Mask plate assembly

Patent metadata

Field	Value
Publication number	US-12312669-B2
Application number	US-202117789173-A
Country	US
Kind code	B2
Filing date	Mar 10, 2021
Priority date	Apr 26, 2020
Publication date	May 27, 2025
Grant date	May 27, 2025

Abstract

A mask plate assembly is provided, including a first mask plate and multiple types of first mask strips having different effective evaporation patterns, where the first mask plate includes a first frame and a first support strip arranged between a set of opposite sides of the first frame, a first hollowed-out portion including multiple first holes is arranged in a first region of the first support strip, and the multiple first holes are used for cooperating with the multiple types of first mask strips for evaporation to form different first functional structures.

First claim

What is claimed is:

1. A mask plate assembly, comprising a first mask plate and a plurality of types of first mask strips having different effective evaporation patterns, wherein the first mask plate comprises a first frame and a first support strip arranged between a set of opposite sides of the first frame, a first hollowed-out portion comprising a plurality of first holes is arranged in a first region of the first support strip, and the plurality of first holes is used for cooperating with the plurality of types of first mask strips for evaporation to form different first functional structures;
wherein the first hollowed-out portion comprises three first holes, and the three first holes comprise a first sub-hole, a second sub-hole and a third sub-hole, wherein the first sub-hole is used for evaporation to form a first functional structure for testing a first property of a first colour light-emitting layer on a display substrate, the second sub-hole is used for evaporation to form a first functional structure for testing the first property of a second colour light-emitting layer on the display substrate, and the third sub-hole is used for evaporation to form a first functional structure for testing the first property of a third colour light-emitting layer on the display substrate.

2. The mask plate assembly according to claim 1 , wherein the number of types of the first mask strips is three, wherein an orthographic projection of the effective evaporation pattern of each of the first mask strips onto the first mask plate is within a corresponding one of the first holes.

3. The mask plate assembly according to claim 1 , further comprising a second mask plate and a plurality of types of second mask strips having different effective evaporation patterns, wherein the second mask plate comprises a second frame and a second support strip arranged between a set of opposite sides of the second frame, a second hollowed-out portion comprising a plurality of second holes is arranged in a second region of the second support strip, and the plurality of second holes is used for cooperating with the plurality of types of second mask strips for evaporation to form different second functional structures.

4. The mask plate assembly according to claim 3 , wherein the second hollowed-out portion comprises two second holes, and the two second holes comprise a fourth sub-hole and a fifth sub-hole, wherein the fourth sub-hole is used for evaporation to form a second functional structure for testing the first property of a first colour auxiliary light-emitting layer on the display substrate, and the fifth sub-hole is used for evaporation to form a second functional structure for testing the first property of a second colour auxiliary light-emitting layer on the display substrate.

5. The mask plate assembly according to claim 4 , wherein the number of types of the second mask strips is two, wherein an orthographic projection of the effective evaporation pattern of each of the second mask strips onto the second mask plate is within a corresponding one of the second holes.

6. The mask plate assembly according to claim 5 , wherein the second mask strips comprises a first sub-mask strip and a second sub-mask strip, the first sub-mask strip is used for forming the second functional structure for testing the first property of the first colour auxiliary light-emitting layer, the second sub-mask strip is used for forming the second functional structure for testing the first property of the second colour auxiliary light-emitting layer, the first mask strips comprises a third sub-mask strip and a fourth sub-mask strip, the third sub-mask strip is used for forming the first functional structure for testing the first property of the first colour light-emitting layer, and the fourth sub-mask strip is used for forming the first functional structure for testing the first property of the second colour light-emitting layer; and
wherein the first sub-mask strip is further used as the third sub-mask strip, and the second sub-mask strip is further used as the fourth sub-mask strip.

7. The mask plate assembly according to claim 1 , further comprising third mask strips having different effective evaporation patterns, wherein a third hollowed-out portion having a plurality of third holes is arranged in a third region on the first support strip on the first mask plate, and the plurality of third holes is used for cooperating with the plurality of types of third mask strips for evaporation to form different third functional structures.

8. The mask plate assembly according to claim 7 , wherein the third hollowed-out portion at least comprises three third holes, the three third holes are used for cooperating with the plurality of types of third mask strips for evaporation to form the third functional structures for respectively testing second properties of the first colour light-emitting layer, the second colour light-emitting layer and the third colour light-emitting layer.

9. The mask plate assembly according to claim 3 , further comprising fourth mask strips having different effective evaporation patterns, wherein a fourth hollowed-out portion having a plurality of fourth holes is arranged in a fourth region on the second support strip on the second mask plate, and the plurality of fourth holes is used for cooperating with the plurality of types of fourth mask strips for evaporation to form different fourth functional structures.

10. The mask plate assembly according to claim 9 , wherein the fourth hollowed-out portion at least comprises two fourth holes, the two fourth holes are used for cooperating with the plurality of types of fourth mask strips for evaporation to form the fourth functional structures for respectively testing the second properties of a first colour auxiliary light-emitting layer, and a second colour auxiliary light-emitting layer.

11. The mask plate assembly according to claim 1 , wherein the first property comprises evaporation position accuracy.

12. The mask plate assembly according to claim 8 , wherein the second property comprises a film thickness, or an optical performance, or an electrical performance.

Assignees

• Chengdu Boe Optoelect Tech Co
• Boe Technology Group Co Ltd

Inventors

• He Panting
• Xiao Leifang

Classifications

• C23C14/24

  Vacuum evaporation · CPC title

• H10K71/70

  Testing, e.g. accelerated lifetime tests · CPC title

• H10K71/166

  using selective deposition, e.g. using a mask · CPC title

• C23C14/042 Primary

  using masks · CPC title

• C23C14/04 Primary

  Coating on selected surface areas, e.g. using masks · CPC title