Electrostatic chuck sheet and electrostatic chuck comprising same

Patent metadata

Field	Value
Publication number	US-12308274-B2
Application number	US-202218281750-A
Country	US
Kind code	B2
Filing date	Mar 14, 2022
Priority date	Mar 12, 2021
Publication date	May 20, 2025
Grant date	May 20, 2025

Abstract

Disclosed is an electrostatic chuck sheet included in an electrostatic chuck for chucking a substrate by using electrostatic force. The electrostatic chuck sheet comprises: a first dielectric layer comprising a polymer material; a first electrode layer, which is arranged on the first dielectric layer and comprises first electrodes made of a conductive metal material; a second electrode layer, which is arranged on the first electrode layer and comprises second electrodes made of a conductive metal material; an interlayer dielectric layer, which is arranged between the first electrode layer and the second electrode layer and comprises a polymer material; and a protective layer, which is arranged on the second electrode layer and comprises a polymer material, wherein the first electrodes and the second electrodes are arranged so as not to overlap each other in the direction perpendicular to the electrostatic chuck sheet.

First claim

The invention claimed is:

1. An electrostatic chuck sheet included in an electrostatic chuck for chucking a substrate by using an electrostatic force, the electrostatic chuck sheet comprising:
a first dielectric layer comprising a polymer material;
a first electrode layer disposed over the first dielectric layer and comprising a first electrode of a conductive metal material;
a second electrode layer disposed over the first electrode layer and comprising a second electrode of a conductive metal material;
an inter-dielectric layer disposed between the first electrode layer and the second electrode layer and comprising a polymer material; and
a passivation layer disposed over the second electrode layer and comprising a polymer material,
wherein the first electrode and the second electrode are disposed to not overlap in a vertical direction of the electrostatic chuck sheet.

2. The electrostatic chuck sheet of claim 1 , wherein at least one of the first dielectric layer, the inter-dielectric layer, and the passivation layer comprises a polymer material having a heat-resisting property at a temperature of 250° C. or more, preferably, at a temperature of 350° C. or more.

3. The electrostatic chuck sheet of claim 1 , wherein at least one of the first dielectric layer, the inter-dielectric layer, and the passivation layer comprises polyimide.

4. The electrostatic chuck sheet of claim 1 , wherein:
the electrostatic chuck sheet further comprises an adhesive layer, and
the adhesive layer is disposed between the first dielectric layer and the first electrode layer and between the second electrode layer and the passivation layer.

5. The electrostatic chuck sheet of claim 4 , wherein the adhesive layer comprises a polymer material having a heat-resisting property at a temperature of 250° C. or more, preferably, at a temperature of 350° C. or more.

6. The electrostatic chuck sheet of claim 1 , further comprising a second dielectric layer disposed under the first dielectric layer and comprising a polymer material.

7. The electrostatic chuck sheet of claim 6 , wherein a thickness of the first dielectric layer is smaller than a thickness of the second dielectric layer.

8. The electrostatic chuck sheet of claim 6 , wherein an area of the first dielectric layer is greater than an area of the second dielectric layer.

9. The electrostatic chuck sheet of claim 1 , wherein the first electrode and the second electrode are alternately disposed in a horizontal direction of the electrostatic chuck sheet.

10. The electrostatic chuck sheet of claim 1 , wherein:
the first electrode comprises a first stem part and a plurality of first branch parts that extend from the first stem part,
the second electrode comprises a second stem part and a plurality of second branch parts that extend from the second stem part,
each of the first branch parts is disposed in a space that is formed between two branch parts, among the second branch parts, and
each of the second branch parts is formed in a space that is formed between two branch parts, among the first branch parts.

11. The electrostatic chuck sheet of claim 10 , wherein each of the first branch parts and each of the second branch parts are disposed to not overlap in the vertical direction of the electrostatic chuck sheet.

12. The electrostatic chuck sheet of claim 1 , wherein the electrostatic chuck sheet further comprises an air hole that penetrates all of the first dielectric layer, the first electrode layer, the second electrode layer, the inter-dielectric layer, and the passivation layer.

13. The electrostatic chuck sheet of claim 1 , wherein the passivation layer has a white color.

Assignees

• Amosense Co Ltd

Inventors

• Lee Jihyung
• Woo Kyungwhan
• Jin Byoungsu
• Dan Sungbaek
• An Youngjun
• Park Seunggon
• Nam Kihoon

Classifications

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/76

  using mechanical means, e.g. clamps or pinches · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H10P72/70

  for supporting or gripping · CPC title