Method for inspecting probe molecule

Patent metadata

Field	Value
Publication number	US-12306105-B2
Application number	US-202318172063-A
Country	US
Kind code	B2
Filing date	Feb 21, 2023
Priority date	Jul 21, 2022
Publication date	May 20, 2025
Grant date	May 20, 2025

Abstract

A method for inspecting probe molecule includes evaluating the formation of the probe molecule at the surface of the graphene by comparing an intensity ratio a1/b1, and an intensity ratio a2/b2. The intensity a1 is of a peak of the first Raman spectrum having a peak top positioned in a first band of not less than 1200 cm −1 and not more than 1500 cm −1 . The intensity b1 is of a peak of the first Raman spectrum having a peak top positioned in a second band of not less than 1510 cm −1 and not more than 1800 cm −1 . The intensity a2 is of a peak of the second Raman spectrum having a peak top positioned in the first band. The intensity b2 is of a peak of the second Raman spectrum having a peak top positioned in the second band.

First claim

What is claimed is:

1. A method for inspecting a probe molecule, the method comprising:
measuring a first Raman spectrum by irradiating an excitation light on a surface of graphene before forming a probe molecule;
performing processing of forming a probe molecule at the surface of the graphene;
measuring a second Raman spectrum by irradiating an excitation light on the surface of the graphene after the processing of forming the probe molecule; and
evaluating the formation of the probe molecule at the surface of the graphene by comparing
an intensity ratio a1/b1 of an intensity a1 and an intensity b1, and
an intensity ratio a2/b2 of an intensity a2 and an intensity b2,

the intensity a1 being of a peak of the first Raman spectrum having a peak top positioned in a first band of not less than 1200 cm −1 and not more than 1500 cm −1 ,
the intensity b1 being of a peak of the first Raman spectrum having a peak top positioned in a second band of not less than 1510 cm −1 and not more than 1800 cm −1 ,
the intensity a2 being of a peak of the second Raman spectrum having a peak top positioned in the first band,
the intensity b2 being of a peak of the second Raman spectrum having a peak top positioned in the second band.

2. The method according to claim 1 , wherein the formation is determined to be good when the intensity ratio a2/b2 is greater than the intensity ratio a1/b1.

3. The method according to claim 1 , wherein
the excitation light is laser light having a wavelength of not less than 600 nm.

4. The method according to claim 1 , wherein
the first Raman spectrum and the second Raman spectrum are measured by irradiating the excitation light on the surface of the graphene in a dry state.

5. The method according to claim 1 , wherein
the first Raman spectrum and the second Raman spectrum are measured by irradiating the excitation light at a same position of the surface of the graphene.

6. The method according to claim 1 , wherein
the processing of forming the probe molecule at the surface of the graphene includes:
supplying, onto the surface of the graphene, an aqueous solution in which the probe molecule is dissolved; and
subsequently drying the aqueous solution.

7. A method for inspecting a probe molecule, the method comprising:
measuring a first Raman spectrum by irradiating an excitation light on a surface of graphene before forming a probe molecule;
performing processing of forming a probe molecule at the surface of the graphene;
measuring a second Raman spectrum by irradiating an excitation light on the surface of the graphene after the processing of forming the probe molecule; and
evaluating the formation of the probe molecule at the surface of the graphene by comparing
an intensity ratio a1/b1 of an intensity a1 and an intensity b1, and
an intensity ratio a2/b2 of an intensity a2 and an intensity b2,

the intensity a1 being of a peak of the first Raman spectrum having a peak waveform positioned at 1300 cm −1 ,
the intensity b1 being of a peak of the first Raman spectrum having a peak waveform positioned at 1600 cm −1 ,
the intensity a2 being of a peak of the second Raman spectrum having a peak waveform positioned at 1300 cm −1 ,
the intensity b2 being of a peak of the second Raman spectrum having a peak waveform positioned at 1600 cm −1 .

8. The method according to claim 7 , wherein the formation is determined to be good when the intensity ratio a2/b2 is greater than the intensity ratio a1/b1.

9. The method according to claim 7 , wherein the excitation light is laser light having a wavelength of not less than 600 nm.

10. The method according to claim 7 , wherein
the first Raman spectrum and the second Raman spectrum are measured by irradiating the excitation light on the surface of the graphene in a dry state.

11. The method according to claim 7 , wherein
the first Raman spectrum and the second Raman spectrum are measured by irradiating the excitation light at a same position of the surface of the graphene.

12. The method according to claim 7 , wherein
the processing of forming the probe molecule at the surface of the graphene includes:
supplying, onto the surface of the graphene, an aqueous solution in which the probe molecule is dissolved; and
subsequently drying the aqueous solution.

Assignees

• Toshiba Kk

Inventors

• Miki Hiroko
• Sugizaki Yoshiaki
• Tomizawa Hideyuki

Classifications

• G01J3/44

  Raman spectrometry; Scattering spectrometry {; Fluorescence spectrometry} · CPC title

• G01N21/65 Primary

  Raman scattering · CPC title