
20 to 150 parts by mass of a process oil (C), wherein
an amount of softening agent selected from the group consisting of polybutene, hydrogenated polybutene, unsaturated polybutene, aliphatic hydrocarbons (excluding the process oil (C)), and acrylic polymers is 0 to 1 part by mass relative to 100 parts by mass of the thermoplastic elastomer (A),
the thermoplastic elastomer (A) is at least one selected from the group consisting of a styrene-based thermoplastic elastomer, a (meth)acrylate-based thermoplastic elastomer, and an olefin-based thermoplastic elastomer,
in the process oil (C), a total of a proportion (% CP) of paraffin carbon and a proportion (% CN) of naphthene carbon is 50% or more,
in a molecular-weight distribution chart obtained by gel permeation chromatography of the process oil (C), a ratio of an area of a region where the molecular-weight is 500 or less is 5% or less,
in the mask adhesive, a loss tangent measured from −80° C. to 200° C. at a frequency of 1 Hz has a maximum value at a temperature of −10° C. to 30° C., and
the mask adhesive has a sulfur content of 300 μg/g or less.

2. The mask adhesive according to claim 1 , wherein:
the process oil (C) has a sulfur content of 2,000 μg/g or less.

3. The mask adhesive according to claim 1 , wherein:
the proportion (% CP) of paraffin carbon in the process oil (C) is 50% or more.

4. The mask adhesive according to claim 1 , wherein:
the process oil (C) contains a paraffin-based process oil (C1); and
the paraffin-based process oil (C1) has a number-average molecular weight of 300 to 1,500.

5. The mask adhesive according to claim 4 , wherein:
the paraffin-based process oil (C1) has a kinematic viscosity of 50 to 400 mm 2 /s at 40° C.

6. The mask adhesive according to claim 1 , wherein:
an amount of outgas is 20.0 μg/g or less.

7. The mask adhesive according to claim 1 , wherein:
the thermoplastic elastomer (A) is a styrene-based thermoplastic elastomer.

8. The mask adhesive according to claim 7 , wherein:
the styrene-based thermoplastic elastomer is a triblock copolymer that has a first polystyrene block, a polyisoprene block having an isopropenyl group in a side chain thereof, and a second polystyrene block and/or a hydride of the triblock copolymer.

9. The mask adhesive according to claim 1 , wherein:
the tackifier resin (B) has a softening point of 60° C. to 150° C., the softening point being measured based on a ring-and-ball method specified in JIS K-2207.

10. The mask adhesive according to claim 1 , wherein:
the tackifier resin (B) has a number-average molecular weight of 300 to 3,000.

11. The mask adhesive according to claim 1 , wherein:
the tackifier resin (B) is at least one selected from the group consisting of rosin and derivatives thereof, polyterpene resins and hydrides thereof, terpene phenolic resins and hydrides thereof, aromatic modified terpene resins and hydrides thereof, coumarone-indene resins, aliphatic petroleum resins, alicyclic petroleum resins and hydrides thereof, aromatic petroleum resins and hydrides thereof, aliphatic-aromatic copolymer-based petroleum resins, and dicyclopentadiene-based petroleum resins and hydrides thereof.

12. A pellicle comprising a pellicle frame, a pellicle film disposed on one end face of the pellicle frame, and a mask adhesive layer disposed on the other end face of the pellicle frame and containing the mask adhesive according to claim 1 .

Assignees

• Mitsui Chemicals Inc

Inventors

• BIYAJIMA Tsuneaki
• Taneichi Daiki

Classifications

• H10P72/1906

  specially adapted for containing masks, reticles or pellicles · CPC title

• Y10T428/2883

  including addition polymer of diene monomer [e.g., SBR, SIS, etc.] · CPC title

• G03F1/64 Primary

  characterised by the frames, e.g. structure or material, including bonding means therefor · CPC title

• C09J193/04

  Rosin · CPC title

• C09J123/02

  not modified by chemical after-treatment · CPC title