Thin-film transistor, manufacturing method thereof, array substrate and display panel

Patent metadata

Field	Value
Publication number	US-12328910-B2
Application number	US-202117772689-A
Country	US
Kind code	B2
Filing date	Jun 24, 2021
Priority date	Jun 24, 2020
Publication date	Jun 10, 2025
Grant date	Jun 10, 2025

Abstract

The disclosure provides a thin-film transistor, a manufacturing method thereof, an array substrate and a display panel, and belongs to the technical field of thin-film transistor devices. The thin-film transistor includes a base substrate, an active layer on the base substrate including a plurality of semiconductor nanowires, and a plurality of guiding projections on the base substrate which extend along a first direction and are arranged at intervals and each of which includes two side walls extending along the first direction, and the semiconductor nanowire extends along a side wall of the guiding projection. In the thin-film transistor, since the semiconductor nanowires are used as the active layer, mobility and concentration of carriers in the thin-film transistor can be effectively increased and therefore performance of the thin-film transistor can be improved. A length of the semiconductor nanowire is not limited, and a size of the thin-film transistor is not limited.

First claim

The invention claimed is:

1. A thin-film transistor, comprising: a base substrate and an active layer on the base substrate, wherein
the active layer comprises a plurality of semiconductor nanowires; and
the thin-film transistor further comprises:
a plurality of guiding projections on a side of the base substrate close to the active layer, the plurality of guiding projections extending along a first direction and being arranged at intervals, each guiding projection of the plurality of guiding projections comprising two side walls extending along the first direction, and the plurality of semiconductor nanowires extending along at least one side wall of the plurality of guiding projections, respectively,
wherein the plurality of guiding projections are successively arranged along a second direction perpendicular to the first direction at equal intervals;
each of the plurality of guiding projections comprises a bottom surface in direct contact with the base substrate and a top surface opposite to the bottom surface, and a first side wall and a second side wall between the bottom surface and the top surface, all first side walls of the plurality of guiding projections facing towards a same direction, and all second side walls of the plurality of guiding projections face towards a same direction; and
the plurality of semiconductor nanowires are respectively only disposed on the first side walls facing towards the same direction or the second side walls facing towards the same direction.

2. The thin-film transistor according to claim 1 , wherein the plurality of semiconductor nanowires are silicon nanowires; and/or
the base substrate is a glass substrate or a polyethylenimine substrate.

3. The thin-film transistor according to claim 1 , wherein the base substrate and the plurality of guiding projections are of a one-piece structure.

4. The thin-film transistor according to claim 1 , further comprising: a source electrode and a drain electrode arranged in a same layer and disposed on a side of the active layer away from the base substrate, and
the source electrode and the drain electrode connected to two ends of each semiconductor nanowire of the plurality of semiconductor nanowires.

5. An array substrate, comprising: a driving circuit comprising the thin-film transistor according to claim 1 .

6. A display panel, comprising the array substrate according to claim 5 .

7. The display panel according to claim 6 , further comprising an active-matrix organic light-emitting diode or a passive-matrix organic light-emitting diode.

8. A manufacturing method of a thin-film transistor, comprising:
preparing a base substrate;
forming a plurality of guiding projections on the base substrate such that the plurality of guiding projections extend along a first direction and are arranged at intervals, and each guiding projection of the plurality of guiding projections comprises two side walls extending along the first direction; and
forming a plurality of semiconductor nanowires as an active layer on the base substrate such that the plurality of semiconductor nanowires extend along at least one side wall of the plurality of guiding projections, respectively,
wherein the plurality of guiding projections are successively arranged along a second direction perpendicular to the first direction at equal intervals;
each of the plurality of guiding projections comprises a bottom surface in direct contact with the base substrate and a top surface opposite to the bottom surface, and a first side wall and a second side wall between the bottom surface and the top surface, all first side walls of the plurality of guiding projections facing towards a same direction, and all second side walls of the plurality of guiding projections face towards a same direction; and
the plurality of semiconductor nanowires are respectively only disposed on the first side walls facing towards the same direction or the second side walls facing towards the same direction.

9. The manufacturing method according to claim 8 , wherein the forming the plurality of guiding projections on the base substrate comprises:
depositing a layer of silicon oxide on a side of the base substrate close to the active layer to form a guiding projection material layer; and
forming the plurality of guiding projections extending along the first direction on a side of the guiding projection material layer away from the base substrate by a patterning process.

10. The manufacturing method according to claim 9 , wherein the forming the plurality of guiding projections extending along the first direction on the side of the guiding projection material layer away from the base substrate by the patterning process comprises:
forming the plurality of guiding projections extending along the first direction on the side of the guiding projection material layer away from the base substrate by a nano-imprinting process or a photolithography process.

11. The manufacturing method according to claim 8 , wherein
a material of the base substrate and the plurality of guiding projections comprises glass, and
the forming the plurality of guiding projections on the base substrate comprises forming the base substrate and the plurality of guiding projections on the base substrate as a one-piece structure by a single process.

12. The manufacturing method according to claim 8 , wherein the forming the plurality of semiconductor nanowires as the active layer on the base substrate comprises:
forming a plurality of guiding particles at ends of the first side walls or the second side walls of the plurality of guiding projections; and
depositing a layer of semiconductor material on a side of the plurality of guiding projections away from the base substrate such that the semiconductor material is guided by the plurality of guiding particles to grow along the first side walls or the second side walls of the plurality of guiding projections to form the plurality of semiconductor nanowires.

13. The manufacturing method according to claim 12 , wherein the forming the plurality of guiding particles at the ends of the first side walls or the second side walls of the plurality of guiding projections comprises
depositing a guiding material at the ends of the first side walls or the second side walls of the plurality of guiding projections, wherein the guiding material and the plurality of guiding particles have a same chemical element; and
converting the guiding material into the plurality of guiding particles by a plasma treatment in a plasma enhanced chemical vapor deposition system.

14. The manufacturing method according to claim 13 , wherein the guiding material is indium tin oxide, and the plurality of guiding particles are indium.

15. The manufacturing method according to claim 14 , wherein the depositing the layer of semiconductor material on the side of the plurality of guiding projections away from the base substrate such that the semiconductor material is guided by the plurality of guiding particles to grow along the first side walls or the second side walls of the plurality of guiding projections to form the plurality of semiconductor nanowires comprises
depositing the layer of semiconductor material on the side of the plurality of guiding projections away from the base substrate at a temperature ranging from 180° C. to 220° C.; and
forming the plurality of semiconductor nanowires by causing the semiconductor material to be guided by the plurality of guiding particles to grow along the first side walls or the second side walls of the plurality of guiding projections under an inert or reducing gas and at

Assignees

• Boe Technology Group Co Ltd
• Boe Tech Group Co Td

Inventors

• He Jiayu
• Ning ce
• Li Zhengliang
• Hu hehe
• Huang Jie
• Yao Nianqi
• Zhao Kun
• Liu Xue
• Wang Zhi
• Guan Feng

Classifications

• H10D62/121

  oriented parallel to substrates · CPC title

• H10D30/6743

  Silicon · CPC title

• H10D30/0321

  comprising silicon, e.g. amorphous silicon or polysilicon · CPC title

• H10D30/031

  of thin-film transistors [TFT] · CPC title

• H10D86/60

  wherein the TFTs are in active matrices · CPC title