Vaporization system

Patent metadata

Field	Value
Publication number	US-12331401-B2
Application number	US-202117913375-A
Country	US
Kind code	B2
Filing date	Feb 3, 2021
Priority date	Mar 23, 2020
Publication date	Jun 17, 2025
Grant date	Jun 17, 2025

Abstract

A vaporization system includes: a vaporization device that is configured to vaporize a liquid material and that includes an inlet port through which the liquid material is introduced and an outlet port through which vaporized gas generated by vaporizing the liquid material is discharged; at least one first fixing screw with which at least one of the inlet port or the outlet port is screwed and fixed onto a base; at least one pipe member that is configured to communicate with the fixed port and through which the vaporized gas or the liquid material flows; and at least one second fixing screw with which the at least one pipe member is screwed and fixed onto the fixed port with a seal member interposed between the at least one pipe member and the fixed port.

First claim

The invention claimed is:

1. A vaporization system comprising:
a vaporization device that is configured to vaporize a liquid material, the vaporization device including:
a vaporizer that is configured to vaporize the liquid material;
a supply flow rate controller that is configured to control a supply flow rate of the liquid material to the vaporizer;
a casing that houses the vaporizer and the supply flow rate controller; and
an inlet port through which the liquid material is introduced and an outlet port through which vaporized gas generated by vaporizing the liquid material is discharged, the inlet port and the outlet port being provided on an exterior of the casing; and

a connection mechanism, provided on the exterior of the casing, that screws and fixes the vaporization device onto a base, the connection mechanism including:
at least one first fixing screw with which a mounting surface of a fixed port, which is at least one of the inlet port or the outlet port, is screwed and fixed onto the base;
at least one pipe member that is configured to communicate with the fixed port and through which the vaporized gas or the liquid material flows; and
at least one second fixing screw with which a pipe member mounting surface of the at least one pipe member is screwed and fixed onto the fixed port with a seal member interposed between the at least one pipe member and the fixed port, wherein

in the fixed port, the mounting surface and the pipe member mounting surface are formed on different surfaces.

2. The vaporization system according to claim 1 , wherein in the fixed port, the pipe member mounting surface is formed on a surface opposite to the mounting surface.

3. The vaporization system according to claim 1 ,
wherein the at least one first fixing screw includes a plurality of first fixing screws, and each of the inlet port and the outlet port is screwed on the base with a corresponding one of the plurality of first fixing screws,
wherein the at least one pipe member includes:
an inlet-side pipe member that is configured to communicate with the inlet port and through which the liquid material flows; and
an outlet-side pipe member that is configured to communicate with the outlet port and through which the vaporized gas flows, and
wherein the at least one second fixing screw includes a plurality of second fixing screws, and each of the inlet-side pipe member and the outlet-side pipe is screwed on a corresponding one of the ports with a corresponding one of the plurality of second fixing screws, with a corresponding one of seal members interposed between each of the inlet-side pipe member and the outlet-side pipe, and the corresponding one of the ports.

4. The vaporization system according to claim 3 ,
wherein the inlet port is provided on one end side of the vaporization device, and the outlet port is provided on another end side of the vaporization device, and
wherein the vaporization device is fixed on the base in a state where the inlet port and the outlet port are positioned one below another or vice versa in a vertical direction.

5. The vaporization system according to claim 1 ,
wherein the at least one pipe member includes at least one external pipe, and at least one communication member through which the at least one external pipe and the fixed port are caused to communicate with each other, and
wherein the at least one communication member has one end that is screwed on the fixed port and another end that is screwed on the at least one external pipe.

6. The vaporization system according to claim 1 , wherein the vaporization device further includes a mass flow controller that is configured to control a flow rate of vaporized gas generated by vaporizing in the vaporizer.

7. A method of fixing a vaporization device onto a base, the vaporization device being configured to vaporize a liquid material, the vaporization device including:
a vaporizer that is configured to vaporize the liquid material;
a supply flow rate controller that is configured to control a supply flow rate of the liquid material to the vaporizer;
a casing that houses the vaporizer and the supply flow rate controller; and
an inlet port through which the liquid material is introduced and an outlet port through which vaporized gas generated by vaporizing the liquid material is discharged, the inlet port and the outlet port being provided on an exterior of the casing, the method comprising:
screwing and fixing a mounting surface of a fixed port, which is at least one of the inlet port or the outlet port, onto a base; and
screwing and fixing, onto the fixed port, a pipe member mounting surface of at least one pipe member that is configured to communicate with the fixed port and through which the vaporized gas or the liquid material flows, with a seal member interposed between the at least one pipe member and the fixed port, wherein
in the fixed port, the mounting surface and the pipe member mounting surface are formed on different surfaces.

Assignees

• Horiba Stec Co Ltd

Inventors

• Taguchi Akihiro

Classifications

• C23C16/52

  Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} · CPC title

• C23C16/448 Primary

  characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials · CPC title

• C23C16/4409

  characterised by sealing means · CPC title

• C23C16/45561 Primary

  Gas plumbing upstream of the reaction chamber · CPC title

• B01D1/0082

  Regulation; Control · CPC title