Methods for forming a vertical cavity surface emitting laser device

Patent metadata

Field	Value
Publication number	US-12334713-B2
Application number	US-202117364287-A
Country	US
Kind code	B2
Filing date	Jun 30, 2021
Priority date	Dec 30, 2020
Publication date	Jun 17, 2025
Grant date	Jun 17, 2025

Abstract

A method of forming a VCSEL device cavity using a multiphase growth sequence includes forming a first mirror over a substrate, forming a tunnel junction over the first mirror, forming an oxidation aperture (OA) layer over the tunnel junction, forming a p-doped layer over the OA layer, forming an active region over the p-doped layer, forming a second mirror over the active region, and forming a contact layer over the second mirror. The first mirror, the tunnel junction, the OA layer, and the p-doped layer are formed using a metal-organic chemical vapor deposition (MOCVD) process during an MOCVD phase of the multiphase growth sequence. The active region, the second mirror, and the contact layer are formed using a molecular beam epitaxy (MBE) process during an MBE phase of the multiphase growth sequence.

First claim

What is claimed is:

1. A method of forming a bottom emitting vertical cavity surface emitting laser (VCSEL) device using a multiphase growth sequence, comprising:
forming, using a metal-organic chemical vapor deposition (MOCVD) process in an MOCVD processing environment during an MOCVD phase of the multiphase growth sequence, an epitaxial structure comprising:
a first n-doped distributed Bragg reflector (DBR) a first mirror over a substrate,
a tunnel junction over the first doped DBR,
an oxidation aperture (OA) layer over the tunnel junction, and
a p-doped DBR over the OA layer;

moving, during a transition period following the MOCVD phase, the epitaxial structure from the MOCVD processing environment to a molecular beam epitaxy (MBE) processing environment; and
forming, using an MBE process in the MBE processing environment during an MBE phase of the multiphase growth sequence and after the transition period:
an active region over the p-doped DBR,
a second n-doped DBR over the active region, and
a contact layer over the second doped DBR.

2. The method of claim 1 , wherein the bottom emitting VCSEL device is configured to emit an output beam,
wherein the output beam is associated with a wavelength range of 1200-1600 nanometers.

3. The method of claim 1 , wherein the bottom emitting VCSEL device comprises at least one of:
a near-infrared VCSEL device;
an oxide confined VCSEL device;
an implant confined VCSEL device; or
a mesa confined VCSEL device.

4. The method of claim 1 , wherein:
the substrate is an n-doped substrate;
the tunnel junction comprises an n-doped semiconductor layer and a p-doped semiconductor layer,
wherein the n-doped semiconductor layer is doped with tellurium (Te) or selenium (Se), and
wherein the p-doped semiconductor layer is doped with carbon (C); and

the active region comprises at least one of a dilute nitride quantum well or an indium gallium arsenide (InGaAs) quantum dot layer.

5. The method of claim 1 , further comprising:
forming an additional contact layer over the substrate, wherein:
the additional contact layer is formed using the MOCVD process during the MOCVD phase of the multiphase growth sequence, and
forming the first n-doped DBR over the substrate comprises forming the first n-doped DBR over the additional contact layer.

6. The method of claim 1 , further comprising:
forming a current blocking layer over the substrate; and
forming an additional contact layer over the current blocking layer, wherein:
the current blocking layer and the additional contact layer are formed using the MOCVD process during the MOCVD phase of the multiphase growth sequence, and
forming the first n-doped DBR over the substrate comprises forming the first n-doped DBR over the additional contact layer.

7. The method of claim 1 , further comprising:
forming a metal layer over the second n-doped DBR, wherein:
the metal layer is formed after the MOCVD phase and after the MBE phase of the multiphase growth sequence.

8. The method of claim 7 , further comprising:
forming an additional metal layer on a surface of the substrate, wherein:
the additional metal layer is formed after the MOCVD phase and after the MBE phase of the multiphase growth sequence.

9. The method of claim 8 , wherein the metal layer is associated with a cathode of the bottom emitting VCSEL device and the additional metal layer is associated with an anode of the bottom emitting VCSEL device.

