Laser interferometer

Patent metadata

Field	Value
Publication number	US-12313469-B2
Application number	US-202217652650-A
Country	US
Kind code	B2
Filing date	Feb 25, 2022
Priority date	Feb 26, 2021
Publication date	May 27, 2025
Grant date	May 27, 2025

Abstract

A laser interferometer includes a light source configured to emit first laser light, an optical modulator including a vibrator and configured to modulate, by the vibrator, the first laser light into second laser light having a different frequency, an optical path switching unit disposed in a first optical path through which the first laser light travels and configured to switch a direction of travel of the first laser light between the first optical path and a second optical path different from the first optical path, a reflector including a light-reflecting surface configured to move along the second optical path and reflect the first laser light traveling through the second optical path, and a photoreceptor configured to receive first interference light of the second laser light and third laser light generated by reflection of the first laser light on an object to be measured, and second interference light of the second laser light and fourth laser light generated by reflection of the first laser light on the light-reflecting surface and output a light-receiving signal.

First claim

What is claimed is:

1. A laser interferometer comprising:
a light source configured to emit first laser light;
a beam splitter configured to split the first laser light in a first part of the first laser light towards an optical modulator and a second part of the first laser light towards an optical path switching unit;
the optical modulator including a vibrator and configured to modulate, by the vibrator, the first part of the first laser light into second laser light having a different frequency;
the optical path switching unit disposed in a first optical path through which the second part of the first laser light travels and configured to switch a direction of travel of the second part of the first laser light between the first optical path and a second optical path different from the first optical path;
a reflector including a light-reflecting surface configured to move along the second optical path and reflect the second part of the first laser light traveling through the second optical path; and
a photoreceptor configured to
receive first interference light of the second laser light and third laser light generated by reflection of the second part of the first laser light on an object to be measured, and second interference light of the second laser light and fourth laser light generated by reflection of the second part of the first laser light on the light-reflecting surface, and
output a light-receiving signal.

2. The laser interferometer according to claim 1 , wherein
the optical path switching unit includes
a mirror configured to move to a first position and a second position, and
an actuator configured to move the mirror,

the first position being a position in which the mirror changes a direction of travel of the first laser light, and
the second position being a position in which the mirror does not change the direction of travel of the first laser light.

3. The laser interferometer according to claim 2 , wherein
the light-reflecting surface is configured to vibrate in simple harmonic motion along the second optical path, and
La≥λ/8, given La as a displacement amount of the light-reflecting surface and λ as a wavelength of the first laser light.

4. The laser interferometer according to claim 3 , wherein the reflector is a piezoelectric element or a micro-electromechanical systems (MEMS).

5. The laser interferometer according to claim 4 , wherein the reflector includes a light-reflecting surface driving portion configured to move the light-reflecting surface.

6. The laser interferometer according to claim 5 , comprising:
circuitry for demodulating information derived from the object to be measured from the light-receiving signal configured to:
divide the light-receiving signal into a first signal and a second signal,
propagate the first signal and the second signal,
detect an amplitude of the first signal,
detect an amplitude of the second signal,
record an automatic gain control (AGC) coefficient based on the amplitude of the first signal and the amplitude of the second signal when the optical path switching unit switches the direction of travel of the second part of the first laser light to the second optical path, and
adjust the amplitude of the second signal based on the AGC coefficient when the optical path switching unit switches the direction of travel of the second part of the first laser light to the first optical path.

7. The laser interferometer according to claim 5 , comprising:
circuitry for demodulating information derived from the object to be measured from the light-receiving signal configured to:
divide the received signal into a first signal and a second signal,
propagate the first signal and the second signal,
detect an amplitude of the first signal,
detect an amplitude of the second signal,
calculate, from the light-receiving signal, an index related to the optical modulator based on a correlation between a waveform of the light-receiving signal and the index and record the index when the optical path switching unit switches the direction of travel of the second part of the first laser light to the second optical path, and
calculate an automatic gain control (AGC) coefficient from the index and, when the optical path switching unit switches the direction of travel of the second part of the first laser light to the first optical path, adjust the amplitude of the second signal based on the AGC coefficient.

8. The laser interferometer according to claim 3 , wherein the reflector includes a light-reflecting surface driving portion configured to move the light-reflecting surface.

9. The laser interferometer according to claim 2 , wherein the reflector is a piezoelectric element or a micro-electromechanical systems (MEMS).

10. The laser interferometer according to claim 9 , wherein the reflector includes a light-reflecting surface driving portion configured to move the light-reflecting surface.

11. The laser interferometer according to claim 2 , wherein the reflector includes a light-reflecting surface driving portion configured to move the light-reflecting surface.

12. The laser interferometer according to claim 1 , wherein
the light-reflecting surface is configured to vibrate in simple harmonic motion along the second optical path, and
La≥λ/8, given La as a displacement amount of the light-reflecting surface and λ as a wavelength of the first laser light.

13. The laser interferometer according to claim 12 , wherein the reflector is a piezoelectric element or a micro-electromechanical systems (MEMS).

14. The laser interferometer according to claim 13 , wherein the reflector includes a light-reflecting surface driving portion configured to move the light-reflecting surface.

15. The laser interferometer according to claim 12 , wherein the reflector includes a light-reflecting surface driving portion configured to move the light-reflecting surface.

16. The laser interferometer according to claim 1 , wherein the reflector is a piezoelectric element or a micro-electromechanical systems (MEMS).

17. The laser interferometer according to claim 16 , wherein the reflector includes a light-reflecting surface driving portion configured to move the light-reflecting surface.

18. The laser interferometer according to claim 1 , wherein the reflector includes a light-reflecting surface driving portion configured to move the light-reflecting surface.

19. The laser interferometer according to claim 1 , comprising:
circuitry for demodulating information derived from the object to be measured from the light-receiving signal configured to:
divide the light-receiving signal into a first signal and a second signal,
propagate the first signal and the second signal,
detect an amplitude of the first signal,
detect an amplitude of the second signal,
record an automatic gain control (AGC) coefficient based on the amplitude of the first signal and the amplitude of the second signal when the optical path switching unit switches the direction of travel of the second part of the first laser light to the second optical path, and
adjust the amplitude of the second signal based on the AGC coefficient when the optical path switching unit switches the direction of travel of the second part of the first laser light to the first optical path.

20. The laser interferometer according to claim 1 , comprising:
circuitry for demodulating information derived from the object to be measured from the light-receiving signal configured to:
divide the received signal into a first sig

Assignees

• Seiko Epson Corp

Inventors

• Yamada Kohei

Classifications

• G02B26/0833

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title

• G01J2009/0253

  of wavelength · CPC title

• G01J2009/006

  using pulses for physical measurements · CPC title

• G01J9/02 Primary

  by interferometric methods (using interferometers for measuring optically the linear dimensions of objects G01B9/02) · CPC title

• G02B26/002 Primary

  the movement or the deformation controlling the frequency of light, e.g. by Doppler effect · CPC title