Thin film of metal oxide, organic electroluminescent device including thin film, photovoltaic cell including thin film, and manufacturing method of thin film
US-2017186984-A1 · Jun 29, 2017 · US
US12336370B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12336370-B2 |
| Application number | US-202017618392-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 10, 2020 |
| Priority date | Jun 11, 2019 |
| Publication date | Jun 17, 2025 |
| Grant date | Jun 17, 2025 |
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A quantum dot light emitting diode according to various embodiments of the present disclosure includes a first electrode and a second electrode that are opposite to each other; a light emitting layer that is located between the first electrode and the second electrode and includes a quantum dot; and an electron transport layer that is arranged between the first electrode and the light emitting layer and includes a metal oxide thin film, wherein the metal oxide thin film has a composition including at least one selected from the group consisting of In 2 O 3 , ZnO, SiO 2 and SnO 2 .
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The invention claimed is: 1. A light emitting diode comprising: a first electrode and a second electrode that are opposite to each other; a light emitting layer that is located between the first electrode and the second electrode and includes a quantum dot; and an electron transport layer that is arranged between the first electrode and the light emitting layer and includes a metal oxide thin film, wherein the metal oxide thin film has a composition selected from a group of chemical formulas consisting of: (1-y) [ (1-x) (In 2 O 3 )— x ZnO]— y SiO 2 [Chemical Formula 1] wherein, in chemical formula 1, 0<x<1 and 0.03≤y<0.29, and (1-y) [ (1-x) (In 2 O 3 )— x SnO 2 ]— y SiO 2 [Chemical Formula 2] wherein, in chemical formula 2, 0<x<1 and 0.14≤y<0.54. 2. The light emitting diode according to claim 1 , wherein: the metal oxide thin film is formed through a sputtering method. 3. A method for manufacturing a light emitting diode, comprising: a step of forming a first electrode on a substrate; and a step of forming an electron transport layer on the first electrode, wherein the step of forming the electron transport layer is carried out by a sputtering method, wherein the electron transport layer has a composition selected from a group of chemical formulas consisting of: (1-y) [ (1-x) (In 2 O 3 )— x ZnO]— y SiO 2 [Chemical Formula 1] wherein, in chemical formula 1, 0<x<1 and 0.03≤y<0.29, and (1-y) [ (1-x) (In 2 O 3 )— x SnO 2 ]— y SiO 2 [Chemical Formula 2] wherein, in chemical formula 2, 0<x<1 and 0.14≤y<0.54. 4. The method for manufacturing a light emitting diode according to claim 3 , wherein: the step of forming a first electrode and the step of forming an electron transport layer are carried out by a continuous vapor deposition process through the sputtering method. 5. The method for manufacturing a light emitting diode according to claim 3 , wherein: the step of forming an electron transport layer is carried out by a sputtering method using In—Zn—O target and SiO 2 target. 6. The method for manufacturing a light emitting diode according to claim 3 , wherein: the step of forming an electron transport layer is carried out by a sputtering method using In—Sn—O target and SiO 2 target. 7. The method for manufacturing a light emitting diode according to claim 3 , wherein: the method is carried out by a single target sputtering method using any one target selected from the group consisting of an In—Zn—Si—O target, and an In—Sn—Si—O target. 8. The method for manufacturing a light emitting diode according to claim 3 , wherein: the composition ratio of SiO 2 is adjusted through the sputtering method in the step of forming the electron transport layer.
Constructional details relating to the organic devices covered by this subclass · CPC title
comprising indium oxides, e.g. ITO · CPC title
comprising tin oxides, e.g. fluorine-doped SnO2 · CPC title
Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title
comprising colour filters or colour changing media [CCM] · CPC title
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