10. A method of forming a bottom emitting vertical cavity surface emitting laser (VCSEL) device using a multiphase growth sequence, comprising:
forming, using a metal-organic chemical vapor deposition (MOCVD) process in an MOCVD processing environment during an MOCVD phase of the multiphase growth sequence, an epitaxial structure comprising:
a first n-doped distributed Bragg reflector (DBR),
a tunnel junction over the first n-doped DBR, and
an oxidation aperture (OA) layer and a p-doped DBR over the tunnel junction;

moving, during a transition period following the MOCVD phase, the epitaxial structure from the MOCVD processing environment to a molecular beam epitaxy (MBE) processing environment; and
forming, using an MBE process in the MBE processing environment during an MBE phase of the multiphase growth sequence and after the transition period:
an active region over the OA layer and the p-doped DBR, and
a second n-doped DBR over the active region.

11. The method of claim 1 , wherein the OA layer is formed directly on a surface of the tunnel junction.

12. The method of claim 10 , wherein the active region comprises at least one of a dilute nitride quantum well or an indium gallium arsenide (InGaAs) quantum dot layer.

13. The method of claim 10 , wherein the tunnel junction comprises an n-doped semiconductor layer and a p-doped semiconductor layer, wherein:
the n-doped semiconductor layer comprises gallium arsenide (GaAs) doped with tellurium (Te) or selenium (Se); and
the p-doped semiconductor layer comprises GaAs doped with carbon (C).

14. The method of claim 10 , wherein the first n-doped DBR is formed over an n-doped substrate.

15. The method of claim 10 , further comprising:
forming, using the MOCVD process during the MOCVD phase of the multiphase growth sequence:
a contact layer over a semi-insulating substrate, wherein:
the first n-doped DBR is formed over the contact layer, and
the contact layer is configured as an anode for the bottom emitting VCSEL device.

16. The method of claim 10 , further comprising:
forming a current blocking layer over a n-doped substrate; and
forming a contact layer over the current blocking layer, wherein:
the first n-doped DBR is formed over the contact layer,
the current blocking layer and the contact layer are formed using the MOCVD
process during the MOCVD phase of the multiphase growth sequence, the current blocking layer comprises a dielectric material, and
the contact layer is configured as an anode for the bottom emitting VCSEL
device.

17. The method of claim 10 , further comprising:
forming, using the MBE process during the MBE phase of the multiphase growth sequence:
a contact layer over the second n-doped DBR, and
a metal layer over the contact layer.

18. A method of forming a bottom emitting vertical cavity surface emitting laser (VCSEL) device using a multiphase growth sequence, comprising:
forming a first portion of an epitaxial structure using a metal-organic chemical vapor deposition (MOCVD) process in an MOCVD processing environment during an MOCVD phase of the multiphase growth sequence;
moving, during a transition period following the MOCVD phase, the epitaxial structure from the MOCVD processing environment to a molecular beam epitaxy (MBE) processing environment; and
forming a second portion of the epitaxial structure using an MBE process in the MBE processing environment during an MBE phase of the multiphase growth sequence and after the transition period, wherein:
the first portion of the epitaxial structure comprises a first n-doped distributed Bragg reflector (DBR), a tunnel junction, an oxidation aperture (OA) layer, and a p-doped layer, and
the second portion of the epitaxial structure comprises an active region and a second n-doped DBR.

19. The method of claim 18 , wherein the active region comprises at least one of a dilute nitride quantum well or an indium gallium arsenide (InGaAs) quantum dot layer.

20. The method of claim 18 , wherein:
the first portion of the epitaxial struct

Assignees

• Lumentum Operations Llc

Inventors

• Kesler Benjamin
• Barve Ajit Vijay
• Yang Jun
• Zhao Guowei
• Peters Matthew Glenn

Classifications

• H01S5/18311 Primary

  using selective oxidation · CPC title

• H01S5/18325

  Between active layer and substrate · CPC title

• H01S5/3095

  Tunnel junction · CPC title

• H01S5/18361 Primary

  Structure of the reflectors, e.g. hybrid mirrors · CPC title

• H01S2304/04

  MOCVD or MOVPE · CPC title