Sensor

Patent metadata

Field	Value
Publication number	US-12305987-B2
Application number	US-202217821275-A
Country	US
Kind code	B2
Filing date	Aug 22, 2022
Priority date	Feb 24, 2022
Publication date	May 20, 2025
Grant date	May 20, 2025

Abstract

According to one embodiment, a sensor includes a base body, a first fixed portion, a movable portion, a connecting portion, and a first fixed electrode. The first fixed portion is fixed to the base body. The movable portion is provided around the first fixed portion and includes first to third partial regions. The first partial region is annular. The second partial region is annular. The second partial region is provided between the first partial region and the first fixed portion. The third partial region is annular. The third partial region is provided between the first and second partial regions and centered on the first fixed portion. The third partial region includes a first movable portion electrode. The connecting portion is provided between the first fixed portion and the second partial region. The first fixed electrode is fixed to the based body and faces the first movable portion electrode.

First claim

What is claimed is:

1. A sensor, comprising:
a base body;
a first fixed portion fixed to the base body;
a movable portion provided around the first fixed portion in a first plane crossing a first direction from the base body to the first fixed portion, the movable portion including:
a first partial region being annular, the first partial region being centered on the first fixed portion,
a second partial region being annular, the second partial region being provided between the first partial region and the first fixed portion and centered on the first fixed portion, and
a third partial region being annular, the third partial region being provided between the first partial region and the second partial region and centered on the first fixed portion, the third partial region including a first movable portion electrode;

a connecting portion provided between the first fixed portion and the second partial region, the connecting portion connecting the second partial region to the first fixed portion, a first gap being provided between the base body and the movable portion, and between the base body and the connecting portion; and
a first fixed electrode fixed to the based body, the first electrode facing the first movable portion electrode,
a second area of the second partial region on the first plane being not less than a first area of the first partial region on the first plane,
wherein
the first partial region extends, along a radial direction, from the third partial region to an edge of the movable portion, and
the second partial region extends, along the radial direction, from the connecting portion to the third partial region.

2. The sensor according to claim 1 , wherein the second area is 1.2 times or more the first area.

3. The sensor according to claim 1 , wherein
the third partial region includes a first fixed electrode hole provided with the first movable portion electrode, and
the first fixed electrode passes through the first fixed electrode hole.

4. The sensor according to claim 1 , wherein the first fixed electrode faces the first movable portion electrode in the first plane.

5. The sensor according to claim 1 , wherein
the first movable portion electrode is one of a first comb tooth electrode pair, and
the first fixed electrode is other of the first comb tooth electrode pair.

6. The sensor according to claim 1 , further comprising a second fixed electrode fixed to the base body,
the third partial region including a second moving portion electrode,
the second fixed electrode facing the second movable portion electrode, and
the second fixed electrode being located between the second partial region and the first fixed electrode.

7. The sensor according to claim 6 , wherein
the third partial region includes a second fixed electrode hole provided with the second movable portion electrode, and
the second fixed electrode passes through the second fixed electrode hole.

8. The sensor according to claim 6 , wherein the second fixed electrode faces the second movable portion electrode in the first plane.

9. The sensor according to claim 1 , further comprising a second fixed portion fixed to the base body,
the third partial region including a second fixed portion hole, and
the second fixed portion passing the second fixed portion hole.

10. The sensor according to claim 1 , wherein
a plurality of the first movable portion electrodes and a plurality of the first fixed electrodes are provided,
the first movable portion electrodes are arranged in a circle centered on the first fixed portion, and
the first fixed electrodes are arranged in a circle around the first fixed portion.

11. The sensor according to claim 10 , further comprising a plurality of third fixed electrodes fixed to the base body,
the third partial region including a plurality of third movable portion electrodes, and
one of the third fixed electrodes facing one of the third movable portion electrodes.

12. The sensor according to claim 11 , wherein the third fixed electrodes and the first fixed electrodes are arranged alternately along a circle centered on the first fixed portion.

13. The sensor according to claim 1 , further comprising a controller,
the controller being configured to apply a voltage between the movable portion and the first fixed electrode.

14. The sensor according to claim 13 , wherein the controller is configured to vibrate the movable portion by applying an AC voltage between the movable portion and the first fixed electrode.

15. A sensor, comprising:
a base body;
a first fixed portion fixed to the base body;
a movable portion provided around the first fixed portion in a first plane crossing a first direction from the base body to the first fixed portion, the movable portion including:
a first partial region being annular, the first partial region being centered on the first fixed portion,
a second partial region being annular, the second partial region being provided between the first partial region and the first fixed portion and centered on the first fixed portion, and
a third partial region being annular, the third partial region being provided between the first partial region and the second partial region and centered on the first fixed portion, the third partial region including a first movable portion electrode;

a connecting portion provided between the first fixed portion and the second partial region, the connecting portion connecting the second partial region to the first fixed portion, a first gap being provided between the base body and the movable portion, and between the base body and the connecting portion; and
a first fixed electrode fixed to the based body, the first electrode facing the first movable portion electrode,
a second length of the second partial region along a radial direction being not less than 2 times a first length of the first partial region along the radial direction, the radial direction passing the first fixed portion and being along the first plane,
wherein
the first partial region extends, along a radial direction, from the third partial region to an edge of the movable portion, and
the second partial region extends, along the radial direction, from the connecting portion to the third partial region.

16. The sensor according to claim 15 , wherein the second length is 2.5 times or more the first length.

17. A sensor, comprising:
a base body;
a first fixed portion fixed to the base body;
a movable portion provided around the first fixed portion in a first plane crossing a first direction from the base body to the first fixed portion, the movable portion including:
a first partial region being annular, the first partial region being centered on the first fixed portion,
a second partial region being annular, the second partial region being provided between the first partial region and the first fixed portion and centered on the first fixed portion, and
a third partial region being annular, the third partial region being provided between the first partial region and the second partial region and centered on the first fixed portion, the third partial region including a first movable portion electrode;

a connecting portion provided between the first fixed portion and the second partial region, the connecting portion connecting the second partial region to the first fixed portion, a first gap being provided between the base body and the movable portion, and between the base body and the connecting portion; and
a first fixed electrode fixed to the based body, the first electrode facing the

Assignees

• Toshiba Kk

Inventors

• Kaji Shiori
• Gando Ryunosuke
• Tomizawa Yasushi

Classifications

• G01C19/5733 Primary

  Structural details or topology · CPC title

• G01C19/5712 Primary

  the devices involving a micromechanical structure · CPC title