Hybrid glass plastic flow cell and fabrication methods

Patent metadata

Field	Value
Publication number	US-12296333-B2
Application number	US-202218003284-A
Country	US
Kind code	B2
Filing date	Feb 18, 2022
Priority date	Feb 22, 2021
Publication date	May 13, 2025
Grant date	May 13, 2025

Abstract

Provided herein include various examples of a method for manufacturing aspects of flow cell. The method may include performing chemical processes on a surface of the patterned wafer to prepare the surface of the patterned, singulating the wafer into individual dies, orienting each die on a temporary substrate, where the orienting creates spaces between each individual die, and molding a material over the spaces to create a hybrid wafer comprised of glass and molded material. The method may also include bonding two of the hybrid wafers together, forming a bonded wafer stack.

First claim

What is claimed is:

1. A method comprising:
for each patterned wafer of at least two patterned wafers:
performing chemical processes on a surface of the patterned wafer to prepare the surface of the patterned wafer to add specific chemical functionality to the surface;
singulating the wafer into individual dies, wherein each individual die comprises an active area of a given flow cell;
orienting each die on a temporary substrate, wherein the orienting creates spaces between each individual die; and
molding a material over the spaces such that a top surface of the molded material is contiguous with a portion of the top surface of each active area to create a hybrid wafer comprised of glass and molded material; and
bonding a first hybrid wafer formed from a first patterned wafer of the at least two patterned wafers to a second hybrid wafer formed from a second patterned wafer of the at least two patterned wafers, wherein the bonding couples the top surface of the molded material of the first hybrid wafer to the top surface of the molded material of the second hybrid wafer, forming a bonded wafer stack.

2. The method of claim 1 , wherein the two or more patterned wafers are selected from the group consisting of: circular wafers and non-circular panels.

3. The method of claim 1 , wherein the two or more patterned wafers comprise glass.

4. The method of any of claim 1 , wherein the singulating comprises perforating the patterned wafer utilizing a technique selected from the group consisting of: laser dicing the patterned wafer, saw dicing the patterned wafer, and scribe and break processing the patterned wafer.

5. The method of claim 1 , wherein the orienting is accomplished by utilizing a pick and place process.

6. The method of claim 1 , wherein the bonding comprises utilizing a double-sided adhesive, wherein a thickness of the double sided adhesive creates a space between the top surface of the molded material of the first hybrid wafer and the top surface of the molded material of the second hybrid wafer, for a fluidic channel.

7. The method of claim 1 , further comprising:
dicing the bonded wafer stack to form at least one flow cell.

8. The method of claim 1 , wherein molding the material over the spaces comprises overmolding the material on the temporary substrate and curing the material.

9. The method of claim 1 , wherein each flow cell of the at least one flow cell comprises between 1 to 6 active areas.

10. The method of claim 1 , wherein performing the chemical processes comprises:
treating the surface of the patterned wafer;
coating the surface of the patterned wafer with a hydrogel; and
polishing the surface of the patterned wafer.

11. The method of claim 1 , wherein singulating the wafer into the individual dies comprises:
singulating the wafer into an initial set of singulated dies; and
singulating each die of the initial set of singulated dies into one or more pieces, wherein the one or more pieces of each die of the initial set of singulated dies comprise the individual dies.

Assignees

• Illumina Inc

Inventors

• Ziebarth Jonathan
• Aday Jon
• Crivelli Paul
• Kreindl Gerald
• Sharma Amit

Classifications

• B29C2045/0094

  injection moulding of small-sized articles, e.g. microarticles, ultra thin articles · CPC title

• B29C45/14778

  the article consisting of a material with particular properties, e.g. porous, brittle · CPC title

• B01L2300/0896

  Nanoscaled · CPC title

• G01N21/6428

  Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" (in vivo A61B5/00; immunoassay G01N33/53) · CPC title

• G01N21/645

  Specially adapted constructive features of fluorimeters · CPC title