Nanostructure transfer method

Patent metadata

Field	Value
Publication number	US-12325629-B2
Application number	US-201917270915-A
Country	US
Kind code	B2
Filing date	Aug 29, 2019
Priority date	Aug 29, 2018
Publication date	Jun 10, 2025
Grant date	Jun 10, 2025

Abstract

A nanostructure transfer method is provided. The method includes providing a first substrate ( 10 ) having thereon a plurality of nanostructures ( 12 ), the nanostructures ( 12 ) extending away from the first substrate ( 10 ). A solder material ( 14 ) is deposited on distal ends of the nanostructures ( 12 ). A second substrate ( 18 ) having thereon a first metal layer ( 20 ) is provided. The solder material ( 14 ) is bonded to the first metal layer ( 20 ), thereby attaching the nanostructures ( 12 ) to the second substrate ( 18 ). The attached nanostructures ( 12 ) are then released from the first substrate ( 10 ).

First claim

The invention claimed is:

1. A nanostructure transfer method, comprising:
providing a plurality of first nanostructures, and a plurality of second nanostructures, the first nanostructures and the second nanostructures extending to a respective first height and second height, the second height being greater than the first height;
depositing a solder material on distal ends of the first nanostructures;
providing a target substrate having thereon a first metal layer;
bonding the solder material on the distal ends of the first nanostructures to the first metal layer, thereby attaching the first nanostructures to the target substrate;
depositing a solder material on the distal ends of the second nanostructures;
bonding the solder material on the distal ends of the second nanostructures to the first metal layer, thereby attaching the second nanostructures to the target substrate;
wherein the first and second nanostructures are transferred in a sequence of increasing height, and,
wherein the first nanostructures and the second nanostructures are one-dimensional nanostructures.

2. The nanostructure transfer method of claim 1 , wherein the first nanostructures and/or the second nanostructures are arranged in a patterned array.

3. The nanostructure transfer method of claim 2 , wherein depositing the solder material comprises depositing the solder material in a pattern, using a hard shadow mask, on a surface of the first nanostructures and/or the second nanostructures.

4. The nanostructure transfer method of claim 1 , wherein each of the first nanostructures and each of the second nanostructures has a height or length of from about 10 microns (μm) to about 1 millimetre (mm).

5. The nanostructure transfer method of claim 1 , further comprising depositing a second metal layer on the distal ends of the first nanostructures and/or the second nanostructures prior to respective depositing of the solder material on the distal ends of the first nanostructures and/or the second nanostructures.

6. The nanostructure transfer method of claim 5 , wherein the second metal layer is selected from a group consisting of titanium (Ti), nickel (Ni), palladium (Pd) and chromium (Cr).

7. The nanostructure transfer method of claim 1 , wherein the solder material has a melting point of less than 220 degrees Celsius (° C.).

8. The nanostructure transfer method of claim 7 , wherein the melting point of the solder material is less than 200° C.

9. The nanostructure transfer method of claim 1 , wherein the solder material is selected from a group consisting of indium (In), tin (Sn), zinc (Zn) and an alloy thereof.

10. The nanostructure transfer method of claim 1 , wherein the solder material is deposited to a thickness of from about 200 nanometres (nm) to about 600 nm.

11. The nanostructure transfer method of claim 1 , wherein the first metal layer is patterned.

12. The nanostructure transfer method of claim 1 , wherein the first metal layer has a thickness of from about 50 nm to about 5 μm.

13. The nanostructure transfer method of claim 1 , wherein the first metal layer is selected from a group consisting of gold (Au) and silver (Ag).

14. The nanostructure transfer method of claim 1 , wherein the step of bonding the solder material to the first metal layer comprises melting the solder material.

15. The nanostructure transfer method of claim 1 , wherein the step of bonding the solder material to the first metal layer further comprises applying a force to bond the solder material to the first metal layer.

16. The nanostructure transfer method of claim 1 , further comprising providing a plurality of spacers on the target substrate prior to bonding the solder material on the distal ends of the first nanostructures and/or the second nanostructures to the first metal layer.

17. The nanostructure transfer method of claim 1 , wherein the attached first nanostructures have a collective width of from about 5 microns (μm) to about centimetres (cm).

18. The nanostructure transfer method of claim 2 , wherein the first nanostructures are aligned in a direction parallel to a plane of the first substrate.

19. The nanostructure transfer method of claim 18 , further comprising growing the first nanostructures on the first substrate, wherein the first nanostructures are bent in the direction parallel to the plane of the first substrate.

20. The nanostructure transfer method of claim 19 , further comprising pressing the first nanostructures to align the nanostructures to the plane of the first substrate.

21. The nanostructure transfer method of claim 18 , further comprising depositing the solder material on proximal ends of the first nanostructures.

22. The nanostructure transfer method of claim 1 , further comprising providing a plurality of spacers on the target substrate after attaching the first nanostructures, wherein the plurality of spacers extend to a height greater than the first height.

Assignees

• Thales Solutions Asia Pte Ltd
• Centre Nat Rech Scient
• Univ Nanyang Tech
• Univ Lille

Inventors

• Wang Jianxiong
• Coquet Philippe
• Tay Beng Kang

Classifications

• H10P72/74 Primary

  using temporarily an auxiliary support · CPC title

• H10K85/221

  Carbon nanotubes · CPC title

• H10K71/18

  using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• B81C1/00111

  Tips, pillars, i.e. raised structures (microneedles A61M37/0015) · CPC title