Piezoelectric device

Patent metadata

Field	Value
Publication number	US-12343760-B2
Application number	US-202217724523-A
Country	US
Kind code	B2
Filing date	Apr 20, 2022
Priority date	Nov 21, 2019
Publication date	Jul 1, 2025
Grant date	Jul 1, 2025

Abstract

A piezoelectric device includes an outer base, a protruding base, and only one cantilevered portion. A protruding base includes a protrusion and a tip portion. The protrusion protrudes from an internal circumferential surface of the outer base toward a center of a ring shape. The tip portion is connected to the protrusion and located at the center. The cantilevered portion is connected to the tip portion, and extends while being spaced apart from the protrusion. The cantilevered portion includes a fixed end portion and a free periphery. The fixed end portion is connected to the tip portion. The free periphery is located along the internal circumferential surface. The protrusion is located between a first end and a second end of the free periphery.

First claim

What is claimed is:

1. A piezoelectric device, comprising:
an outer base that has a ring shape and includes an internal circumferential surface;
a protruding base that includes a protrusion and a tip portion, the protrusion protruding from the internal circumferential surface of the outer base toward a center of the ring shape, the tip portion being connected to the protrusion and located at the center; and
only one cantilevered portion that is connected to the tip portion, and extends while being spaced apart from the protrusion; wherein
the cantilevered portion includes a piezoelectric layer, a first electrode layer located on one side of the piezoelectric layer, and a second electrode layer opposing at least a portion of the first electrode layer with the piezoelectric layer interposed therebetween;
the cantilevered portion includes a fixed end portion connected to the tip portion and a free periphery located along the internal circumferential surface; and
the protrusion is located between a first end and a second end of the free periphery.

2. The piezoelectric device according to claim 1 , wherein a shortest distance from the fixed end portion to the free periphery is uniform or substantially uniform throughout the free periphery.

3. The piezoelectric device according to claim 1 , wherein a width of the tip portion in an orthogonal direction that is orthogonal to a direction in which the protrusion protrudes is greater than a width of the protrusion in the orthogonal direction.

4. The piezoelectric device according to claim 1 , wherein a width of the protrusion in an orthogonal direction that is orthogonal to a direction in which the protrusion protrudes increases as the protrusion is located closer to the outer base.

5. The piezoelectric device according to claim 1 , wherein a thickness of the protruding base in an axial direction of a center axis of the internal circumferential surface is smaller than a thickness of the outer base.

6. The piezoelectric device according to claim 1 , wherein when viewed in an axial direction of a center axis of the internal circumferential surface, an area of an opposing portion where the first electrode layer opposes the second electrode layer is greater than or equal to about 90% of an area of the cantilevered portion.

7. The piezoelectric device according to claim 1 , wherein the piezoelectric layer is made of lithium niobate or lithium tantalate.

8. The piezoelectric device according to claim 1 , wherein a diameter of the width portion of the tip portion is equal or substantially equal to a width of the protrusion.

9. The piezoelectric device according to claim 1 , wherein the fixed end portion has an arc shape.

10. The piezoelectric device according to claim 1 , wherein a slit is in the free periphery and the internal circumferential surface.

11. The piezoelectric device according to claim 10 , wherein the first end and the second end of the free periphery are located to allow the slit to reach the protrusion.

12. The piezoelectric device according to claim 10 , wherein the first end and the second end of the free periphery are located to allow the slit to reach the side of the protrusion opposite to the side facing the tip portion.

13. The piezoelectric device according to claim 10 , wherein additional slits are connected to the slit and located between the protrusion and one of the two side end portions.

14. The piezoelectric device according to claim 13 , wherein a width of the slit is equal or substantially equal to widths of the additional slits.

15. The piezoelectric device according to claim 1 , wherein the cantilevered portion includes a support layer on a side of the piezoelectric layer facing the second electrode layer.

16. The piezoelectric device according to claim 1 , wherein the cantilevered portion includes a support layer on a side of the second electrode layer opposite to a side facing the piezoelectric layer.

17. The piezoelectric device according to claim 16 , wherein the support layer includes a first support layer and a second support layer on a side of the first support layer opposite to a side facing the piezoelectric layer.

18. The piezoelectric device according to claim 17 , wherein the first support layer is made of SiO 2 and the second support layer is made of a single crystal Si.

19. The piezoelectric device according to claim 16 , wherein the support layer is thicker than the piezoelectric layer.

20. An ultrasonic transducer comprising the piezoelectric device according to claim 1 .

Assignees

• Murata Manufacturing Co

Inventors

• Ikeuchi Shinsuke
• Umezawa Seiji
• Kurokawa Fumiya
• Suzuki Masayuki

Classifications

• H10N30/8542

  Alkali metal based oxides, e.g. lithium, sodium or potassium niobates · CPC title

• H10N30/306

  Cantilevers · CPC title

• H10N30/88

  Mounts; Supports; Enclosures; Casings · CPC title

• H10N30/708

  Intermediate layers, e.g. barrier, adhesion or growth control buffer layers · CPC title

• H04R17/00

  Piezoelectric transducers; Electrostrictive transducers (piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners {H10N30/00}) · CPC title