Heterodyne grating interferometry system based on secondary diffraction

Patent metadata

Field	Value
Publication number	US-12332053-B2
Application number	US-202118246670-A
Country	US
Kind code	B2
Filing date	Sep 14, 2021
Priority date	Sep 25, 2020
Publication date	Jun 17, 2025
Grant date	Jun 17, 2025

Abstract

Disclosed is a heterodyne grating interferometry system based on secondary diffraction, including a single-frequency laser, an input optical fiber, an acousto-optic modulator, a reading head, and a measurement grating, an output optical fiber, a photoelectric conversion unit and an electronic signal processing unit, wherein the single-frequency laser emits a single-frequency laser, which enters the acousto-optic modulator through the input optical fiber, and is divided into a reference light and measurement light to be input to the reading head, wherein the reading head and the measurement grating convert the reference light and measurement light into a reference interference optical signal and a measurement interference optical signal and send them to the photoelectric conversion unit through the output optical fiber and wherein the photoelectric conversion unit converts the measurement interference optical signal and the reference interference optical signal into a measurement interference electrical signal and a reference interference electrical signal.

First claim

What is claimed is:

1. A heterodyne grating interferometry system based on secondary diffraction comprising a single-frequency laser, an input optical fiber, an acousto-optic modulator, a reading head, a measurement grating, an output optical fiber, a photoelectric converter and an electronic signal processing unit,
wherein the single-frequency laser emits a single-frequency laser beam, which enters the acousto-optic modulator through the input optical fiber, and is divided into a reference light and measurement light to be input to the reading head, wherein the reading head and the measurement grating convert the reference light and measurement light into a reference interference optical signal and a measurement interference optical signal and send them to the photoelectric converter through the output optical fiber,
wherein the photoelectric converter converts the measurement interference optical signal and the reference interference optical signal into a measurement interference electrical signal and a reference interference electrical signal and sends them to the electronic signal processing unit, and calculates 2-degree-of-freedom linear displacement of the measurement grating,
wherein the reading head comprises an interferometer lens group, the single-frequency laser emits multiple single-frequency laser beams, the multiple single-frequency laser beams are divided into multiple beams of reference light and multiple beams of measurement light by the acousto-optic modulator,
wherein the multiple beams of reference light and the multiple beams of measurement light are transmitted in a space-separated manner, and enter the interferometer lens group at respective different positions, and generate multiple channels of measurement interference signals and multiple channels of reference interference signals,
wherein the interferometer lens group comprises a plurality of reflectors, a plurality of quarter-wave plates, a plurality of polarization beam splitters, a plurality of retroreflectors, a plurality of lateral beam splitter prisms and a plurality of refractors,
wherein the single-frequency laser emits the multiple single-frequency laser beams, and the multiple single-frequency laser beams are divided into multiple beams of reference light and multiple beams of measurement light by the acousto-optic modulator,
wherein each of the multiple beams of reference light enters respective polarization beam splitters and each of the multiple beams of measurement light enter respective polarization beam splitters so as to be reflected and transmitted, to form multiple beams of reflected measurement light, multiple beams of transmitted measurement light, multiple beams of reflected reference light and multiple beams of transmitted reference light,
wherein the multiple beams of reflected measurement light pass through the respective quarter-wave plates, the respective refractors, the measurement grating, the respective refractors, the respective quarter-wave plates, the respective polarization beam splitters and the respective retroreflectors to be reflected multiple times, to form multiple beams of first measurement light,
wherein the multiple beams of transmitted measurement light pass through respective lateral beam splitter prisms to form multiple beams of second measurement light,
wherein the multiple beams of reflected reference light pass through the respective quarter-wave plates, the respective reflectors, the respective polarization beam splitters, the respective retroreflectors and the respective lateral beam splitter prisms to be reflected multiple times, to form multiple beams of first reference light,
wherein the multiple beams of transmitted reference light pass through respective lateral beam splitter prisms to form multiple beams of second reference light, and
wherein the multiple beams of first measurement light and the multiple beams of second measurement light interfere with the reference light to form the multiple channels of measurement interference signals, and the multiple beams of first reference light and second reference light interfere with the measurement light to form the multiple channels of reference interference signals.

2. The heterodyne grating interferometry system based on secondary diffraction according to claim 1 , wherein the interferometer lens group comprises a first polarization beam splitter, a second polarization beam splitter, a first lateral beam splitter prism, a second lateral beam splitter prism, a third lateral beam splitter prism, a fourth lateral beam splitter prism, a first retroreflector, a second retroreflector, a third retroreflector, a fourth retroreflector, a first quarter-wave plate, a second quarter-wave plate, a first reflector, a second reflector, a first refractor and a second refractor,
wherein the single-frequency laser emits two single-frequency laser beams to form two beams of measurement light and two beams of reference light after passing through the acousto-optic modulator,
wherein one beam of measurement light passes through the first polarization beam splitter to be reflected and transmitted so as to form a beam of first reflected measurement light and a beam of first transmitted measurement light, and another beam of reference light passes through the first polarization beam splitter to be reflected and transmitted so as to form a beam of first reflected reference light and a beam of first transmitted reference light,
wherein the first reflected measurement light sequentially passes through the first quarter-wave plate, the first refractor, the measurement grating, the first refractor, the first quarter-wave plate, the first polarization beam splitter, the first retroreflector, the first polarization beam splitter, the first quarter-wave plate, the first refractor, the measurement grating, the first refractor, the first polarization beam splitter, and the first lateral beam splitter prism to form the first measurement light,
wherein the first transmitted measurement light passes through the second lateral beam splitter prism to form the second measurement light,
wherein the first reflected reference light sequentially passes through the first quarter-wave plate, the first reflector, the first quarter-wave plate, the first polarization beam splitter, the second retroreflector, the first polarization beam splitter, the first quarter-wave plate, the first reflector, the first quarter-wave plate, the first polarization beam splitter, and the first lateral beam splitter prism to form the first reference light,
wherein the first transmitted reference light passes through the second lateral beam splitter prism to form the second reference light,
wherein the first measurement light interferes with the first reference light to form a first measurement interference signal and the second measurement light interferes with the second reference light to form a first reference interference signal,
wherein the other beam of measurement light passes through the second polarization beam splitter to be reflected and transmitted so as to form a beam of second reflected measurement light and a beam of second transmitted measurement light, and the other beam of reference light passes through the second polarization beam splitter to be reflected and transmitted so as to form a beam of second reflected reference light and a beam of second transmitted reference light,
wherein the second reflected measurement light sequentially passes through the second quarter-wave plate, the second refractor, the measurement grating, the second refractor, the second quarter-wave plate, the second polarization beam splitter, the third retroreflector, the second polarization beam splitter, the second quarter-wave plate, the second refractor, the measurement grating, the second refractor, the second polarization beam splitter and the third lateral beam s

Assignees

• Univ Tsinghua
• Beijing U Prec Tech Co Ltd

Inventors

• Zhu Yu
• Wang Leijie
• Guo Ziwen
• Zhang Ming
• Cheng Rong
• Ye Weinan
• Cheng Zhaokui

Classifications

• G01B9/02051

  Integrated design, e.g. on-chip or monolithic · CPC title

• G02B27/283

  used for beam splitting or combining · CPC title

• G01B9/02028

  Two or more reference or object arms in one interferometer · CPC title

• G01B9/02024

  Measuring in transmission, i.e. light traverses the object · CPC title

• G01B11/02 Primary

  for measuring length, width or thickness (G01B11/08 takes precedence) · CPC title