Optical device for coupling light and method for fabricating the same

Patent metadata

Field	Value
Publication number	US-12298565-B2
Application number	US-202318331184-A
Country	US
Kind code	B2
Filing date	Jun 8, 2023
Priority date	Feb 22, 2021
Publication date	May 13, 2025
Grant date	May 13, 2025

Abstract

An optical device for coupling light propagating between a waveguide and an optical transmission component is provided. The optical device includes a taper portion and a grating portion. The taper portion is disposed between the grating portion and the waveguide. The grating portion includes rows of grating patterns. A first size of a first grating pattern in a first row of grating patterns is larger than a second size of a second grating pattern in a second row of grating patterns. A first distance between the first row of grating patterns and the waveguide is less than a second distance between the second row of grating patterns and the waveguide.

First claim

What is claimed is:

1. An optical device for coupling light propagating between a waveguide and an optical transmission component, the optical device comprising:
a taper portion; and
a grating portion, the taper portion being disposed between the grating portion and the waveguide, and the grating portion comprising groups of grating patterns spaced apart from one another, wherein the groups of grating patterns comprise trapezoid-shaped grating patterns, and at least one group of grating patterns among the groups of grating patterns include step-shaped sidewalls.

2. The optical device as claimed in claim 1 , wherein the groups of grating patterns are arranged along an arc path.

3. The optical device as claimed in claim 1 , wherein the groups of grating patterns comprise a first group of grating patterns and a second group of grating patterns located between the first group of grating patterns and the waveguide.

4. The optical device as claimed in claim 3 , wherein the grating patterns in the first group of grating patterns are of a same first size, and the grating patterns in the second group of grating patterns are of a same second size.

5. The optical device as claimed in claim 4 , wherein the first size is smaller than the second size.

6. The optical device as claimed in claim 3 , wherein a pitch between the grating patterns in the first group of grating patterns is constant.

7. The optical device as claimed in claim 3 , wherein a first pitch between the grating patterns in the first group of grating patterns is greater than a second pitch between the grating patterns in the second group of grating patterns.

8. The optical device as claimed in claim 1 , wherein the grating portion further comprises groups of modulating patterns disposed between the taper portion and the groups of grating patterns.

9. An optical device, comprising:
a waveguide,
a grating portion, the grating portion comprising first groups of grating patterns and second groups of grating patterns, a first interval between the first groups of grating patterns is different from a second interval between the second groups of grating patterns, wherein at least one group of the grating patterns among the first and second groups of grating patterns comprise trapezoid-shaped grating patterns, and at least one group of the grating patterns among the first groups of grating patterns include step-shaped sidewalls.

10. The optical device as claimed in claim 9 further comprising a taper portion disposed between the grating portion and the waveguide, wherein a first edge of the taper portion connects to the waveguide.

11. The optical device as claimed in claim 10 , wherein the taper portion has a second edge opposite to the first edge, and the second edge is an arc-shaped edge.

12. The optical device as claimed in claim 9 , wherein the second groups of grating patterns are located between the first groups of grating patterns and the waveguide.

13. A method, comprising:
forming a dielectric layer on a semiconductor substrate;
forming a light-guiding material layer on the dielectric layer, the light-guiding material layer comprising a waveguide and a grating coupler, the waveguide comprising an end portion, wherein the grating coupler comprises a first portion optically coupled to the end portion of the waveguide and a second portion optically coupled to the first portion, and the second portion comprises groups of grating patterns;
filling gaps between the grating patterns with a filling element, wherein the groups of grating patterns comprise trapezoid-shaped grating patterns, and at least a portion of the gaps includes step-shaped sidewalls.

14. The method as claimed in claim 13 , wherein the groups of grating patterns comprise a first group of grating patterns arranged along a first arc path and a second group of grating patterns arranged along a second arc path, and the first group of grating patterns and the second group of grating patterns are formed at a same level height.

15. The method as claimed in claim 14 , wherein a first interval between the first group of grating patterns is different from a second interval between the second group of grating patterns.

16. The method as claimed in claim 13 , wherein the filling element is formed to be in contact with the grating patterns.

17. The method as claimed in claim 13 , wherein the second portion further comprises modulating patterns disposed between the first portion and the groups of grating patterns.

18. The method as claimed in claim 13 , wherein the second portion further comprises a first modulating structure and a second modulating structure disposed between the first portion and the groups of grating patterns, the first modulating structure comprises a first group of modulating patterns, and the second modulating structure comprises a second group of modulating patterns, and a first size of a first modulating pattern in the first group of modulating patterns is smaller than a second size of a second modulating pattern in the second group of modulating patterns, wherein a first distance between the first modulating structure and the end portion of the waveguide is less than a second distance between the second modulating structure and the end portion of the waveguide.

19. The method as claimed in claim 18 , wherein the filling element is formed to cover the modulating patterns and extend into gaps between the modulating patterns, and portions of the gaps between the modulating patterns include step-shaped sidewalls.

20. The method as claimed in claim 13 , wherein the filling element is formed to cover an upper surface of the light-guiding material layer and fill the gaps between the grating patterns.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Chern Chan-Hong
• Lin Chih-Chang
• Jou Chewn-Pu
• Shih Chih-Tsung
• Kuo Feng-Wei
• Cho Lan-Chou
• Hsu Min-Hsiang
• Song Weiwei

Classifications

• G02B6/124 Primary

  Geodesic lenses or integrated gratings · CPC title

• G02B6/30

  for use between fibre and thin-film device · CPC title

• G02B6/29317

  Light guides of the optical fibre type · CPC title

• G02B6/305 Primary

  and having an integrated mode-size expanding section, e.g. tapered waveguide · CPC title