Method for producing fine structures in the volume of a substrate composed of hard brittle material
US-2019329251-A1 · Oct 31, 2019 · US
US12315647B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12315647-B2 |
| Application number | US-202318174517-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 24, 2023 |
| Priority date | Feb 22, 2022 |
| Publication date | May 27, 2025 |
| Grant date | May 27, 2025 |
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A shielding mesh to counter scattered ionizing radiation is provided. The shielding mesh includes a plate, arrangement of depressions, a mesh of trenches, and an x-ray-absorbing material. The plate has a first side and a second side opposite the first side. The arrangement of depressions are in the plate and are open toward the second side. The mesh of trenches are in the plate and are open toward the first side. The x-ray-absorbing material is in the mesh of trenches. The mesh of trenches and arrangement of depressions are configured so that a wall of the plate remains between the arrangement of depressions and the mesh of trenches.
Opening claim text (preview).
What is claimed is: 1. A shielding mesh to counter scattered ionizing radiation, comprising: a plate having a first side and a second side opposite the first side; an arrangement of depressions in the plate that are open toward the second side; a mesh of trenches in the plate that are open toward the first side; and an x-ray-absorbing material in the mesh of trenches, wherein the mesh of trenches and arrangement of depressions are configured so that a wall of the plate remains between the arrangement of depressions and the mesh of trenches. 2. The shielding mesh of claim 1 , wherein the plate is a glass plate. 3. The shielding mesh of claim 1 , further comprising a feature selected from a group consisting of: the mesh of trenches have a ratio of width to depth of at least 40:1; the mesh of trenches have a depth that is at least 1.5 millimetres; the wall has an angle that differs by less than 5° from a center axis; the mesh of trenches comprise two adjacent trenches that have a middle-to-middle distance that is less than a depth of the two adjacent trenches; the mesh of trenches comprise two adjacent trenches that have a middle-to-middle distance that is less than a depth of the two adjacent trenches by at least a factor of three; the mesh of trenches have a width that differs from a width of the arrangement of depressions by not more than a factor of 2; the mesh of trenches have a width that is not more than 100 μm; the mesh of trenches have a width that is not more than 50 μm; and any combinations thereof. 4. The shielding mesh of claim 1 , wherein the arrangement of depressions and/or the mesh of trenches have a center axis that is directed toward a common virtual point source. 5. The shielding mesh of claim 1 , wherein the x-ray-absorbing material comprises a feature selected from a group consisting of: a partly or fully molten glass; a lead-containing glass; a bismuth-containing glass; particles embedded in a partly or fully molten material; particles embedded in a partly or fully molten glass; metal particles; mineral particles; ceramic particles; a density of at least 9 g/cm 3 ; a density of at least 11 g/cm 3 ; a density that is at least four times greater than a density of a material of the plate; at least 10 percent by weight of elements having an atomic number of at least Z=56; at least 25 percent by weight of elements having an atomic number of at least Z=56; particles of a tungsten-containing material; particles of metallic tungsten; particles of a tungsten alloy; particles of a tungsten-containing mineral; particles of a tungsten-containing ceramic; a difference in a coefficient of linear thermal expansion of the x-ray absorbing material and a material of the plate that is less than 3 ppm/K; a filling level of the x-ray-absorbing material in the mesh of trenches that is at least 40% by volume; a filling level of the x-ray-absorbing material in the mesh of trenches that is at least 60% by volume; a glass of the x-ray-absorbing material has a glass transition temperature that is at least 160° C. lower than a glass transition temperature of a glass of the plate; a glass of the x-ray-absorbing material has a glass transition temperature that is at least 220° C. lower than a glass transition temperature of a glass of the plate; a glass of the x-ray-absorbing material has a processing temperature at which a viscosity thereof is 104 dPa·s that is at least 100° C. lower than a processing temperature of a glass of the plate; a glass of the x-ray-absorbing material has a processing temperature lower than a temperature of a softening point of a glass of the plate, wherein the softening point is defined by a viscosity of 1076 dPa·s; a particle with a coefficient of linear thermal expansion that is less than 1 ppm/K or negative in at least one part of a temperature range between 0° C. and 200° C.; and any combinations thereof. 6. The shielding mesh of claim 1 , wherein the mesh of trenches are at least partly open toward the second side. 7. The shielding mesh of claim 1 , wherein the mesh of trenches have a base opening. 8. The shielding mesh of claim 1 , wherein the x-ray-absorbing material comprises a feature selected from a group consisting of: particles comprising a mixture of at least two powders with different d50 values; particles comprising a mixture of at least two metal powders with different d50 values; particles comprising a mixture of at least two mineral powders with different d50 values; particles comprising a mixture of at least two ceramic powders with different d50 values; particles having a particle size distribution for which the exponent n of an Andreasen distribution of particle diameters d fitted to a particle size distribution of the metal particles, F ( d ) = 100 * ( d d max ) n is less than n=0.33, where d max is the maximum particle diameter of the fitted Andreasen distribution; particles having a particle size distribution for which the exponent n of an Andreasen distribution of particle diameters d fitted to a particle size distribution of the metal particles, F ( d ) = 100 * ( d d max ) n is less than n=0.28, where d max is the maximum particle diameter of the fitted Andreasen distribution; particles having a particle size distribution that is bimodal; particles having a particle size distribution that is multimodal; metal particles embedded in a filler metal that has a melting point below a melting point of the metal particles and below a transformation temperature of a glass of the plate; metal particles having a coating that has a higher surface energy than a material of the metal particles; metal particles having a coating that absorbs x-radiation; silanized metal particles; spherical metal particles; two metal powders that differ in terms of particle size by a factor of at least two; two metal powders that differ in terms of particle size with larger metal particles being spherical; and any combinations thereof. 9. The shielding mesh of claim 1 , further comprising a second glass plate secured on at least one of the first and second sides. 10. The shielding mesh of claim 1 , further comprising an organic encapsulation on at least one of the first and second sides. 11. An imaging x-ray device, comprising an x-ray detector configured to detect x-radiation; an x-ray source; and a shielding mesh between the x-ray detector and the x-ray source, wherein the shielding mesh comprises: a plate having a first side and a second side opposite the first side; an arrangement of depressions
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