Substrate treating apparatus and substrate treating method

Patent metadata

Field	Value
Publication number	US-12315699-B2
Application number	US-202217854653-A
Country	US
Kind code	B2
Filing date	Jun 30, 2022
Priority date	Dec 28, 2021
Publication date	May 27, 2025
Grant date	May 27, 2025

Abstract

The present invention provides a substrate treating method, including: a first treatment operation of treating the substrate by using first plasma generated by exciting first gas; and a second treatment operation of treating the substrate by using second plasma generated by exciting second gas different from the first gas.

First claim

What is claimed is:

1. A substrate treating method, comprising:
a first treatment operation of treating the substrate by using first plasma generated by exciting a first gas; and
a second treatment operation of treating the substrate by using second plasma generated by exciting a second gas different from the first gas,
wherein the first treatment operation includes
generating the first plasma in a first space within a chamber,
removing ions included in the first plasma and supplying an ammonia radical to a second space while the first plasma flows from the first space to the second space located below the first space,
generating a first etchant in the second space, by reacting the ammonia radical and a third gas containing hydrogen, and
supplying the first etchant to a third space in which the substrate is placed, and

wherein the second treatment operation includes
generating the second plasma in the first space,
blocking ions included in the second plasma from being supplied to the second space and supplying a fluorine radical to the second space, while the second plasma flows from the first space to the second space,
generating a second etchant in the second space by reacting the fluorine radical and the third gas containing hydrogen, and
supplying the second etchant to the third space in which the substrate is placed.

2. The substrate treating method of claim 1 , wherein the second treatment operation is performed after the first treatment operation.

3. The substrate treating method of claim 1 , wherein the first treatment operation and the second treatment operation are alternately performed.

4. The substrate treating method of claim 1 , wherein
the first gas excited into the first plasma contains hydrogen, and
the second gas excited into the second plasma contains fluorine.

5. The substrate treating method of claim 4 , wherein
the first gas contains ammonia (NH 3 ), and
the second gas contains nitrogen trifluoride (NF 3 ).

6. The substrate treating method of claim 5 , wherein in the first treatment operation,
the first plasma is generated in the first space within a chamber,
the ions included in the first plasma are removed and the ammonia radical is supplied to the second space while the first plasma flows from the first space to a second space located below the first space, and
the ammonia radical is supplied to the third space on which the substrate is placed.

7. A substrate treating method of treating a substrate in a chamber divided into a first space, a second space, and a third space, the substrate treating method comprising:
generating plasma by supplying a process gas in the first space, and
generating an etchant by reacting the plasma and a treatment gas in the second space located below the first space,
treating the substrate in the third space using the etchant, the third space located below the second space,
wherein the process gas includes a first gas and a second gas different from the first gas, and
wherein the generating of the plasma includes
generating first plasma by supplying the first gas to the first space, and
generating second plasma by supplying the second gas to the first space,

wherein the generating of the etchant includes
removing ions included in the first plasma and supplying an ammonia radical to the second space while the first plasma flows from the first space to the second space located below the first space,
generating a first etchant in the second space, by reacting the ammonia radical and a third gas containing hydrogen,
supplying the first etchant to the third space in which the substrate is placed,
blocking ions included in the second plasma from being supplied to the second space and supplying a fluorine radical to the second space, while the second plasma flows from the first space to the second space,
generating a second etchant in the second space by reacting the fluorine radical and the third gas containing hydrogen, and
supplying the second etchant to the third space in which the substrate is placed.

8. The substrate treating method of claim 7 , wherein the first gas and the second gas are alternately supplied to the first space.

9. The substrate treating method of claim 8 , wherein the first gas contains ammonia (NH 3 ), and
the second gas contains nitrogen trifluoride (NF 3 ).

10. The substrate treating method of claim 9 , wherein
the first space and the second space are partitioned by a grounded plate,
the ions included in the first plasma generated by the first gas supplied to the first space are blocked by the grounded plate, so that the ammonia radical is supplied to the second space, and
the ions included in the second plasma generated by the second gas supplied to the first space are blocked by the grounded plate, so that the fluorine radical is supplied to the second space.

11. The substrate treating method of claim 7 , wherein the treatment gas includes ammonia (NH 3 ).

12. The substrate treating method of claim 11 , wherein the treatment gas is continuously supplied to the second space while the first gas and/or the second gas is supplied to the first space.

13. The substrate treating method of claim 7 , wherein the first gas and the second gas are simultaneously supplied to the first space.

Assignees

• Semes Co Ltd

Inventors

• Ju yoon jong
• Lee Seong Gil
• Kim Jae Hwan
• Park Wan Jae
• Kheel Hye Joon
• Park Ji Hoon
• Um Young Je

Classifications

• H10P50/283 Primary

  by chemical means · CPC title

• H01J37/32422 Primary

  Arrangement for selecting ions or species in the plasma · CPC title

• H01J2237/334

  Etching · CPC title

• H01J37/3244

  Gas supply means · CPC title

• H01J37/32091

  the radio frequency energy being capacitively coupled to the plasma · CPC title