Driving belt inspection device and method for wafer transfer module

Patent metadata

Field	Value
Publication number	US-12344482-B2
Application number	US-202318377440-A
Country	US
Kind code	B2
Filing date	Oct 6, 2023
Priority date	Oct 12, 2022
Publication date	Jul 1, 2025
Grant date	Jul 1, 2025

Abstract

A driving belt inspection device and method for a wafer transfer module is disclosed. The driving belt inspection device for a wafer transfer module includes: a data receiving unit for receiving current data of a motor connected to a driving belt; a calculation unit for calculating the rate of change of instantaneous current of the motor according to the received current data and acquiring a calculated value for inspection according to the calculated rate of change of instantaneous current of the motor; and a result determination unit for determining, if the calculated value is lower than a first reference value, that the driving belt is in a normal operation state, and determining, if the calculated value is higher than a second reference value, that the driving belt is in an abnormal operation state.

First claim

What is claimed is:

1. A driving belt inspection device for a wafer transfer module, comprising:
a data receiving unit for receiving current data of a motor connected to a driving belt;
a calculation unit for calculating the rate of change of instantaneous current of the motor according to the received current data and acquiring a calculated value for inspection according to the calculated rate of change of instantaneous current of the motor; and
a result determination unit for determining, if the calculated value is lower than a first reference value, that the driving belt is in a normal operation state, and determining, if the calculated value is higher than a second reference value, that the driving belt is in an abnormal operation state.

2. The driving belt inspection device according to claim 1 , wherein the calculated value is a value calculated to be verified through a sequential probability ratio test.

3. The driving belt inspection device according to claim 2 , wherein the calculated value is a value calculated according to the peak value and variance of the rate of change of instantaneous current.

4. The driving belt inspection device according to claim 3 , wherein changes in the peak value and variance of the rate of change of instantaneous current are reflected to acquire the calculated value.

5. The driving belt inspection device according to claim 1 , wherein the result determination unit delays a determination as to whether the driving belt is in the normal or abnormal operation state if the calculated value is between the first reference value and the second reference value.

6. The driving belt inspection device according to claim 5 , wherein if the determination through the result determination unit is delayed, the calculation unit re-acquires the calculated value through the current data and next current data.

7. A driving belt inspection method for a wafer transfer module, comprising the steps of:
receiving current data of a motor connected to a driving belt;
calculating the rate of change of instantaneous current of the motor according to the received current data and acquiring a calculated value for inspection according to the calculated rate of change of instantaneous current of the motor; and
if the calculated value is lower than a first reference value, determining that the driving belt is in a normal operation state, and if the calculated value is higher than a second reference value, determining that the driving belt is in an abnormal operation state.

8. The driving belt inspection method according to claim 7 , wherein the calculated value is a value calculated to be verified through a sequential probability ratio test.

9. The driving belt inspection method according to claim 8 , wherein the calculated value is a value calculated according to the peak value and variance of the rate of change of instantaneous current.

10. The driving belt inspection method according to claim 9 , wherein changes in the peak value and variance of the rate of change of instantaneous current are reflected to acquire the calculated value.

11. The driving belt inspection method according to claim 7 , wherein the determining step delays a determination as to whether the driving belt is in the normal or abnormal operation state if the calculated value is between the first reference value and the second reference value.

12. The driving belt inspection method according to claim 11 , further comprising the step of, if the determination is delayed, re-acquiring the calculated value through the current data and next current data.

Assignees

• Research & Business Found Sungkyunkwan Univ

Inventors

• Kwon Dae Il
• Goo Hee Jae

Classifications

• B65G43/02

  detecting dangerous physical condition of load carriers, e.g. for interrupting the drive in the event of overheating · CPC title

• B65G43/04

  detecting slip between driving element and load-carrier, e.g. for interrupting the drive {(B65G43/02 takes precedence)} · CPC title

• B25J9/042

  comprising an articulated arm · CPC title

• B65G2201/0297

  Wafer cassette · CPC title

• G01M13/023

  Power-transmitting endless elements, e.g. belts or chains · CPC title